Smooth Cylinder/Low Speed Cylinder

Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8

Air Cylinder

x 1.25 15 29 1/8 11 81 11 M6 x 0.75 10+0.08 0 5 1 6.5 15 123 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12+0.08 0 5.5 1 7.5 24 123 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14+0.08 0 6 1.25 8.5 24 144 50 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16+0.08 0 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18+0.08 0 11.5 3 14.5 24 167 80 10 22 M22 x 1.5 23 80

5

11 11 D-A59W 13 13 13 14 14 15 D-A3m/A44 9 9 10 11 11 11 D-Y59m/Y69m D-Y7P/Y7mV D-Y7mW/Y7mWV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5m/J59 D-F5mW/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 DValues which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) M4 x 31 (Flat nickel plated) SY3000-11-24 VQZ SY5000 SY5000-11-10 VQD SY7000 SY7000-11-9 Note 2) For SY9000, the SUP port is only available on the end plate side. SY9000-18-2 (M3 x 42) SY9000 SY9000-11-1 VFS Plug (white) VS Insert into unused cylinder ports and SUP/EXH ports. The minimum order quantity is 10 pieces.

CG1

11 11 12 11 11 10 10 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 Note) The drawing below shows the single acting/spring return style.

Metal Seal/Rubber Seal Series VQ Body Ported

8 7 6 5 4 3 2 1 U side VQD P P A A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

Air-hydro Unit

nominal size (mm) Limited flow (dm3/min) Standard effective oil level stroke (mm) 100 300 750 200 600 1510 3660 300 890 2260 5490 400 1190 3010 7320 500 1480 3770 9150 600 4520 10980 700 12810 800 14640 50 150 63 100 160 36 88 217 Limited flow shows the limit of converter oil level speed (200 mm/s) which can maintain stability of converter oil level.

CNA

11 13 16 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 X 1.75 6 7 7 11 11 14 18 18 22 26 With rod boot (mm) (mm) ZZ (One) ZZ (Both) Bore (mm) 40 50 63 80 100 Bore (mm) 40 50 63 80 100 Stroke range (mm) e M MM N P Q H S T V W ZZ f h l 37 to 39.5 42 to 44.5 50 to 51.5 59.5 to 62.5 66.5 to 69.5 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 11 11 14 17 17 M14 X 1.5 M18 X 1.5 M18 X 1.5

CC

Data (A) Volume of Cylinder/Capacity of Converter 160 140 180 125 300 250 800 700 600 200 Selection Step 100 10,000 8,000 6,000 5,000 4,000 500 400 Step (1) Select the bore size of air-hydro cylinder 80 300 First of all, select a bore size from data (D) .

Base Mounted Metal Seal/Rubber Seal Series VQ

SOL.A () () (+) (+) 15 13 6 stations SOL.B SOL.A () () (+) (+) 11 9 7 stations SOL.B Connector terminal no.

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Thermo-chiller

Displays the unit of displayed pressure (default setting: MPa). 11 Changing pressure unit Pressure unit can be changed. MPa PSI r [REMOTE] lamp Enables remote operation (start and stop) by communication.

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

11 11 11 21 21 1/8 1/4 1/4 3/8 3/8 1/2 35 40 43.5 43.5 56 56 27 27 31.5 31.5 38 38 19 19 19 19 23 23 1.7-34 End Lock Series MBB With Mounting Bracket Foot(L)/Locking at head end (Hl) Wl Hl/ Rl (mm) Port Cushion valve Stroke range Bore size (mm) ZZ LS ZZ LZ LY LX LT LS LH LD Y X 32 40 50 63 80 100 up to 700 178 144 170 50 53 32 3.2 136 30 7 9 22 LY up to 800 196 158 183 55 59 38 3.2 145 33

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Mechanically Jointed Rodless Cylinders

11 14 Applicable cylinder Model Mounting directionq C1 D1 F1 K1 16 19 20 Applicable cylinder Model Mounting direction q C1 D1 F1 K1 10 10.5 11 11 Q1 B1 A1 Q1 B1 A1 MY340 MY350 MY363 MY316 MY320 MY325 MY332 MYAJ16 MYAJ20 MYAJ25 MYAJ32 MYAJ40 MYAJ50 MYAJ63 29 34 38.5 47 68 81 90 106 34 40.5 45 53 18 20 24 30 88 102 112 128 5.5 6 6.5 6.5 56 69 86 130 156 186 65 78 93 32 40 50 162 192 226 9.5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1

HRX-OM-I051

Recommended torque: 12.5 Nm (9.22 ft-lbf) Grounding terminal Earth bar Main breaker Figure 3-11 Connection of Power Cable and Grounding Terminal [Tips] See Table 3-1 Power Cable and Main Breaker (This System) on page 3-8 for torque value. 9. Attach the breaker cover to the breaker. 10. Attach the front panel. 11.