5 Port Solenoid Valve Series VQZ1000/2000/3000 pitch: 12.5) L1 (3.2) C6: 52.6 N7: 56.4 (Station 1) (Station n) 104.2 [108.6] 95.6 [100] 47.8 [50] 1 0 PWR 7 6 20 14 9 8 COM 15 (11) (7.5) 58.8 [65.8] Connector locking pin SI unit (Remove before wiring the connector assembly.)
4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.
to 16) Note) 4 0 0.1 When closed: 11 When opened: 15 +0.2 0.5 19 Note) Range within which the fingers can move when it returns to origin.
nickel plated) Gasket M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SY3000-11-25 SX5000 SY5000-11-15 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.
CSA C22.2 No. 0-M91, CSA C22.2 No. 94-M91, CSA C22.2 No. 142-M1987, CSA C22.2 No. 157-92, CSA C22.2 No. 213-M1987, CSA C22.2 No. 60079-0:11, CSA C22.2 No. 60079-11:11, CSA C22.2 No. 60079-15:12, CSA C22.2 No. 60529:05, ANSI/ISA 60079-0: 2009, ANSI/ISA 60079-11: 2012, ANSI/ISA 60079-15: 2012, FM 3600 November 1998, FM 3610 October 1999, FM 3611 October 1999, FM 3810-2005, ANSI/ NEMA 250:1991
0 10 NBR Seal 11 Stainless steel Bias spring !9 u 12 NBR O-ring 13 NBR Seal q Resin 14 Bowl assembly @2 Silicone rubber y 15 Resin Sub-plate OUT SUP 16 NBR Seal !
socket head cap screw) SAC2000, #15 SAC2503, #15 SAC4000, #15 SAC4006, #15 SAC5000, #15 B240 B340 B440 B540 B640 AF3000, AL3000 AFM3000, AFD3000 B340A 32 8 39 1.5 40 35 6.5 53 2.3 22.5 3.25 4.5 19 M5 X 10 l (Hexagon socket head cap screw) AF4000, AL4000 AFM4000, AFD4000 B440A 38 47 2 54 47 8.5 70 2.3 31.5 4.25 5.5 20 10.5 M5 X 10 l (Hexagon socket head cap screw) AF4000-06, AL4000-06 B540A
Refer to the Specific Product Precautions. 0.5 45.5 1.5 50 Z ZZ H G (NN 1) x H 11.5 29 11.5 29 B A 5.1 9.5 11 11 5H9 depth 5 +0.030 0 30 NN x M6 x 1 thread depth 12 A B 6 HA GA Section AA Section BB 5H9 depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 N 4 4 4 4 6 6 6 8 8 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 GA
8 (L) B 7 8 22 3 9 7.5 14.6 7 9.8 MXQ 8 (L) 15 M6 x 1 M3 x 8 M3 x 10 29.5 MXQ-AS 8( L)-X11 F 25 39.5 MXQ-AS 8 (L)-X12 E 5 23.5 G MXQ-AS12 (L) MXQ12 (L) M8 x 1 M4 x 12 M4 x 12 9.5 12 29 4 14 11 18.5 10.5 12.7 15 33.5 MXQ-AS12 (L)-X11 C 25 MXQ-AS12 (L)-X12 43.5 5 24.5 MXQ-AS16 (L) Table mounting section MXQ16 (L) M10 x 1 11 14 36 5 17 M5 x 16 M5 x 16 15 13.5 21 13 15 34.5 MXQ-AS16 (L)-X11
11 11 3 CA GA BA CB GB GC F D BB A 3 NN Z T S NA M3 x 0.5 MM Bore size NB NDh8 8-0.022 H 9.5 9.5 7 0 18.3 15 15 15 15 15 16 10 6 28 28 28 17 17 20 M8 x 1.0 57.5 83 82 85.5 20.5 20.5 24.5 18.3 12 20 14 5 4 8 8 8 5 5 12 10-0.022 0 55 54 5 5 M4 x 0.7 M10 x 1.0 12-0.027 0 M5 x 0.8 M12 x 1.0 With air cushion With air cushion type is not available for 21/ 22CJ2.
(mm) GC F D BB A 10 16 15 15 15 18.3 12 18.3 14 20 4 5 8 8 5 5 11 11 CA GA BA CB GB 5 5 NN Z 82 83 54 55 M4 x 0.7 M5 x 0.8 S NB NDh8 20.5 20.5 9.5 9.5 10-0.022 0 MM Bore size H 28 28 17 20 NA M10 x 1.0 12-0.027 0 M12 x 1.0 With air cushion With air cushion type is not available for 21-/22-CJ2.
54 64 72 Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke(mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8
SOL.A SOL.A () (+) () (+) 11 11 Station 6 Station 6 SOL.B SOL.B () (+) () (+) 12 12 SOL.A SOL.A () (+) () (+) 13 13 Station 7 Station 7 SOL.B SOL.B () (+) () (+) 14 14 SOL.A SOL.A () (+) () (+) 15 15 Connector Manufacturers Example Station 8 Station 8 SOL.B SOL.B () (+) () (+) 16 16 SOL.A SOL.A HIROSE ELECTRIC CO., LTD.
CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124
W .TOea TT XIUS ' Z ZZ l ~/ t ~ ~ 20 27 Y. 42 11 20 45 153 8 15 !
Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 15-1-11 for Precautions on every series. Caution Grounded 1.
"Sl module must be orderd separately "11 11 stations Includes 1 station 10 mount Sl unit.
54 10 24 22 28 35 36 11 6.6 50 9 11 12 15 12 50 65 12 33 30 32 45 45 12 63 11 12 15 16 52 67 14 37 35 40 50 50 15 9 80 11 12.5 14 18 16 66 86 18 47 40 50 60 63 15 100 18 20 13.5 50 60 70 71 15 19 11 76 96 20 55 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5
12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82
MXQR-CS 6-X11 25.5 5 MXQR-CS 8 18 B 7 8 3 22 9 MXQR 8 7.5 16.6 14.6 8 9.8 M6 x 1 15 MXQR-CS 8-X11 M3 x 8 M3 x 10 28 F 25 MXQR-CS 8-X12 38 5 MXQR-CS12 22 E G MXQR12 M8 x 1 M4 x 12 M4 x 12 9.5 12 4 29 14 11 20.5 18.5 11 13 15 MXQR-CS12-X11 32 C MXQR-CS12-X12 25 42 MXQR-CS16 5 23 Table mounting parts MXQR16 M10 x 1 MXQR-CS16-X11 11 14 5 36 17 M5 x 16 M5 x 16 15 13.5 23 21 13.5 16 33 Q MXQR-CS16