SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

Air Slide Table Series MXS

MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 56 Air Slide Table Series MXS The graphs below show the

CG1

4.5 6 125 101 100 28.5 30 188.5 (202.5) 197.5 (211.5) +l CJP 60 (74) 65 150 121 120 192 (206) 201 (215) +l Note) ( ): Long stroke CJ2 Flange (mm) CM2 Stroke range Rear flange ZZ Bore (mm) FT FD FX F E B C85 Without rod boot With rod boot Front Rear 20 25 32 40 50 63 80 100 112 118 120 132+l 140+l 142+l 6 7 7 8 9 9 11 14 5.5 5.5 6.6 6.6 9 11 11 14 28 32 38 46 58 70 82 100 2 2 2 2 2 2 3 3

Floating Joint

20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

CRQ2

D20Size Page 10 15 20 30 40 Series Variations Rotating angle 80 to 100 170 to 190 Single shaft S Shaft type Double shaft W Standard Made to Order 11-8-2 to 11-8-9 None Rubber bumper Cushion Air cushion With auto switch Variations 20Copper-free Single shaft with four chamfers X Double shaft key Y Double shaft with four chamfers Z 11-8-10 Shaft type 11-8-11 Single round shaft T Double shaft

Profile Design ISO/VDMA Air Cylinder Series CP95

11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

55 25 30 99 75, 100, 125, 150, 200 M5 x 0.8 depth 10 M8 x 1.25 depth 14 9.5 depth 6 25 30 85 16.5 13 16 6.6 54 113 35 65 100 26.5 70 130 65 30 35 109 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 32 35 100 19 16 16 6.6 60 118 35 80 106 29 80 135 73 35 40 129 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 40 40 120 22 19 19 9 75 150 50 100 134 32 95 170 93 45

REA/REB

10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 7 12 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 50 63 1000 1000 Recommended driving force Fn (N) Recommended driving force Fn (N) 500 400 500 300 300 200 200 Usable range 100 100

SFOD-OMT0009CN

13 No.SFOD-OMT0009CN-B 3.6 (1) View(V) parameter Actuator selection 14 No.SFOD-OMT0009CN-B (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 (a) ) LEY16RA-75LEY16RALEY16RA-100 (b) LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 (c) 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 15 No.SFOD-OMT0009CN-B Execute (Apply) 3.6 (2) 16 No.SFOD-OMT0009CN-B (

Compact Cylinder with Air Cushion

73 55 30 to 100 M FV 80 11 11 99 116 134 20 53.5 77 83.5 63.5 40 to 100 100 11 11 117 136 154 22 53.5 94 98 76 40 to 100 4-FD FT L FX FZ B + Stroke A + Stroke Rod end male threads Rod end nut L1 Rear flange type/RQG, RDQG Rear flange type mm Bore size (mm) Stroke range (mm) L1 L A FV M 33.5 8 63 72 30 to 100 43.5 10 80 84.5 40 to 100 B + Stroke 4-FD 43.5 12 100 99 40 to 100 L FT FX FZ A +

SMC Pneumatic Clean Series

-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum

SV

200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600

Support Guide/11-LEFG Series

Dimensions: Ball Screw Drive 11-LEFG16-S 4 x M4 x 0.7 thread depth 6.4 3H9 (+0.025 0 ) depth 3 24 40 (72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33 (40) 21.7 20 n x 3.5 Vacuum port M5 x 0.8 x 5 34 B D x 100 (= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180 11-LEFG16-S-150 244 157 230

JXCx-OMY0004

/s 4-7 DWORD Position Basic parameter "Stroke(-)" "Stroke (+)" (5, 11, 14) 0.01mm 8-9 WORD Acceleration 1 to Max ACC of the basic parameter (5, 11, 14) 1mm/s2 10-11 WORD Deceleration 1 to Max DEC of the basic parameter (5, 11, 14) 1mm/s2 12-13 WORD Pushing force (5, 11, 14) 1% (Thrust setting 14-15 WORD Trigger LV (5, 11, 14) 1% value) 16-17 WORD Pushing (5, 11, 14) 1mm/s speed 18-19 WORD

Rotary Cylinder Series MRQ Size: 32, 40 1

Size/Standard stroke (mm) Rotating angle 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to pages 11-10-18 to 11-10-19 for middle and long strokes other than standard stroke.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

10, 15, 25 10, 15, 20 125 to 160 125 to 160 125 to 200 12 to 100 80 to 100 63 to 100 40 to 100 32 to 100 40 to 100 32 to 100 32 to 100 20 to 63 20 to 50 20 to 80 16 to 32 10 to 32 12 to 25 20 to 40 20 to 40 20 to 40 20 to 40 32 to 63 25 to 50 25 to 40 25 to 40 6 to 32 32, 40 Bore size 6, 10 10 16 20 25 20 25 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/

MXS

5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L

5 Port Solenoid Valve

mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage Internal current consumption 22.8 to 26.4 VDC 11 to 25 VDC 100 mA or less Power supply for output Power supply voltage Power supply for Power supply voltage communication Internal current consumption D-sub M12 None Built-in M12 Built-in Communication connector specification Terminating