MB

6 7 7 10 10 15 21 21 21 30 30 16 16 16 16 16 16 4 4 5 5 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 -W Stroke range (mm) Bore size (mm) MO N NB P RF S V W WL ZZ S ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 800 to 800 19 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 11 11 11 11 21 21 92 97 106 106 132 132 4 4 5 9 11.5 17 6.5

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

/60 Hz), 200 to 230 VAC (50/60 Hz) Reference page Page 607 533 11-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500

Support Guide/11-LEFG Series

11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] With surge voltage suppressor (Non-polar type) T With light/surge voltage suppressor (Non-polar type) With surge voltage suppressor (Non-polar type) Power saving circuit is not available for W type.

MHZ

point L (mm) Gripping point L (mm) Internal Grip MHZJ2-10D/11-MHZ2-10D MHZAJ2, MHZJ2, 11-MHZ2 Pressure 0.7 MPa Pressure 0.7 MPa 25 0.6 MPa 0.6 MPa 20 Gripping force (N) 0.5 MPa 0.5 MPa 15 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa

MHZ

MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20 0.2 MPa 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) 0.5 MPa

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 125 E5125 20 25 14 94 124

24

Dimensions [mm] Bore size [mm] Standard stroke [mm] A B C DA DB E FA FB G GA GB GC H HA J K L 25, 50 st Over 50 st 25, 50 st Over 50 st 50 25, 50, 75, 100 125, 150, 175, 200 86 110 86 44 20 30 0 24 29.5 12.5 72 14 11 12 160 M10 35 37 50 80 118 151 118 65 25 45 0 33 35 18 95 19 24 14.5 242 M12 47 48 66 Bore size [mm] MM ML NN NL OA OB OC OL P PA PB PW Q QA QB RA RB RR Nil N TF 50 M12 x 1.75

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

26.5 8.5 40 to 100 50 33.5 105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 M6 x 1.0 12 80 18 30 95 6.8 40 40 28.5 75 20 to 35 64 5 6 34 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 32 M6 x 1.0 12 95 28 40 117 7.3 60 Size Without lock With lock VA VB VC VA VB VC 25 115.5 82.5 11 160.5 127.5 11 32 120 80 14 160 120 14 756 Electric Actuator/Guide Rod Type LEYG

Plate Cylinder

Rod end nut material: Carbon steel Surface treatment: Nickel plated ZZ + 2 x Stroke Note) Plugged for the MUB25 (mm) A 22 26 30 35 35 AL 19.5 23.5 27 32 32 B 24 28 32 39 50 BS 42 50 54 64 63 BT M5 x 0.8 depth 7.5 M6 x 1 depth 12 M8 x 1.25 depth 13 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 BX 9 6.5 8 10 11 BY 7 8 9 9 12 C 54 68 86 104 124 D 12 14 16 20 20 ET M5 x 0.8 depth 11 M6 x 1 depth 11

17

50 40 40 32 32 25 22 (10) 22 (10) 25 Load mass m lbs (kg) Load mass m lbs (kg) 20 20 11 (5) 11 (5) 16 16 12 12 2.2 (1) 2.2 (1) 0.22 (0.1) 0.22 (0.1) 10 50 100 200 10 50 100 200 Eccentric distance L (mm) Eccentric distance L (mm) (3) 50 stroke or less, V = 400 mm/s (4) Over 50 stroke, V = 400 mm/s 220 (100) 220 (100) 100 100 110 (50) 110 (50) 80 80 63 63 50 50 22 (10) 22 (10) 40 40 11 (5)

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

Guide Cylinder Series MGG

Bore size (mm) For lock type For non-lock type Bore size (mm) Rod end lock Head end lock Bore size (mm) 20 25 32 40 50 W X Z HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 40 39 157 38.5 12(14) 98(106) 12 37 25.3 11 95 46 46 175 39 12(14) 98(106) 12 40 28.3 11 95 52 46 201 40 12(14) 101(109) 12 43 31.3 11 97 62 56 238 41 12(15) 109(118) 13 52.5 38.3 11 111 75 67 285 47 14(16) 125(137) 14

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Model Auto switch mounting Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM2R20 10-/21-CM2R25 10-/21-CM2R32 10-/21-CM2R40 11-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 1/8 Relief type Vacuum suction type 25, 50, 75,100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 1/4 Non-lube

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

CLA

aize (mm) 40 550 63 80 9 12 80 42 100 51 216 43 11.2 59 224 ~6 20 27 % 42 11 20 45 153 8 60 30 ~ 46 10 21 50 168 0 70 9 12 90 50 11 0 58 238 52 11 .2 66 ""246 y. ~ Siroke 13.5 18 130 76 160 71 297 65 12.5 60 ~ 13.5 18 150 92 180 72 316 65 14.0 81 ~ 11 .5 15 105 59 130 58 255 52 11.2 66 0/. 16 31 ~ 48.5 13 23 60 182 0 86 37 ~. 55 15 23 70 208 0 102 1 14 40 \; 56.5 15 25 80 226 0 116 100

MGG

25 32 40 50 20 25 32 40 50 37 25.3 157 30 40 20 25 32 40 50 12 (14) 21 47.5 107 (115) 11 104 40 28.3 175 37 46 12 (14) 21 48 107 (115) 11 104 43 31.3 201 37 52 12 (14) 21 49 110 (118) 11 106 52.5 38.3 238 44 62 12 (15) 25 53 121 (130) 11 123 58.5 44.5 285 55 75 14 (16) 26 59 137 (149) 16 140 For long strokes Bracket mounting strokes Note) Dimensions inside ( ) are for long strokes.

SMC Pneumatic Clean Series

-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

7ND9071en

The display starts to blink next position (50 % or 20 %).