Pressure Gauge Guide

Note) Use M5 female thread when piping onto a panel. 14-11-10 10 Pressure Gauge Guide Pressure Gauge for Clean Series (10-series) O.D: 44 G49 Installation of a filter on the breathing hole (filtration 3 m) enables an unit to curb particle generation from the pressure gauge inside. Standard Specifications G49 Back side thread R Air 3% F.S.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8

Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

REA/REB

7.5 45 44 16 18 10 9 46 80 8.5 16 21.6 5 9.5 9.5 53 52 21 23 18 9 54 90 8.5 7 4 14 8 16 26.4 6.5 11 9.5 64 64 24.5 12 26.5 26.5 66 7 9.5 110 5 20 8 16 33.6 10.5 14 8 74 30.5 28.5 76 35 130 78 12 10.5 20 5 10 10 8 41.6 25 14 11.5 PA PB PW LD M N L JK NN P MM Model HS HT J REAL15 REAL20 REAL25 REAL32 REAL40 95 7.5 45 70 8 9.5 75 5.6 M5 x 0.8 M6 x 1.0 M5 x 0.8 M8 x 1.0 21 25 90 120 50 5.6 10

REA/REB

N N Z + Stroke REAS15 (mm) A B C D d EA EB FA FB G GP H HA HG Model REAS15 7.5 9.5 5 16.6 12 6 13 3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 REAS25 10 11 6.5 26.4 16 8 14 4 7 8.5 70 54 40 20 REAS32 12.5 14 8 33.6 20 8 16 5 7 9.5 86 66 46 24 REAS40 12.5 14 8 41.6 25 10 20 5 10 10.5 104 76 57 25 HP HS HT J x K L LD M MM N NN Model REAS15 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5

5 Port Air Operated Valve Series SYA3000/5000/7000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

E-P HYREG ® Series VY1 1

Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

VQC

With 4 (5/32") One-touch fitting C4 (N3) Cylinder port sizes Note 3) Side port C6 (N7) With 6 (1/4") One-touch fitting Side port Side port M5 M5 thread Dual flow fitting VVQ1000-52A-C8 Single wiring Special wiring Note 4) specifications Double wiring Description/Model Stations 2 1 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Note 1) Indicate the shutoff position.

MG

4.3 8 4.5 M5 x 0.8 15 10 19 53 37 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 12.5 10.5 25 53.5 37.5 12 10 6 42 11.5 9 93 M5 21 21 30 M6 x 1.0 15 M6 x 1.0 5.6 9.5 5.5 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30 st or less Over 30 st to 100 st Over 300 st 30 st or less Over 30 st to 100 st 23 Over 100 st to 200 st 200 Over 200 st

CXS

7 2-M3 x 0.5 with depth 5 M3 x 0.5 x 10 46 17 44 15 7.5 2-M4 x 0.7 35 20 4 8 20 6 33.6 8.5 7 30 M5 x 0.8 x 5 CXS10 2-4.3 through 2-8 counterbore with depth 4.4 4-M4 x 0.7 with depth 5 M5 x 0.8 x 10 2-M4 x 0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9 2-M5 x 0.8 45 25 5 10 30 8 48 10 10 M6 x 1.0 x 5 CXS15 Strokes Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70,

Fieldbus System

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.

MHZ

14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

14 22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.