Tamper Proof and Flat Head Screw

/32 10-32UNF 6, 10, 16, 20 Universal type AS221F-N01 AS231F-N01 NPT1/8 20, 25, 32 AS221F-N02 AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

HEC-OM-S008

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK UT CR 4.2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

CE

Applicable counter Series CEU5 Connector Nil Z With connector Without connector Fluoro rubber seals: XC22 (Example) CEP1B12100F9NXC22 05 Extension cable CE1-R Mounting bracket part numbers Cable suffix Cable length 05 10 15 20 Cylinder part no.

Vacuum System Peripherals:

Power supply voltage S L Straight type 3 m Right angle type 3 m Without cable connector Flow Characteristics 0 1 24 VDC 12 to 15 VDC N 0 Option Input signal 10 Bracket 0 1 2 3 4 Current type 4 to 20 mA DC Current type 0 to 20 mA DC Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor

JXCx-OMT0061CN

CN4I/O . 19 (1) . 19 (2) . 20 5.4 CN5: . 20 6.

A_HEC-OM-J017

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK UT CR 4-2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

EXxx-OMQ0015CN

mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 4095 5.25 21 4095 10.5 5.25 21 3868 5 20 3901 10 5 20 2048 3 12 2048 5.25 2.625 10.5 228 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 3901 -48No.EX-OMQ0015CN (2) & 2 : 010 V,05 V,020 mA : 15 V,420 mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 2047 5.25 21 2047

Booster Regulator/Air Tank

VBAT10S1 CE Certified Product VBAT 10 F A Q SV CE certified product (Self-declaration document attached) Tank internal capacity VBAT20S1 Internal capacity 5 L 10 L 20 L 38 L Symbol 05 10 20 38 Accessories Symbol Accessories Applicable model Safety valve (Set pressure: 1 MPa) Drain valve VBAT20A VBAT38A RV Safety valve (Set pressure: 2 MPa) Drain valve VBAT05A VBAT10A SV Material Symbol A

IIIIIII

F . 2 20 lbs. (1 ks.)

Mechanical Valves Series NVM, NVFM, NVZNI

F . 2 20 lbs. (1 ks.)

3 Port Solenoid Valve

Indicate part numbers of valve and option beneath the manifold part no. 643 Manifold specifications 10-V100 Common SUP / Common EXH S41 type How to Order Applicable solenoid valve Note) VV100 S41 05 10 M5 10-V11410-V114A10-V12410-V124AApplicable blanking plate assembly V100-77-1A Stations 2 stations 2 port size M5 M5 x 0.8 Clean series 02 2 1 20 20 stations 3 2 Port 1 M5 x 0.8 Port 3 M5

155

-400 KN-10-600 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 17 17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600

HRX-OM-W004

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 16. Press the [] key.

Air Cylinder Series CA2

to 500 30 27 60 22 44 16 32 10 15 M8 x 1.25 6 M14 x 1.5 27 1/4 84 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 M8 x 1.25 7 M18 x 1.5 30 3/8 90 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 M10 x 1.25 7 M18 x 1.5 31 3/8 98 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 10 M22 x 1.5 37 1/2 116 M12 x 1.75 Up to 750 20 to 750 40 37 116 41 92 30 52 14 21 M12 x 1.75 10 M26 x 1.5 40 1/2 126

CL

43.4 11 13 15 18 28 28 28 30 14 16 20 22 16 20 22 30 10 10 10 10 5.5 5.5 6.6 6.6 3.2 3.2 4.5 4.5 25 30 35 40 52.5 39.8 48 57.5 49.4 59.4 66 58.4 71.4 (Hole dia.)

Combination Cylinder

12 16 20 25 15 18 25 31.5 35.5 29.5 38 49 61 64 32 40 40 52 52 10 10 10 14 14 85 95 102 113 124 15 17 17 21 21 26 27 26 30 31 54 59 67 72 76 8 11 11 13 16 10 13 18 23 25 10 12 15 17 19 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 +0.3 +0.1 CB +0.3 +0.1 +0.3 +0.1 CV/MVG +0.3 +0.1 Bore (mm) CXW W/o rod boot W/ rod boot J K KA L LZ MM N

0.4

V, 1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D5080 72 36 5 20 10 45 16 16 11 11 95 90 50 100 D5100 89 41 5 25 10 55 20 20 11 12 115 110 60 125 D5125 110 50 7 30 10 60 25 26 13.5 10 Max. 157 130 70 * Supplied with 4 mounting screws, clevis pin, and clevis pin bracket. l1 Clevis pivot bracket (E) [mm] Bore size [mm] Part no. d2 CK S5 K1 K2 (Max.) l3 (Max.)

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

26 51 28 38 25 5 15 5.5 35 12 12 6.6 6.5 56 52 28 64 32 46.5 27 5 15 6.5 40 12 12 9 8.5 64 60 32 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Max.157 70 110 50 7 30 10 60 25 26 13.5 10 Max.157 130 70 Clevis pivot bracket (E) l3 l1 K2 (Max.) l3 (Max.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

M1 ASR ASQ AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1