RQ

(mm) CD hole H10 Shaft d9 CL CD CT CU CW CX CZ L A B 63 107 55 30 to 100 93 14 8 20 30 22 44 8 80 129.5 63.5 40 to 100 111.5 18 10 27 38 28 56 10 100 155 76 L CU CW RR 40 to 100 133 22 13 31 45 32 64 12 +0.4 +0.2 0.1 0.3 CX CZ B + Stroke CL + Stroke A + Stroke Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 L1 N RR Rod end male thread 63 33.5 M10 x 1.5

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

Slider Type Ball Screw Drive/11-LEFS Series

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

REA/REB

x 0.8 7.5 M8 x 1.0 REAS20 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 M10 x 1.0 REAS25 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0 11 M14 x 1.5 REAS32 64 27 17 M10 x 1.5 x 15 85 8.7 12 M8 x 1.25 11.5 M20 x 1.5 REAS40 74 31 14 M10 x 1.5 x 15 95 8.7 12 M8 x 1.25 10.5 M20 x 1.5 PA P PB PW Q QW S T TT ta tb W Z Model REAS15 M5 x 0.8 30 50 75 75 30 62 12.5 22.5 0.5 1 72 97 REAS20 Rc 1/8 40 70

REA/REB

x 0.8 7.5 M8 x 1.0 REAS20 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 M10 x 1.0 REAS25 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0 11 M14 x 1.5 REAS32 64 27 17 M10 x 1.5 x 15 85 8.7 12 M8 x 1.25 11.5 M20 x 1.5 REAS40 74 31 14 M10 x 1.5 x 15 95 8.7 12 M8 x 1.25 10.5 M20 x 1.5 PA P PB PW Q QW S T TT ta tb W Z Model REAS15 M5 x 0.8 30 50 75 75 30 62 12.5 22.5 0.5 1 72 97 REAS20 Rc 1/8 40 70

CV/MVGQ

Valve Mounted Cylinder Series CV/MVGQ 10, 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Series Variations RE A B Standard variations Bore size (mm) Series Action Page REC With air cushion With strong scraper Built-in One-touch fitting With auto switch Built-in magnet CX Series CVJ5 CY 10 16 10-15-4 Double acting MQQ M RHC Series CVJ3 MK(2) Single acting (Spring return) (Spring extend) 10 16 10-

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

tube O.D.: 8 10 12 1 P 1 P B 2 B 2 B 2 B 2 B 2 VQZ The air outlet and external pilot locations for the built-in silencer type are on the B side (both sides) . + + When P/R ports are designated as B, P/R ports on both sides are open.

CY1

CY1L15, 20, 25, 32, 40 (mm) A B d C D FA FB G H HG HI J JK L EA EB GP HA HB HO HP HS HT LD Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 7.5 9.5 12 5 16.6 3 6 6.5 40 16 14 M6 x 1.0 9.5 75 6 13 65 6.5 4 38 39 25 16 5.6 9.5 9.5 16 5.2 21.6 8.5 46 18 16 M6 x 1.0 10 86 80 9 10 44 45 31 20 5.6 9.5 11 16 6.5 26.4 4 7 8.5 54 23 21 M8 x 1.25 10 86 8 14 90 9 18 52 53 39 20 7 10.5 14 20 8 33.6 5 7 9.5

REA/REB

50 30 20 20 Usable range 10 10 10 Usable range Usable range 5 5 5 1 0 1 2 3 4 5 6 10 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 1 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) B: Maximum speed Load weight chart > 100 80 REAR40 50 40 30 REAR32 REAR25 20 Load weight

AC Servo Motor Driver (Network card type ）

OUTLINE DRAWINGS 9.2 Connector (1) LE-CSNS connector [Unit: mm] E D A C Logo, etc., are indicated here. 39.0 23.8 B 12.7 Connector Shell kit Each type of dimension A B C D E 10120-3000PE 10320-52F0-008 22.0 33.3 14.0 10.0 12.0 Accept wire : AWG 24, 26, 28, 30 9 4 10. CHARACTERISTICS 10.

90

(Tightening torque: 0.75 Nm.) 9) Mount the junction box B to the junction box A. 10) Assemble the valve assembly.

CG5-S

Chemical (Concentration weight %, Temperature C) Symbol FKM (40 to 150C) PVC (10 to 60C) NBR (10 to 60C) PBT (10 to 60C) AI SUS304 Hydrochloric acid (20%, Room temperature) D D B A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulphuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide

High Power Cylinder Series RHC

(10) AS4001F (16) AS320 (13) AS3000, AS3500 (12.3) AS4000 (25.5) AS5000 (74) AS5000 (74) AS5000 (74) AS420 (74) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000

0.4

One-touch fitting C10 [3(R) EXH port] (C12 in case of branch type) C10: 10 One-touch fitting (C12: 12 One-touch fitting) R R DIN rail clamp screw 76.5 60 35 25 10 3 3 X X 49.5 12 B B B B B B B B P12 P 30 1 1 A A A A A A A A 13.5 C10 [1(P) SUP port] C10: 10 One-touch fitting C10 [1(P) SUP port] (C12 in case of branch type) C4, C6, C8, [4(A), 2(B) port] 25 C10: 10 One-touch fitting (C12: 12

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

Magnetically Coupled Rodless Cylinder

C Q + Stroke Shock absorber Shock absorber (mm) d B A H G FB FA D C L JK J HI HG Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 HB HA GP EB EA LD HT HS HP HO 12 9.5 7.5 40 6.5 6 3 16.6 5 75 9.5 M6 x 1.0 14 16 4 6.5 65 13 6 5.6 16 25 39 38 16 9.5 9.5 46 8.5 21.6 5.2 86 10 M6 x 1.0 16 18 10 9 80 5.6 20 31 45 44 16 11 9.5 54 8.5 7 4 26.4 6.5 86 10 M8 x 1.25 21 23 18 9 90 14 8 7 20 39 53 52 20

CLS

7 7 7 6 6 B D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL Proper Auto Switch Mounting Position/ Auto Switch Mounting Height 6 6 5.5 5 5 D-G39/K39 D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL 10 10 10 11 11 Common for each auto switch Since this is a guideline including hysteresis, not meant to be guaranteed.

•

~""" iRR02 , U 10 12 12 21 29.9 46 57 80 91 1.7 3 (ExcePt fOr) U /2,14 13 12 21 29.9 ZPR13 46 57 80 91 3 1.8 1 ,5. C 54 56 ZPR10C I 56 ~PRllII ZPR10 ZPR16U 16 18 12.5 21.5 30.4 46.5 57.5 80.5 91.5 3.5 1.2 C Deep type 54 ZPR13 54 54 mml 54 'y o ' O A ~B Ij G 75 ~ 1 2 10 60 83 94 6 76 2; '" ZPR16D 16 18 15 6 5l 61 84 Z ~6 ~O 75 75 ZPR?S 76 76 76 Apphcable tube mm ZPI!