Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

0 Actuator cable length [m] LEM R Robotic cable (Flexible cable) 1 1.5 A 10 3 3 B 15 5 5 C 20 8 8 Nil Without controller/driver 6N LECP6/LECA6 (Step data input type) NPN 6P PNP 1N LECP12 LEY Cable is shipped assembled. (Programless type) NPN 1P PNP LES Produced upon receipt of order. Refer to the specications Note 5) on page 488.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

port) M5 x 0.8 15.5 48 4 Manual override A B + 35 + B A X PE EA EB P M5 x 0.8 62.8 G: Approx. 300 H: Approx. 600 107.2[111.6] (Pilot EXH port) (Lead wire length) 50.6[57.6] 22 9.5 18 18 28 (P, EA, EB port) 1/4 56 L plug connector (L): 10-SY5240(R)-L-02 M plug connector (M): 10-SY5240(R)-M-02 DIN terminal (D): 10-SY5240(R)-D-02 M8 connector (WO) 10-SY5240

Table of Contents

2 b 0.18 0.33 0.61 0.18 Cv VX2112-01 VX2122-01 VX2132-01 VX2112-02 VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03

5-Port Solenoid Valve

(2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 20 stations) Symbol Stations Note 02 2 stations Double wiring*1 10 10 stations 02 2 stations Specified layout*2 (Up to 20 solenoids available) w Type t SUP/EXH block assembly 20 20 stations 10 Side ported 11 Bottom ported*1 *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used on all

Table of Contents

F (mm) Weight (g) 65 72 81 91 97 112 Port B Min. port size L2 L3 L4 L5 L6 P Q1 Q2 M L1 KM12-04-02-6 6 17 40 89 110 99 125 108 139 1 4 6 4 10 18 29.5 19.5 29 10.6 16 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 17 7.5 6 10 19.5 31.5 21.5 31 13 17 13.5 73 55 3 8 19 9 8 11.5 22.5 35.5 24 34.5 15.5 18.5 14.7 86 Dimensions: KM13 Applicable tubing

SY

D side Type 41P Type 42P SY9000-50-2A-C8 SY9000-50-2A-C10 SY9000-50-2A-C12 SY9000-50-2A-02 SY9000-50-2A-03 SY9000-18-2 SY9000-11-2 C8: A/B port 8 One-touch fitting C10: A/B port 10 One-touch fitting !2 Manifold block assembly 1 C12: A/B port 12 One-touch fitting How to install lead wire cover 02: A/B port Rc 1/4 Lead wire cover is only used for double solenoid valves.

How to Order LER10, 30, 50 Series LER Step Motor (Servo/24 VDC) Electric Rotary Table ®

0 q Table accuracy w Size e Max. rotating torque [Nm] r Rotation angle [] Nil H Basic type 10 30 50 LER50 320 Symbol LER10 310 LER30 LER10 Type 0.3 0.2 LER30 1.2 0.8 LER50 10 6.6 Symbol Nil 2 3 K J High precision type High torque Basic External stopper: 180 External stopper: 90 t Motor cable entry y Actuator cable type u Actuator cable length [m] 8 Nil S R Nil 1 3 5 8 A B C Without cable

V100

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

ZP

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Micro Mechanical Valve Series VM1000

VM120-01-30 (R, B, G, Y) A-X207 VM130-01-30 (R, B, G, Y) A-X207 Panel mounting hole 40 30.5 T.T. 28.6 0.8 to 7.5 3 1.5 1.5 Symbol 2 port (A) 2 R port (3 port only) (97.3) 43.7 12 10 1 (P) (68.7) 3 port (A) 2 5.5 25 10 12 14.5 14.5 1 (P) 3 (R) * 0.5 MPa supply 25.4 2 x 1/8 44 17 2 x 4.6 mounting hole F .O.F .* 27 N T.T. 6.7 mm VM220-02-30 (R, B, G, Y) A-X207 VM230-02-30 (R, B, G, Y) A-X207

ZP

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

4/5 Port Solenoid Valve

) B A 27 A B R1 R2 P Manual override 8.5 34 63.8 13.8 1/4, 1/8 (P, A, B port) (Light/surge voltage suppressor) 57.5[64.5] + 42.1 25.5 20 12 11.5 22 22 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): 10-SYJ7 43-L3 4 5 01 02 M plug connector (M): 10-SYJ7 43-M3 4 5 01 02 DIN Terminal (D): 10-SYJ7 43-D3 4 5 01 02 M8 connector (WO): 10-SYJ7 43-WO3 4 5 01 02 Applicable cable O.D. 3.5 to 7

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

A, B P , EA, EB Passage Porting specifications (A, B) EA, EB P 02 2 stations 03 04 M Mixed 3 8 Symbol VQC 1 2 1 2 1 2 Side Bottom 10 10 stations Common Common VQZ For bottom ported: Rc 3/8 only.

Table of Contents

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

06 M A, B P, R1, R2 Rc 1/2 Rc 3/4 Mixed 10 10 stations Rc 3/4 Note 1) Max. 10 stations.

ZP

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

29.6 5.5 92.6 92.2 x 1 x 10 A A A A A STATION NO. 4.6 83 80 35 83.7 B A B A 116 42 36.6 LRUN PW B RATE LERR.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(R) port SUP (P) port Applicable solenoid valve VF3160-Side ported/Common EXH type Type 61 VV5F3 05 61 1 01 02 VF3163-01 02 Stations 02 2 stations 10 20 stations CYL (A, B) port SUP (P) port EXH port Top ported/Individual EXH type Type 70 Applicable solenoid valve VV5F3 05 70 3 01 02 VF370-CYL (A, B) port Stations 02 2 stations 10 20 stations EXH (R) port SUP (P) port Applicable solenoid

Vacuum Pad

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

Model ZP3-T(015/02/035)U;(J/K)3-@ ZP3-T(015/02/035)U;(J/K)6-@ ZP3-(015/02/035)U; ZP3B-T1(J/K)3-B3 ZP3B-T1(J/K)6-B3 ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3-(10/13/16)UM; ZP3-(10/13/16)B; ZP3B-T2B(J/K)3-B5 Note 1) ; in the table indicates the pad material.