HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

EI/.1, ,t,\/m @l/-, ,t,\tEE t r NVZCUUU Symbol CvO.7 w With Subplate Body po.ted type Base mounted tyPe with subplate NVZ5I20 NVZ5140 J J e4IrF 4uri{F NVZ5220 NVZ5240 r#T--n |r-,,.+ qlA.\lF qll,tr tFN Base mounted type NVZs3:O NVZ534O ^4T7fh rh. ,4TrnND* E l t / . 1 . . , 1 . \ { 6 @ t h L . 1 1 \ l @ __--?

CY1

4 @9 @5 u y t r w @6 #0 !2 o e i !0 q !8 !5 @0 !9 @1 @2 @3 Port Parts list Parts list No. Description Cylinder tube No.

Table of Contents

AC Symbol Specifications DC (1.0 W) (1) Standard type Nil With light/ surge voltage suppressor M: M plug connector With lead wire 3 position closed center (1.5 W) (0.5 W) H (2) High pressure type 3 Note) Low wattage type Y (2) With light/ surge voltage suppressor MO: M plug connector Without connector For power consumption of AC type, refer to page 2-4-36.

Secondary Batteries

Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +

VQ4000

Electrical entry G Body Coil voltage Lead wire length 0.6 m 5: Plug lead sub-plate 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet H Function Nil Y(1) R(2) Standard type (1 W) Low wattage type (0.5 W) External pilot Seal 0 1 Metal seal Rubber seal Note 1) Note 2) Applicable to DC specifications.

IIIIIII

t) 1.79 r45.51 1 . 1 4 (29) 0.31 (8) Millimeters in Parentheses NVMl20-N01-05 130-N01-05 M 1 4 X P I EXH $o I I M A X , G z-Nm h Panel Mounting r \-r,tr, 5.07 lbs (2.3 kg ) P T 0 079 in (2mm) O T 0.059 in (1 5mm) T,T. 0 138 in (3.5mm) F . O F 5.07 lbs. (2 3 kg.)

CLA

111 13 17 I M 26X t.5 Wtthout boot PG H ZZ o. 42 11 20 45 153 8 60 9 12 SO 42 100 51 215 52 \Bore size MM PH PL PW S W FV eFO FT FX FY FZ ) (mm) XI US N P t 40 "I ,~20 27 " 1 50 30 % 46 10 2' 50 168 a 70 9 12 90 50 110 58 237 58 48.5 13 23 60 182 0 86 i-11 .5 15 105 59 130 58 25 ; 58 55 15 23 70 208 0 102113.5 18 130 76 160 71 296 80 f 63 :y ~ . 16 31 % Slroke ~ 65 21.5 80 305 80 37 " 1 100

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m. Example) -2M9NL !

53

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

Series SV

block (m) No.

New

M Conduit terminal 24 VDC With surge voltage suppressor 1/8 3.2 N 100 VAC 1/4 Stainless 5/32 4 steel P 110 VAC 7/32 5.6 Q 200 VAC W 1/8 3.2 X Y 5/32 4 3/8 R 230 VAC 7/32 5.6 S Conduit 24 VDC With surge voltage suppressor C E F 1/8 1/8 3.2 VX2 T 100 VAC 1/8 3.2 U 110 VAC 1/4 5/32 4 V 200 VAC G C37 7/32 5.6 W 230 VAC J 1/8 3.2 K L 3/8 5/32 4 Faston terminal Single 7/32 5.6 3 Size 3 Unit Q

RSQ

ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.

MGP

MXQ MXF m m MXW MXP MG MGP MGQ MGG 25/50 stroke Over 50 stroke 200 200 MGC P=0.5MPa P=0.5MPa MGPS80 MGPS80 MGF 100 100 Load weight m (kg) Load weight m (kg) CY1 MGPS50 MGPS50 50 50 MY1 40 40 30 30 20 20 10 20 30 40 50 100 200 10 10 20 30 40 50 100 200 10 Eccentric distance l (mm) Eccentric distance l (mm) 3.17-31 Series MGPS Construction !6 o i !0 !8 r !1 t !9 !2 !6e q u !4 w !7 !3 @0 !

High Purity Fluoropolymer

Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.

Lightweight and Compact

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

MG

9 w @7 !0 y !2 @5 !1 !7 @6 !0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

Speed Controller with Indicator

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Bore size Stroke H G (Shock absorber stroke) S T W SD TT E Shock absorber EA h EY Stroke adjusting unit EC FA MY2H16 W Applicable cylinder MY2H16 MY2H25 MY2H40 TT 5.6 (MAX. 12) 7.1 (MAX. 18.6) 10 (MAX. 6) SD 6.7 17.7 Shock absorber model RB1007 RB1412 RB2015 E 14.4 17.5 25 h 6 6 EA 7 8.5 13 EC 6 9 13 EY 27 36 57 FA 12.5 19.3 17 S 46.7 67.3 73.2 T 7 12 15 W 23.5 25.8 38 8-13-27 28 Series

C95

e r t y u i o !