Stopper Cylinder

0 w q e r t u !

A_HEC-OM-K001

Remote off alarm 5 Fig.6-4 occurrence 6.1 How to Identify Alarm 6-1 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.2 Alarm indication BLINK E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig. 6-1 Alarm indication in the event ERR14 occurs BLINK E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig. 6-2 Alarm indication in the event ERR14 occurs during PB range setting input LIGHT W R N P

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

Step Motor Controller

-m LECSS2-m L11 L21 For single phase 200 VAC For three phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N W M N() W W P1 P1 PE PE P2 P2 CNP2 CNP2 P P(+) Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

Cylinder with Lock

Lock unit Rod 4 C O N T E N T S Cylinder with Lock CP96N/C96N Series Model Selection p. 6 Working Principle p. 8 CP96N Series VCP96N Series/Double Acting, Single Rod/Double Rod How to Order p. 9 Specifications p. 10 Construction (Single Rod) p. 12 Dimensions (Single Rod) p. 13 Construction (Double Rod) p. 16 Dimensions (Double Rod) p. 17 Auto Switch Mounting p. 23 VAccessories p

Water Regulator

-X224 WR110-02-X215 Inlet pressure: 0.6 MPa Inlet pressure: 0.8 MPa 0.4 0.3 0.4 0.5 0.6 0.7 0.8 Outlet pressure [MPa] Outlet pressure [MPa] 0.3 0.2 0.1 0.2 0.1 Flow rate [L/min] 0 0 Flow rate [L/min] 0 0 1 2 3 4 5 6 1 2 3 4 5 6 Dimensions Construction 40.5 e w u 40.5 y IN OUT r M30 x 1.5 Panel cut dimension 30.5 q t Component Parts No.

MGP

MXQ MXF m m MXW MXP MG MGP MGQ MGG 25/50 stroke Over 50 stroke 200 200 MGC P=0.5MPa P=0.5MPa MGPS80 MGPS80 MGF 100 100 Load weight m (kg) Load weight m (kg) CY1 MGPS50 MGPS50 50 50 MY1 40 40 30 30 20 20 10 20 30 40 50 100 200 10 10 20 30 40 50 100 200 10 Eccentric distance l (mm) Eccentric distance l (mm) 3.17-31 Series MGPS Construction !6 o i !0 !8 r !1 t !9 !2 !6e q u !4 w !7 !3 @0 !

MNB

Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread

MNB

Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread

AC20-A to AC40-A

Example)AC30-F03DM-KSTV-13NR-A q r t y w e q Symbol Bodysize Description 20 25 30 40 Rc NPT G Nil N F Threadtype w + 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 Portsize e + Floattype autodrain a Withoutautodrain N.C.(Normalclose)Drainportisclosedwhenpressureisnotapplied. N.O.(Normalopen)Drainportisopenwhenpressureisnotapplied.

MNB

GL1 T GE VA Rc(PT)P Rear cylinder port Effective thread length S + Stroke H ?

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

HEC_001W-E

When the temp. set in this item is reached, the alarm [ERR12] arises. 7-8 Operation L o w T e m p . C u t o f f M O D E < 0 . 0 C 9. Low Temp.

HEC_W-E

Parity Bit P a r i t y B i t M O D E < W i t h o u t Setting range : Without (no parity), Odd, Even Indicated content : Parity bit (Ex. : Without) Function : Sets parity bit for communication. 4. Data Length Setting range : 7Bits, 8Bits Indicated content : Data length(Ex. : 8Bits) Function : Sets data length for communication. D a t a L e n g t h M O D E < 8 B i t s 5.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Wall mounting z y P. 8-13-5 Wb: MGGLB25-200 (4.35 kg) x y x z Wa: Connection plate t =10 (880 g) MY2H40G-500 3. Ceiling mounting P. 8-13-5 4.

24

V M9NWV M9NW P P P p p IC circuit 3-wire (PNP) M9PWV M9PW P P P p p 2-wire 12 V M9BWV M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC MGT Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 p p P p p IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 p p P p p 2-wire 12 V M9BAV*1 M9BA*1 p p P p p Magnetic field resistant (2-color indicator) 2-wire (Non-polar) P3DWA P P P

NARM Series

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.

LJ1H

5 w e r t @0 !4 !3 !8 !6!7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.

High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) q Bonnet assembly (Maintenance parts)1 Indicator (Option) (Including w, e, y, u, i, o) Port 1(P) (Pressure port) Magnet (Option) Pilot port !