Wedge Cam Operation Provides

MHY2 MHW2 MRHQ Limitations of Holding Point Auto switch MHK2-12l MHKL2-12l MHK2-16l MHKL2-16l MHK2-20l MHKL2-20l MHK2-25l MHKL2-25l 120 60 100 60 Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) 100 50 50 Pressure 0.2MPa 80 Pressure 0.2MPa 40 40 80 Pressure 0.2MPa Pressure 0.2MPa 60 30 30 60 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.3MPa 0.4MPa 0.5MPa

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA

AS

Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Bracket for AS1002F-02 is not available. Prepare DIN rail by user.

XLAQ/XLDQ

0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !

XM, XY

Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L 10211122102111226.5 6.5 10211122102111226.5 6.5 10211122102111226.5 6.5 10211122102111228.5 8.5 755 CQS 2122CQS/ 1011Compact Cylinder Mounting Bolt for CDQS Mounting method: Mounting bolt

Smooth Vent Valve

Chamber XLA XL XVD By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLQ Chamber XM XY DXSA XVD XVD XGT CYV 523 XVD Series Specifications Model XVD2-02V XVD2-02S Valve type Normally closed (Pressurize to open, Spring seal) Fluid Nitrogen, Air, Inert gas, etc.

Speed Controller with One-touch Fittings

Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Bracket for AS1002F-02 is not available. Prepare DIN rail by user.

CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

Compact Cylinder/Guide Rod Type Series CQM

x 30L x 35L x 40L x 45L x 50L M3 x 25L x 30L x 35L x 40L x 45L x 50L M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 110L x 135L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 115L x 140L M6 x 45L x 50L x 55L x 60L x 65L x 70L x

Speed Controller with

Applicable series AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS-10D AS-20D AS-25D AS-30D AS-40D AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Prepare DIN rail by user. Bracket for AS1002F-02 is not available.

•

The standard lead wire length IS 06m.Grommet L IS added for 3m long lead wire (Example) ZSE4B-Ol -25L Port size: 01 stands for R(PT)1/8 and TI tor NPTF1 /8 Both types have M5X0.8 female threads InSide, Option (Available separately) Panel mount adaptor No.

Compact Cylinder Series CQS

Example) Bolt M3 x 25L 4 pcs.

CQS

Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125S 10S CQSB165S 10S CQSB205S 10S CQSB25-5S 10S 6.5 6.5 6.5 8.5 Single acting/Spring extend Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125T 10T CQSB165T 10T CQSB205T 10T CQSB255T 10T 6.5 6.5 6.5 8.5 Note) The

Speed Controller with

Applicable model AS-10L AS1002Fm AS-20L AS2002Fm AS-25L AS2052Fm AS-30L AS3002Fm AS-40L AS4002Fm Part no.

XLGR Series

Bypass valve Construction number: (9) Temperature Specifications Common for all sizes General purpose XLA-16*-X65 For high temperature XLA-16*H0-X65 Note1) Auto switch is not included in the bypass valve. Contact SMC if you need auto switch. Note2) The "*" in the table refers to the pilot valve mounting orientation. Refer to the catalog of drawing for How to Order.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 25l 4 pcs.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 3 3 X 18l 46 38 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 3 3 X 18l 55.5 47.5 4 0.050 0.093 CDP-4A 63 16 Polishing ball 16 4 4 X 25l 71 61 5 0.050 0.093 CDP-5A 80 18 Polishing ball 18 4 4 X 25l 76.5 66.5 5 0.065 0.117 CDP-6A 80 100 20 Polishing ball 20 4 4 X 30l 83 73 5 0.065 0.117 CDP-7A 100 25 Polishing

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 46 3 38 3 X 18l 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 55.5 3 47.5 3 X 18l 4 CDP-4A 0.050 0.093 63 16 Polishing ball 16 71 4 61 4 X 25l 5 CDP-5A 0.050 0.093 80 18 Polishing ball 18 76.5 4 66.5 4 X 25l 5 CDP-6A 0.065 0.117 80 100 20 Polishing ball 20 83 4 73 4 X 30l 5 CDP-7A 0.065 0.117 100 25 Polishing

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model AS-10L AS1002FS AS-20L AS2002FS AS-25L AS2052FS AS-30L AS3002FS AS-40L AS4002FS Part no.