ZQ

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Series M Miniature Fittings M3, R(PT) 1/8, M5

A B Effective orifice(mm2 Weight (g) ) M-5ALHN-4 M-5ALHU-3, -4 M-5ALHN-4 M-5ALHN-6 M-5ALHU-3 M-5ALHU-4 M-5ALHU-6 1.4 2.4 1.1 1.4 2.4 1.8 2.5 1.6 1.8 2.5 8.5 10.5 8 8.8 10.8 5 7 4.5 5 7 12 14 11.5 12.3 14.3 3.2 3.7 3.2 3.3 3.9 M-5ALHN-6 M-5ALHU-6 Hose nipple: M-5H-4, -6 C D Part No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

Activated Carbon Filter

How to Order] (P9) for option and semi-standard symbols -12- 3) AMK40 bowl assembly Semi-standard symbol 6 Semi-standard symbol: "-" Standard Port thread Part No. type Rc C4SK-D G NPT C4SK(-Z)-D Appearance and part No. Semi-standard symbol: "6" Port thread Part No. type Rc C4SK-6-D G NPT C4SK-6(Z)-D Semi-standard symbol 2 Semi-standard symbol: "2" Port thread type Part No.

Refrigerated Air Dryer

B IDFB4E to 15E A Power cable outlet 0.7 [17 mm] Grommet with membrane Signal cable outlet 0.7 [17 mm] Terminal block (Wire diameter 0.4 [9 to 11mm]) Grommet with membrane Power cable outlet 0.7 [17 mm] IDFB4E to 11E_Terminal block C D A B Terminal block Dimensions Unit: inch [mm] A B C D Model B B 9.0 [230] 2.6 [67] 7.0 [179] 1.3 [32] IDFB4E, 6E, 8E, 11E A Power cable outlet 0.7 [17 mm]

Multi-channel Digital Sensor Monitor ( compatible)

System error (Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 24 VDC 10%. (2) Supply power in the range 12 to 24 VDC 10%. "HHH" is displayed. 6 (1) Reset applied pressure to a level within the set pressure range. (1) Check if the pressure exceeds the upper limit of the set pressure range.

XG_-OMV0028

XGT 3 1 2 50336 1 C O 1:FKM 2:Kalrez R 4079 Kalrez R DuPont Performance Elastomers 50336 50mm 336mm 2: 3: 1:1 3:300mm A :0.5m D-A93 C 6 (C016 30C006 100 12:AMP ) (2 ) F 9 D CDE-9PF05 5 - 3. 6 - 3-1 1AB 23 2 3 19 2A 21 23 2B 1B 2C 2 2 3 19 3-2 1A 1B 26 8 9 22 13 12 18 9 27 12 13 18 9 18 , 21O 5 6 7 ASSY O 4 3-3 2A2B CLOSEOPEN 8 9 9 13 12 18

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

IDX-OM-W035

V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 -2 IDX-OM-W035 i i i-1 () 3 i-1-1 3 IDFB Series i-1 i-1 IDX-OM-W035 i i-2 5 . i-2-1 i-2 IDFB Series i-2 IDX-OM-W035 i i-2-2 i-2-3 50 i-2-4 i-2-5 0 i-2 IDFB Series i-3 IDX-OM-W035 i i-2-6 WARNING !

IDX-OM-W020

V 12 V V 12-2 12-1 1. 1 2 2. 3.

Digital Flow Switch (Remote type sensor unit)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0010-J Dimensions PF3W504

AC Servo Motor Driver (MECHATROLINK-II type)

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

Suction cups with flange

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

Digital Flow Switch

-H Lead wire with connector (ZS-33-D) Connector cover (ZS-33-F) Attached the connector cover -68No.PF-OMP0002-H Revision history A: Modified errors in text.

MH-OMY0004

D-M9/ M9W/ Y59/ Y7P/ Y7W D-M9/ M9W/ Y59/ Y7P/ Y7W D-M9 D-M9V L (mm) D-M9 D-M9W D-M9V D-M9WV D-M9A D-M9AV MHY2-10D 3 1 5 3 MHY2-16D 3 1 5 3 MHY2-20D 3 1 MHY2-25D 1 ) 11 8. 1 2 ON ON 1 1),2)1 A 2 B 1),2) C 1 1 12 2) 3) 4) 0.30.5mm 2) 0.30.5mm 0.30.5mm 0.30.5mm 13 2-4. 1.

Safety Speed Control Valve (SSC Valve) Series ASS

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS 12, 16, 20, 25 How to Order B D 30 20 CQS M9BW B D 20 30 CDQS With auto switch Made to Order Refer to page 552 for details.

E-P HYREG ® Series VY1

-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700 1 VY1900 1 Input signal voltage (current) for starting the operation of a pilot valve VY1D0 (direct operated)

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

ChemicalThermo-con

D/MS3102A20-15S Connect the DC cable connector of the heat exchanger. 6 Contact b for upper/lower temp. limit alarm (closed when alarm occurs) A F Alarm output connector D-sub 9 pin (pin type) 7-9 Unused G E B 6. Communication connector: D-sub 9 pin OMRON Corp. XM2D-0901 or equivalent, holding screw M2.6 Connection cable: With shielding 22AWG or more Pin No.