Integrated Controller

H A B C Foot bracket: EQY H -L 16 25 32 LL LT LG LY LH LT X Y LS + Stroke A + Stroke Y X LZ LX 4 x LD Outward mounting Included parts Foot bracket Body mounting bolt Y LS + Stroke X LS1 Foot Bracket [mm] Size Stroke range [mm] A LS LS1 LL LD LG LH LT LX LY LZ X Y 16 30 to 100 106.5 77.1 16.1 5.4 6.6 2.8 24 2.3 48 40.3 62 9.2 5.8 101 to 300 126.5 97.1 25 30 to 100 142.3 104.5 19.8 8.4 6.6

CNG

19.5 17 45 103 1/8 57 16.5 10 96 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 400 20 to 300 301 to 400 38 22 19.5 17 45 104 1/8 57 20 12 97 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 450 20 to 300 301 to 450 47 30 27 19 52 112 1/8 65.5 26 16 104 10 (13) 26 7 11 7 12 8 M6 x 1 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 P K KA M MM S NA PG PH PL LC LD LH LS

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX

CNG

L): With rubber bumper/CNGLN Rc(PT) BP unlocking port Unlocks when pressurized GC GA Rc(PT) P Front cylinder port GK GL GQ FREE GR Unlocking cam (width across flats XA) PG PL Element (width across flats XB) S + Stroke BN H BC Width across flats B1 GB Rc(PT) P Width across flats KA PH BC MM Rear cylinder port LH BZ I D H1 W W Width across flats NA AL LT C0. 1 8-J 4-LD LX LZ Y X M K A X Y LS

17

MY3M SH7 AH7 A6H7 A7H7 LH7 L6H7 L7H7 HH7 H6H7 H7 SH6 AH6 A6H6 A7H6 LH6 L6H6 L7H6 HH6 H6 H7H6 SH AH A6H A7H LH L6H L7H H H6H H7H SL7 AL7 A6L7 A7L7 LL7 L6L7 L7 HL7 H6L7 H7L7 SL6 AL6 A6L6 A7L6 LL6 L6 L7L6 HL6 H6L6 H7L6 SL AL A6L A7L L L6L L7L HL H6L H7L SA7 AA7 A6A7 A7 LA7 L6A7 L7A7 HA7 H6A7 H7A7 SA6 AA6 A6 A7A6 LA6 L6A6 L7A6 HA6 H6A6 H7A6 SA A A6A A7A LA L6A L7A HA H6A H7A Nil AS A6S A7S LS

Proposals for Energy Saving

+ Stroke LZ ZZ + Stroke (mm) Stroke range Bore size (mm) LS ZZ X LD Y LH LT LX LY LZ 40 50 63 138 148 165 190 210 236 24 32 36 0 1 3 9 11 13 34 40 47 19 22 24 80 96 110 100 120 140 63.5 75.5 88 to 1000 to 1000 to 1000 Front flange type (F) 4FD FY B FT FX (mm) FZ Stroke range Bore size (mm) B FT FD FX FY FZ 40 50 63 74 78 100 9 9 12 12 16 16 80 100 112 58 61 75 100 125 138 to 1000 to 1000

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for dre requlator t d@s nol reslrctihe sening of0 2MPa or more Nole 2)For [ls and NPTlheadlpes Accessories AFlO to 60, AR20K io 60K mbedded type pr9!9ctr!9!99$!! Eq1or) I AF20 to 60, AR20K io 60K (w,l!

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX LZ ZZ

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

A6H7 A7H7 LH7 L6H7 L7H7 HH7 H6H7 H7 SH6 AH6 A6H6 A7H6 LH6 L6H6 L7H6 HH6 H6 H7H6 SH AH A6H A7H LH L6H L7H H H6H H7H SL7 AL7 A6L7 A7L7 LL7 L6L7 L7 HL7 H6L7 H7L7 SL6 AL6 A6L6 A7L6 LL6 L6 L7L6 HL6 H6L6 H7L6 SL AL A6L A7L L L6L L7L HL H6L H7L SA7 AA7 A6A7 A7 LA7 L6A7 L7A7 HA7 H6A7 H7A7 SA6 AA6 A6 A7A6 LA6 L6A6 L7A6 HA6 H6A6 H7A6 SA A A6A A7A LA L6A L7A HA H6A H7A Without unit Nil AS A6S A7S LS

1

(each 1 pc. on both sides) With X417 (1 pc.) on L unit side only With X417 (1 pc.) on H unit side only L, H Series: Bore size 16 25 40 LH LH LH LH L, H, LS, HS L, H LH LH X416 Nil T High precision guide type (Single axis) High precision guide type (Double axis) (Example) MY2H40G-300L-A93-X168 X417 Note) For AS, LS and HS, the stroke adjusting unit is mounted on one side only. 8-31-134 8-31

Hydraulic

LH 0.2 d W W C B D E LY 4-LD MM Width across flats G LT NA NB Y X X Y S + Stroke LX B LS + Stroke ZZ + Stroke With rod boot h + l 10 f l e ZZ + l + Stroke (mm) Bore size (mm) A a B B C D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 d E F G GA GB J K LD LH LS LT LX LY M MA MM NA NB 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 M8 x 1.25 10 17 45 23 60

Compact Vacuum Unit

ZB1-PS1-A (PSE541) Rated pressure range Proof pressure Output voltage Output impedance Power supply voltage Current consumption Accuracy Linearity Repeat accuracy Effect of power supply voltage Temperature characteristics 72.5 psi (500 kPa) 1 to 5 VDC Approx. 1 k 10 to 24 VDC10%, Ripple (p-p) 10% or less 15 mA or less 2% F.S.

Compact Hydraulic Cylinder

LH 0.2 d W W mB mC D E LY 4 x LD MM Width across flats G LT NA NB Y X X Y S + Stroke LX B LS + Stroke ZZ + Stroke With rod boot h + l CHQ 10 f l CHKm CHN e CHM CHSm CH2m ZZ + l + Stroke CHA Related Equipment D-m (mm) Bore size (mm) A B a d mB mC D E F G GA GB K LD LH LT LS LX LY MA NA NB MM M J 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074

Electric Actuator with Integrated Guide

. +12 to 24V Note) 4.7k 13 14 1Ry 5mA Servo ON 0V SV-ON 1Ry ON for servo ON 2Ry Proportional control (P actuation) Reverse drive suppression 15 P-CON 2Ry ON for proportional control N-LS N-OT 16 N-LS open for reverse drive suppression P-LS 17 P-OT Normal drive suppression P-LS open for normal drive suppression 3Ry 18 ALM RST Alarm reset 3Ry ON for alarm release 30V DC 50mA or less 5Ry +12

MY1

absorber + Adjustment bolt Stroke adjustment unit Left side Right side Without unit With short spacer With short spacer With long spacer With long spacer L unit Short spacer L unit Long spacer SL7 AL7 A6L7 A7L7 LL7 L6L7 L7 SL6 AL6 A6L6 A7L6 LL6 L6 L7L6 SL AL A6L A7L L L6L L7L SA7 AA7 A6A7 A7 LA7 L6A7 L7A7 SA6 AA6 A6 A7A6 LA6 L6A6 L7A6 SA A A6A A7A LA L6A L7A Without unit Nil AS A6S A7S LS

Sensor Monitor

. -67No.PS-OMU0012-C Table for each pressure specification Applicable SMC pressure sensor Rated pressure range Display/set pressure range Display/min. setting unit PSE550 0 to 2 kPa -0.2 to to 2.1 kPa 0.001 kPa PSE531, PSE541, PSE561 0 to -101 kPa 10 to -105 kPa 0.1 kPa PSE533, PSE543, PSE563, PSE573 -100 to 100 kPa -105 to 105 kPa 0.1 kPa PSE532 0 to 100 kPa -10 to 105 kPa 0.1 kPa PSE564

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Suction Filter Specifications Filtration rating 30m Filtration area 130 2 Pressure sensor specifications/ ZB1-PS-A Model ZB1-PS1-A ZB1-PS3-A (Sensing part: Standard (PSE543) PSE541 model) Rated pressure range 0 to -101kPa -100 to 100kPa Proof pressure 500kPa Output voltage 1 to 5V DC Output impedance Approx. 1 k Power supply voltage 12 to 24 VDC 10%, ripple (P-P) 10% at max.

90

Digital pressure switch for vacuum Construction Exploded View of Manifold Dimensions Specific Product Precautions How to Order Specifications/ Flow-rate Characteristics Port Layout Pressure Sensor/ZK2-PS-A (Refer to the PSE series in Best Pneumatics No. 6 and Operation Manual for details.) 0 to 101 kPa ZK2-PS3-A (PSE543) 100 to 100 kPa Model (Sensor unit: Standard model number) ZK2-PS1-A (PSE541

Sensor Monitor

Table for each pressure specification Applicable SMC pressure sensor Rated pressure range Display/set pressure range Display/min. setting unit PSE550 0 to 2 kPa -0.2 to to 2.1 kPa 0.001 kPa PSE531, PSE541, PSE561 0 to -101 kPa 10 to -105 kPa 0.1 kPa PSE533, PSE543, PSE563, PSE573 -100 to 100 kPa -105 to 105 kPa 0.1 kPa PSE532 0 to 100 kPa -10 to 105 kPa 0.1 kPa PSE564, PSE574 0 to 500 kPa

Multi-channel Digital Sensor Monitor

Cable specification Conductor area 0.15 mm2 (AWG26) Insulator Outside diameter 0.9 mm Sheath Finished outside diameter 4.8 Table for each pressure specification Applicable SMC pressure sensor Rated pressure range Display/set pressure range Display/min. setting unit PSE550 0 to 2 kPa -0.2 to to 2.1 kPa 0.001 kPa PSE531, PSE541, PSE561 0 to -101 kPa 10 to -105 kPa 0.1 kPa PSE533, PSE543, PSE563