Direct Solenoid

5 1 . 1 Eody '/bEooy ,l3lnt|yr.rdudos body and (2) rodd| pltls. v.' Body AlBafiUy lrr|r|dr bodv *rd 12) bqd.n dns. 1sl $!ool A Sbr As,y. 1 Spdn9 A,ICI338 1 -!sqp!r arr$&5 q!!!o 1 Spec6r arr338.l 7 a,rl3s&s Sol. Ga3kt 4xT33314 9. 1 I 115'120 V 5ffi0 Hz 220/2{0 V glto Hz z v 50to Ha a@t{}9 am1-r0 aml{7 I Sol. Cap Arsy. (Rut$r acc68s ptug) I Sol. Cap A3sy. {RacBd nontock op6r.) c. Sol.

modular-press-e

3) IN OUT AR20KP-020AS Check valve assembly Note 4) AR20KP-020AS u r t i Note 1) The AW10 is a piston type.

Modular F.R.L. Pressure Control Equipment

3) IN OUT AR20KP-020AS Check valve assembly Note 4) AR20KP-020AS u r t i Note 1) The AW10 is a piston type.

EX510

The total current for OUT0 to 7 must be 1.5 A or less. The total current for OUT8 to 15 must be 1.5 A or less. Meet the following 3 conditions: 1. 0.5 A or less per point 2. 1 A or less per unit 3. The total current for OUT0 to 7 must be 1 A or less. The total current for OUT8 to 15 must be 1 A or less.

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

Stability of suction position,

1 o !1 i Component Parts r r No.

SZ3000

B ports) [With external pilot] 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X,PE ports) Applicable tube O.D.: 6 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Locking style (Slotted) Except for VQZ 1000 0.6 0.7 (A) 4 1 (P) 5 (R) Except for VQZ 1000 N.O.

ZP3

w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

P R A B A B A B A B A B 30 R P R 21 21 83.7 [85.9] 84.5 [86.7] 17 21 60 1/4 (P, R port) Manual override 1/8 (A, B port) (Pitch) P = 19 23.5 Built-in one-touch fitting (Station n) (Station 1) (Light/surge voltage suppressor) One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" 58.5 [65.5] + + + + + 43.1 26.5 (4.9) 63 L plug connector (L) M plug connector (M) DIN terminal

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

3 Port Solenoid Valve Series SYJ300/500/700

(For details, refer to page 8.) 3 Series SYJ300 Construction (A) 2 (A) 2 N.C. N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

-fl Seies

,qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

MGG

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Restrictor Installed Fitting

Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: w/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Option 1: W/Unit Display Switching Function, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Boklet, X Options: Lead Wire Length 3m

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w