IDX-OM-M051

4 Checks and inspection 4 1 Daily check . 4 1 4 2 Parts requiring regular maintenance . 4 1 4 2 1 Maintenance of the water-cooled condenser . 4 1 4 2 2 Maintenance of auto drain . 4 5 4 2 3 Maintenance of timer type solenoid valve with auto drain (Option V) . 4 8 4 2 4 Maintenance of operating time accumulator . 4 8 Chapter 5 Troubleshooting 5 1 Troubleshooting . 5 1 5 2 Reset of protective

IDX-OM-W094

//www.smcworld.com/ IDX-OM-W094 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

Magnetically Coupled

Dimensions Attached from top 6, 10 (1/4", 3/8") Note 2) Attached from bottom: MD Body 6, 10 (1/4", 3/8") (inch) F Note 1) R Note 2) M PA MD MM LA C L B W HB Model A HA NCY3B6 (1/4'') NCY3B10 (3/8'') NCY3B15 (5/8'') NCY3B20 (3/4'') NCY3B25 (1'') NCY3B32 (1-1/4'') NCY3B40 (1-1/2'') NCY3B50 (2'') NCY3B63 (2-1/2'') 0.47 No.5-40UNC 0.59 1.38 0.67 0.71 0.43 0.39 0.25 0.10 0.67 No.5-40UNC

Table of Contents - Tubing

I.D. 435 4 6 8 10 12 TFU0425-2-Length per roll-10-X4 TFU0604-2-Length per roll-10-X4 TFU0805-2-Length per roll-10-X4 TFU1065-2-Length per roll-10-X4 TFU1208-2-Length per roll-10-X4 2 to 8 2 to 8 2 to 6 2 to 3 2 to 3 2.5 4 5 6.5 8 290 Max. operating pressure 145 0 4 32 68 104 140 W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) Operating temperature F Reel

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

4 !8 !

KT10

4 ports 4 ports V 4) Pressure gauge unit MPa or psig/bar selectable.

CQM

4 !5 !6 !

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth of counterbore 3) Motor cable 42 70 (122) L (62) A (Table traveling distance)2 10 62 55 64 [(66)]4 (66) [64]4 Stroke 70 [Origin]4 2 [(4)]4 (4) [2]4 Origin3 (59.9) (8.5) 48 (59.9) (63) 30 Auto switch groove5 M4 x 0.7 thread depth 8 (F.G. terminal) 6.5 46.8 63 (1 row per side) 7.5 15 B D x 150 (=

Digital Flow Switch (Integrated display type) ( compatible)

Option Part number Remarks ZS-40-K Taptite screw for PF3W704/720 (3 x 8), 4 pcs. Bracket ZS-40-L Taptite screw for PF3W740 (3 x 8), 4 pcs. ZS-40-M Taptite screw for PF3W711 (4 x 10), 4 pcs.

Soft Start-up Valve AV2000/3000/4000/5000

C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS

Air Catch Sensor Series ISA

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 5.5 35 35 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge Connection thread GC3 4 4 AS G36 01 Nil

XM, XY

D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87

•

I Wear ring Plastic I C 1 A040-07-305 W Cushion packing A NSR f1j Cushion packing B NBR MC-20 CM-050-16-128 CM-063-16-129 C 1 AQ50-07 -306 C 1 A063-07-307 MC-25 MC-20 I MC-25 @) Gasket for cushion valve NSR CK40-1697 @I Gasket for speed controller NBR iii) Detecting rod packing NSR CK40-1697 DYR5K 14(1.

Large blow and

air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8 74.5 6 90 78 6.5 92 47 2.3 42 Rc3/8 76 500 250 310 Note 1) This thread portion is intended to adjust the product characteristics.

CE

CE1 Series/ 1. / 1 1.5 *3) *3)1 1 () 1. 2. 3. a. b. c. 4. a. b. c. 6. 1. 7. a.060 b.2585%RH c. d. e. 8. ,, f. g.( 9. ) h. i. j. k. l. 2. 1. 2. 1. 3 2. 1. 3. 4. 1. 12:0.071.0MPa 2063:0.051.0MPa :060 5. 2. 1. 5m 1. 2. 2. 3.

VP300/500/700

VT Port size Type of actuation VP342 VP344 VP542 VP544 VP742 VP744 Port size Rc Without sub-plate Nil VP Symbol Common use to normally closed and normally open (Pilot) 4 VG Body type 01 1 8 02 1 4 03 3 8 1 2 04 Body ported 2 Base mounted 4 VP Valve option VP344, VP544, or VP744 only.

VP4

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

250 C Voltage output 1.04 V 1 V 5 V 300 kPa 200 Current output 4.16 mA 4 mA 20 mA 750 kPa Flow [L/min] Output 150 Rated flow [L/min] Min.