CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 - 1Specification LEKFS*G Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 50 to 800 50 to 1000 150 to 1200 Horizontal 15 28 40 40 50 68 26 60 75 Work load [kg] Note2) Vertical 3 7.5 15 4 10 18 4.5 4.5 25 Up to 400 20 to 1500 12 to 750 6 to 500 24 to 1300 16 to 1000

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

Product weight [kg] Model Stroke Additional weight with lock Size 50 75 100 150 8 1.06 1.23 0.16 16 1.87 2.26 0.32 25 3.50 4.10 4.90 0.61 -5- 1.3 Construction LESYH*R / LESYH*L R type as shown L type opposite as shown Case of D type Component parts No. Description Material Remarks No.

JXCx-OMY0006

Controller and Peripheral Devices/Specific Product Precautions 75 18.1 Design and selection 75 18.2 Handling Precautions 76 18.3 Mounting 77 18.4 Wiring 77 18.5 Power supply 78 18.6 Grounding 78 18.7 Maintenance 78 -3No. JXC-OMY0006-A 19. Troubleshooting 79 20. Handling of sent/received data 85 21. Definitions and terminology 86 -4No. JXC-OMY0006-A JXC9H/Controller 1.

JXCx-OMX0009

The move to the position set in Step No. 2 is completed. 50mm Pushing completed position End position 75 - 14.

SFOD-OMT0005CN

OFF (SVRE OFF )[LK RLS]DC24V LK RLS LK RLSDC24V LK RLS (EMG) /(LEC ) -73- 18 18.1. / JXC91EEPROM1,000,000 -74- 18.2 ON 5 () -75- 18.3 18.4 () -76- 18.5 18.6 D(100) 18.7 -77- 19 ,, (), YES NO JXC LED 1 MSNS 2 ALM 3 (LEC-W2) 4 5 -78- No. 3(P.12) 5(P.23) SVON ON PWR() 1 LED 5. (P.23) 6.

JXCx-OMT0062

INP is turned ON. 75 - 14.2 Operating procedure for operation by numerical instruction Operation by numerical instruction is possible in all modes. The following shows an example in the half numerical data instruction mode.

Electrostatic Sensor Monitor

Measurement distance or 0.4 kV sensor is settable within 10 to 50 mm, 20 kV sensor within 25 to 75 mm. Distance can be changed by 1 mm. Upper/lower limit of measurement range depends on measured distance. Peak values and bottom values wire reset when measures distance is changed. Drawing above shows 0.4 kV sensor.

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

XLF Series

Note3) We do not guarantee the quality if the seal material is changed by customer. 6 XL*-OMJ0003-D Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

Air Combination

35.5 0 50 75.2 40 55 9 18 7 50 65 1/4, 3/8, 1/2 AC40C-06-D 1/8 235.4 149.1 35.5 38.4 77.6 75 35.5 0 50 80.2 40 55 9 18 7 50 65 3/4 Options Semi-standard specifications Metal bowl with Digital level gauge With PC/PA bowl Metal bowl Square Round type Round type Round type Model pressure auto embedded type pressure gauge pressure gauge pressure gauge pressure gauge With barb With drain With

LA-OMP0023

Fig. 4-1 Thrust force characteristics (guideline). 1.2 Allowable load weight Wmax Card motor 1.0 Work load Travel direction 0.8 Mounting angle 0.6 [kg] 0.4 LAT3-10-20 0.2 LAT3-30 0.0 0 15 30 45 60 75 90 (Horizontal) (Vertical) Mounting angle [] Note) LAT3-50 is applicable mounted horizontally only.

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

MONOSASHI-KUN

The cylinder section does not have a water resistant enclosure. 3-3 Allowable Kinetic Energy 3-3-1 Allowable Kinetic Energy (J) Bore size(mm) 12 20 32 40 50 63 Allowable Kinetic EnergyE 0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 Mass of Cylinder Movable Parts (g) Cylinder stroke (mm) Bore size(mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 28 33 38 43 48 53 20 70 84 98 112 126 140 154 168

AIR COMBINATION

155.9 42.5 42.5 188.9 151.6 156.1 171.6 22 Standard specifications Bracket mount Model P1 P2 A B C E F G J M N Q1 Q2 R S U V AC20C-A 1/8 126.4 87.6 23.5 41.6 40 23.4 30 43.2 24 33 5.5 12 3.5 29 1/81/4 AC25C-A 1/8 167.4 115.1 23.5 30 55.1 50 30.5 41 57.2 35 7 14 4 41 1/43/8 1/43/8 AC30C-A 1/8 167.4 115.1 27 30 55.1 50 30.5 41 57.2 35 7 14 4 41 AC40C-A 1/8 220.4 147.1 33.5 38.4 72.6 75

Fieldbus system PROFINET compatible SI Unit

Y Connector 75 11.3. Seal cap 77 11.4. Joint pack 79 12. Dimensions 80 12.1. The Modules Manifold 80 13. Troubleshooting 81 13.1. EX245-SPN1A/SPN2A/SPN3A 81 13.2. EX245-DX1 83 13.3. EX245-DY1 83 13.4. EX245-LA1/LB1 84 3 No.EX-OMW0011-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

XLG Series

Note3) We do not guarantee the quality if the seal material is changed by customer. 6 XL*-OMI0010-E Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials

MHZ

) are dimensions for the single acting type. 16 2-M4 x 0.7 thread depth 4.5 (Mounting thread) +0.025 0 3H9 depth 3 0.02 6.5 17H9 depth 2 +0.043 0 4-M4 x 0.7 thread depth 8 (Mounting thread) 5 0 -0.1 Prepared hole dia. 3.4 through (Mounting hole) Note) 30.6 47 24 22 0.02 11 31 (36) 0 -0.4 +2.2 0 45.2 (50.2) 15 When open 26.9 When closed 14.9 0.05 15 7.5 23.6 2-M4 x 0.7 thread depth 8 70 (75

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

PD PC Supply port 2-P FF FE EB EA D FC FA GA FG FB FD GD HA, HB GC GB C B A 87 117 105 135 165 125 155 185 215 270 250 310 Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 59 79 72 92 112 86.5 106.5 126.5 144 184 165 205 28 38 33 43 53 38.5 48.5 58.5 71 91 85 105 6 (Effective depth 2.5) 19 20 30 28 38 48 32 42 52 55 75 64 84 16