XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

High Vacuum L Type Valve

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

XMC/XYC Series

Specifications Model Note 1 XMC-16 XMC-25 XYC-25 XMC-40 XYC-40 XMC-50 XYC-50 XMC-63 XYC-63 XMC-80 XYC-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Double acting(Dual operation) , pressurize to open/close Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6

XMD/XYD Series

Model XMD-25 XYD-25 XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 Flange (valve) size 25 40,CF070 50 63,CF114 80 Actuating type Normally closed(Pressurize to open, spring seal)[both main & initial exhaust valves] Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type: 5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Main pumping

XMH/XYH Series

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

CYV_EN

The temperature for baking before operation must be set to 150 deg.C or less. If it is operated in a lower pressure environment, the grease applied to the guide will evaporate too much, which may affect the endurance and contaminate the chamber.(The cylinder should not be operated during baking.) 5. Air source 1. Use clean compressed air or inactive gas.

Return Filter

(Note1) (Petroleum,Water-glycol, Emulsion,Phosphoric ester) Applicable model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 INOUT Port size (Rc) 3/4B 1B 1 1/4B 1 1/2B 2B 2 1/2B 3B Drain port size M162 Rated flow Paper 50 80 120 160 260 450 600 rate Micromesh 60 100 150 200 300 550 700 (L/min) Operating pressure 1.0MPa Operating temperature 80oC Nominal filtration 1.

IP8001 Series

Deviation value (%) P value : -100 to 200 S value : -50 to 150 button Fig. 20 Manual Mode Operation As it is shown in Fig. 21, the opening of an actuator can be voluntarily controlled by using the UP button and Down button ( ) in manual mode. While pressing the UP button or the DOWN or button ( ), the display shows an input value (the target setting value for the actuator).

IP8101 Series

Deviation value (%) P value : -100 to 200 S value : -50 to 150 button Fig. 21 Manual Mode Operation As it is shown in Fig. 22, the opening of an actuator can be voluntarily controlled by using the down -button and up-button ( ) in manual mode.

K35-OMX0029

Faster Average speed [mm/s] Measuring conditions Supply pressure: 0.55 MPa 0 50 100 150 125-250 160-300 Bore size-Stroke 200-300 250-450 320-530 Speed adjustment rotary switch set value 0 5 9 Mounting: Vertical downward Load: no-load Operating direction: Upward *1 The average speed value is the stroke divided by the full stroke time.

HRX-OM-W032

Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150

Heat Resistant Solid State Auto Switch

(between lead wire and case) Ambient temperature Sensor unit: 0 to 150 oC, Amplifier unit: 0 to 60 oC Enclosure Sensor unit: IP67, Amplifier unit: IP63 (IEC60529) Standards CE, RoHS -17No.D-S-OMS0002-B Dimensions -18No.D-S-OMS0002-B Revision history A: Modified errors in text. B: Add the note.

CG1-SMV13_en

This person should also continuously review all specifications of the product referring to its latest catalogue information, with a view to giving due consideration to any possibility of equipment failure when configuring the equipment. 100 0.05 0.09 0.15 0.24 0.39 0.64 1.00 125 0.07 0.11 0.18 0.29 0.47 0.76 1.20 150 0.08 0.13 0.21 0.34 0.54 0.89 1.30 200 0.10 0.17 0.28 0.44 0.70 1.10 1.70

Compact Rotary Actuator

Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.

Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

Low-Speed Rotary Actuator

170to190 Port size M50.8 Rc 1/8 , G 1/8 NPT 1/8 , NPTF 1/8 Output (Nm) { At 0.5MPa } 0.3 0.75 1.8 3.1 5.3 Table 2 Allowable kinetic energy and adjustment range of rotating time Rotating speed adjustment range having Size Allowable kinetic energy stable operation J s/90 10 0.00025 0.7 to 5 15 0.00039 20 0.025 1 to 5 30 0.048 40 0.081 Weight Table 3 Weight (g) Weight * Size 90 180 10 120 150

MHS

120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400 1 N 16 28 47 82 130 204 359 525 mm 4 4 6 8 8 12 16 20 g 95 150

MH-OMY0004

MHY2-10D MHY2-16D MHY2-20D MHY2-25D [mm] 10 16 20 25 [MPa] 0.10.6MPa [] -1060 [mm] 0.2mm [c.p.m] 60 c. p. m [Nm] 0.16 (1.6) 0.54 (5.5) 1.10 (11.2) 2.28 (23.3) (0.5MPa ) 180 ( ) -3 ) g 70 150 320 560 ) 5 2. 2-1. 1. ( ) 2. 3. 2-2. 1. 2.