This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Series MXQ Air Slide Table /Symmetric Type 114 Air Slide Table Series MXQ Dimensions MXQ 25L/Symmetric Type 115 Series MXQ Air Slide Table Auto Switch/Proper Mounting Position at Detection of Stroke End 116 Air Slide Table Series MXQ Made To Order 117
-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.
type=GUIDE&id=XLA-E" target="_blank">here. (Details on the XL series valve with a heat-resistant auto switch can also be found in the new XL series catalog.) 
Part Number Description: INTERNAL O-RING FOR XLAQ-40 Product Line: Z Product Line Description: VACUUM SERIES Click here to report information errorImage shown may not match exact part number
Part Number Description: INTERNAL O-RING FOR XLAQ-25 Product Line: Z Product Line Description: VACUUM SERIES Click here to report information errorImage shown may not match exact part number
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79
Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79
Valve type 1 Non-cassette type 2 Cassette type Standard Cassette type Half MESK Cassette type Full MESK 3 4 Symbol XLA Valve type XL XLQ Made to Order specifications (For details, refer to page 534.)
Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
MHQ MHL2 MHC2-25l MHR MHK MHS MHC2 MHT2 MHY2 MHW2 MRHQ Auto switch Note) When signal acting type is used, one side port is bleed port and adjusting needle for finger speed is not attached. When auto switch is used, through hole mounting type is not available.
Applicableseries AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS-10D AS-20D AS-25D AS-30D AS-40D AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DINrailmounting bracket L-bracket PrepareDINrailbyuser. BracketforAS1002F-02isnotavailable. Partno.listofthreadedstudkitformanifold Detailsofthreadedstudkitformanifold Threadedstud Accessories Partno.
XLA XL XLQ XLQ y Body surface treatment/Seal material and its changed part Bodysurfacetreatment Part numbers indicating changed seal material and leakage XM XY Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Symbol Nil A Note 2) Leakage Pam3/s or less Note 1) Changed part None w, e w e Symbol External 1.3 x 10-10 (FKM