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Single Stage Regulator for General Applications Low to intermediate flow Series AK1000 High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: Stainless steel and Brass available Hastelloy internals available for corrosion resistance How to Order Port Number q w e r t AK10 01 4PL 4 4 S 0 0 Delivery pressure Code Connections

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

Piping materials for low dew point air Do not use nylon tube piping and resin fittings (except fluoropolymer) for the outlet side of the membrane air dryer if air of a low dew point (40 oC or less) is required, Due to the nature of the nylon tube, it could be affected by the ambient air, and it might not be possible to achieve the prescribed low dew point at the end of the tube.

ZS-46-B Rear piping Panel mount adapter ZS-35-B Bottom piping ZS-46-D Rear piping Panel mount adapter + Front protective cover ZS-35-E Bottom piping Lead wire with connector ZS-46-5F 5 cores, 2 m, waterproof ZS-27-01 Rear piping Front protective cover ZS-35-01 Bottom piping -10No.PS-OMX0002-A Summary of Product parts Names of individual parts Operation light: Displays the switch operating

Filter plate 2 Series FN1 Flow Characteristics (Initial Value) Test fluid: Potable water Liquid temperature: 17 to 20C (room temperature) Test method: Per P/A test method (sanitary test stand) Element length 250mm: FN111-10-S Element length 500mm: FN112-10-S .1 .1 .05 .05 FN111-10-S005 (5m) Pressure loss (MPa) Pressure loss (MPa) FN112-10-S005 (5m) FN111-10-S020 (20m) .01 .01 FN112-10-S020

0.05 MPa 20 0 Pilot valve 3 0.5 1 1.5 2 2.5 3 Regulator for tank pressure setting 1 Lubrication plug 14 Number of oil needle rotations (turns) Pressure gauge for tank pressure 15 Air flow rate (Representative Value) Oil filler strainer Oil level gauge Strainer 7 Fixed orifice 5 60 0.2 MPa Air flow rate L/min(ANR) 50 LMU2000.15 MPa 40 0.1 MPa ON/OFF valve for oil mist 4 30 Air adjusting needle

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

Cushion (applicable bore size 40 to 63) 1pc. S 3pcs. 3 "n" pcs.

40 Contents Description P473010-1 P473020-1 P473030-1 P473040-1 P473050-1 19, 20, 21, 23 Seal kit 4 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 With auto switch With auto switch Sizes 10, 15 Sizes 20, 30, 40 With cushion Sizes 20, 30, 40 With auto switch and cushion Sizes 20, 30, 40 5 Series CRQ2 Dimensions 3H9 effective depth 2 Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through (

10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 11 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

209 Speed Controller Needle Revolutions And Corresponding Cylinder Speed Special bracket For 100 stroke CKA40-40-21O For 150 stroke CKA40-40-2I I I , 600 :1 II 700 0 V I I ~ 500 .

28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

-40F VND70D-50A VND70D-50F 7 0.7 1 1.3 3.8 5 8 12 13 0.3 1 8 1 4 18 23 70 90 140 220 3 8 0.6 15 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 1 4 1 32 18 320 32 1 2 1 28 40 500 40 2 50 43 770 50 Note 1) The companion flange is JIS B 2210 10K (Standard) or its equivalent.

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2