Body Size: 3 (1/8 Basis), Port Size: N01 [Cylinder Side (NPT 1/8) Pilot Port (10-32UNF)], Applicable Tube OD: 09 (Ø5/16"), Lock Nut: J (Round)

Applicable Tube OD: 09 (Ø5/16")

Applicable Tube OD: 09 (Ø5/16"), Free Flow Direction: A (Male Thread to One-touch Fitting), Thread: N (NPT), Port Size: 03S (3/8, R)

Applicable Tube OD: 09 (Ø5/16"), Free Flow Direction: B (One-touch Fitting to Male Thread), Thread: N (NPT), Port Size: 03S (3/8, R)

Applicable Tube OD: 09 (Ø5/16"), Free Flow Direction: B (One-touch Fitting to Male Thread), Thread: N (NPT), Port Size: 01S (1/8, R)

Applicable Tube OD: 09 (Ø5/16"), Free Flow Direction: B (One-touch Fitting to Male Thread), Thread: N (NPT), Port Size: 02S (1/4, R)

Applicable Tube OD: 09 (Ø5/16"), Free Flow Direction: A (Male Thread to One-touch Fitting), Thread: N (NPT), Port Size: 01S (1/8, R)

Applicable Tube OD: 09 (Ø5/16"), Free Flow Direction: A (Male Thread to One-touch Fitting), Thread: N (NPT), Port Size: 02S (1/4, R)

PF2M7.eng

PF2M7-B.eng:PF2M7-B.eng.qxd 21/04/09 14:02 1 Before Use Digital Flow Switch PF2M7## Wiring Wiring of connector Connections should only be made with the power supply turned off. Use separate routes for the product wiring and any power or high voltage wiring. Otherwise, malfunction may result due to noise.

A_HEC-OM-J017

Data of UT and Check Sum Character data 09 ASCII 30H39H 41H 42H 43H 44H 45H 46H UT and check sum 30H39H(ditto) 3AH 3BH 3CH 3DH 3EH 3FH HEC 3-3 Details of Communication Format 4 Details of Communication Format 4-1 Temperature setting (without writing EEPROM) The host computer sets temperature of each Thermo-con. In this command, temperature setting data is not written in EEPROM.

A_HEC-OM-K001

Data of UT and Check sum Character data 09 A B C D E F ASCII 30H39H 41H 42H 43H 44H 45H 46H UT and Check sum 30H39H(ditto) 3AH 3BH 3CH 3DH 3EH 3FH 7.3 Communication format 7-6 A_HEC-OM-K001-1.7 Chapter 7 Communication 7.4 Details of Communication Format 7.4.1 Setting of target temp. (without writing EEPROM) The host computer sets target temperature of each Chemical Thermo-con.

air-filter-e

Number of arranged elements 4 7 9 18 22 Symbol Number of arranged elements 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

KK/KK13

KK13P-03M Flow rate (l/min [ANR]) 2,500 2,000 Connected plug and socket 1,500 KK13S-02M + KK13P-02M 1,000 500 0 0.2 0 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.1 Primary pressure (MPa) 11 S Couplers How to Order KK 13 S 02 M Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09

.: 09 (5/16"), Port Size/Applicable Tube: 00 (Same Dia. Tube)

.: 09 (5/16"), Port Size/Applicable Tube: 00 (Same Dia. Tube)

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), IO-Link compatible vacuum pressure switch: 3 (-100 to 100 kPa, w/ Unit Selection, w/out Energy Saving), Connector: H (300mm Lead wire with M12 connector for IO-Link), Vacuum, V Port: 09 (Inch Size, ø5/16" One-touch Fitting)

.: 09 (5/16"), Port Size/Applicable Tubing O.D.: 01 (1/8), Thread Material/Surface Treatment: A (Brass)