SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR

Exhaust Cleaner for Clean Rooms AMP Series

Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult P/A in advance, as this will differ depending on the operating

Ambient Dryer Series AMG

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?

Slide Tables MX Series

125 150 175 200 225 250 275 300 Standard Stroke (mm) Bore Size (mm) 6 8 10 12 16 20 25 MXH MXS MXQ MXF MXW MXP Dual Rods For Twice The Force The MXS, MXQ, and MXW use a twin bore design to double the actuation force while maintaining the single bore height.

Miniature Guide Rod Cylinder Series MGJ

10st 15st 20st 250 Load weight W (g) 200 150 100 50 0 0 5 10 15 20 Eccentric distance L (mm) Construction Parts list o!

Precision Clean Regulator Series SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR

PSxx-OMM0002CN

kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.

Bore sizes: 16, 20, 50, 63, 80, 100 mm; Stroke lengths: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000, 3000, 4000, 5000 mm; Minimum operating pressure: 0.10 ~ 0.15 MPa (15 ~ 22 psi); Speed: 100~1000 mm/sec (w/o stroke adjustment bolt), 100~1500 mm/sec (external shock absorber); Auto switch capable

Bore sizes: 16, 20, 50, 63, 80, 100 mm; Stroke lengths: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000, 3000, 4000, 5000 mm; Minimum operating pressure: 0.10 ~ 0.15 MPa (15 ~ 22 psi); Speed: 100~1000 mm/sec (w/o stroke adjustment bolt), 100~1500 mm/sec (external shock absorber); Auto switch capable

Precision Clean Regulator

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure

VCC

VCC12(D)-00 (2 port valve) VCC13-00 (3 port valve) Full length: 44.8 to 45.1 0.2 Full length: 54.6 to 54.9 0.4 Except face seal (O-ring) Except face seal (O-ring) Tighten the screw until it hits the body by pressing the orifice body with approx. 100 to 200 N of force. ( Additional tightening is not necessary.)

Vacuum Equipment

Maximum flow rate 200 /min (ANR). The collected dust does not remain in the case. Air suction filter 13-10-1 Series ZFA Using an ejector with a 2-stage nozzle, the ejector system can be used most efficiently. Air suction filter 13-10-4 Prevents problems related to vacuum circuits or airborne contaminants.

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

Siiiil"Tivrc

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?

Specifications Port Size (Applicable Tubing O.D.): ø5/32" / ø1/4", Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 100 / 200, Flow Rate (Vacuum Pressure) [L/min]: 10 / 20, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area

Specifications Port Size (Applicable Tubing O.D.): ø5/32" / ø1/4", Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 100 / 200, Flow Rate (Vacuum Pressure) [L/min]: 10 / 20, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area

The MGP is designed for high side load applications found in material handling, lifting and stopping. The cylinder utilizes an ultra-compact design by incorporating the cylinder body as part of the guide body. As the stroke length increases, so does the bearing length, thus enhancing the cylinders load bearing capacity. Conventional designed guided cylinders have a set bearing length resulting

Series C96 cylinders conform to ISO 15552. The series is available with a single or double rod in 6 bore sizes from 32 to 125mm. High accuracy covers and tie rod nuts improve mounting accuracy and extend the cylinder life. Increasing the precision of the bushing and piston rod, as well as reducing tolerances, has decreased the deflection of the piston rod. Standard strokes range from

Double acting, single rod cylinder w/lock, Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion, Bore sizes (mm): 40, 50, 63, 80, 100, Strokes up to 1500mm (depending on bore size & mounting), Auto switch capable, Power Lock Cylinder, TIE ROD CYLINDER W/LOCK, 455, 2.72000 lb

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch