HRX-OM-X037 Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150
OFF. 89 Flow rate is zero. 130 150 (10) 25 0 : Variable fan speed mode Fan speed controlled according to controller output volume 1 : Low noise mode Constant fan speed regardless of controller output volume Fan Control Check the set value for low temp. cutoff temperature and confirm the temperature really reaches this value.
Set with [] or [] key 111 If the proportional cycle is set PV 5 1.0sec 107 at 1 sec. and Heating Output is 70%, the output will be 0.7 90 130 150 (10) (6) The repair and maintenance services of this unit are performed only at sec. ON and 0.3 sec. OFF. 25 The EEPROM of the controller is broken due to high-level electric noise.
Table 4-1 Quality standard for fresh water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (s/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less 2-/L) 200 or less Sulphate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron
Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/
Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-
Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3
XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <
Specifications Model Note 1 XMC-16 XMC-25 XYC-25 XMC-40 XYC-40 XMC-50 XYC-50 XMC-63 XYC-63 XMC-80 XYC-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Double acting(Dual operation) , pressurize to open/close Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6
Model XMD-25 XYD-25 XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 Flange (valve) size 25 40,CF070 50 63,CF114 80 Actuating type Normally closed(Pressurize to open, spring seal)[both main & initial exhaust valves] Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type: 5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Main pumping
Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,
The temperature for baking before operation must be set to 150 deg.C or less. If it is operated in a lower pressure environment, the grease applied to the guide will evaporate too much, which may affect the endurance and contaminate the chamber.(The cylinder should not be operated during baking.) 5. Air source 1. Use clean compressed air or inactive gas.
(Note1) (Petroleum,Water-glycol, Emulsion,Phosphoric ester) Applicable model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 INOUT Port size (Rc) 3/4B 1B 1 1/4B 1 1/2B 2B 2 1/2B 3B Drain port size M162 Rated flow Paper 50 80 120 160 260 450 600 rate Micromesh 60 100 150 200 300 550 700 (L/min) Operating pressure 1.0MPa Operating temperature 80oC Nominal filtration 1.
Deviation value (%) P value : -100 to 200 S value : -50 to 150 button Fig. 20 Manual Mode Operation As it is shown in Fig. 21, the opening of an actuator can be voluntarily controlled by using the UP button and Down button ( ) in manual mode. While pressing the UP button or the DOWN or button ( ), the display shows an input value (the target setting value for the actuator).
Deviation value (%) P value : -100 to 200 S value : -50 to 150 button Fig. 21 Manual Mode Operation As it is shown in Fig. 22, the opening of an actuator can be voluntarily controlled by using the down -button and up-button ( ) in manual mode.
Faster Average speed [mm/s] Measuring conditions Supply pressure: 0.55 MPa 0 50 100 150 125-250 160-300 Bore size-Stroke 200-300 250-450 320-530 Speed adjustment rotary switch set value 0 5 9 Mounting: Vertical downward Load: no-load Operating direction: Upward *1 The average speed value is the stroke divided by the full stroke time.
Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150
(between lead wire and case) Ambient temperature Sensor unit: 0 to 150 oC, Amplifier unit: 0 to 60 oC Enclosure Sensor unit: IP67, Amplifier unit: IP63 (IEC60529) Standards CE, RoHS -17No.D-S-OMS0002-B Dimensions -18No.D-S-OMS0002-B Revision history A: Modified errors in text. B: Add the note.
This person should also continuously review all specifications of the product referring to its latest catalogue information, with a view to giving due consideration to any possibility of equipment failure when configuring the equipment. 100 0.05 0.09 0.15 0.24 0.39 0.64 1.00 125 0.07 0.11 0.18 0.29 0.47 0.76 1.20 150 0.08 0.13 0.21 0.34 0.54 0.89 1.30 200 0.10 0.17 0.28 0.44 0.70 1.10 1.70
Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.