The chamber is set up on a Class 100 clean bench. The solenoid valve is operated while supplying a volume of clean air equal to the intake volume of a laser dust monitor (28.3l/min). The amount of particle generation is measured for a specified number of operating cycles.
READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 7 10 4 20-M3 x 0.5 65 72 A view 82 0.2 92 87.6 58.4 62 8 35.5 A 1.15-39
Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D
45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91
H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port
L6 A Note) Model Applicable tubing O.D. d H Weight (g) D L1 L2 L3 L4 L5 M T Min. Max. Min.
(mm) Effective orifice(mm 2) Weight (g) M A L D Part No. d Nylon Urethane 2.6 2.6 6.8 6.8 16.2 13.1 25.6 20.4 35.4 30.4 KCJ04-99 KCJ06-99 KCJ08-99 KCJ10-99 KCJ12-99 4 6 8 10 12 9 13 20 33 43 Note) D: max. diameter 18 19 21.5 24 25.5 33.5 37 42.5 49.4 52.4 49.5 54 61 70.4 74.4 9.8 11.8 14 17 19 4 6 8 10 12 Bulkhead union: KCE Applicable tube O.D. (mm) Part No. H (Hex.)
Warning: 1 2 1 2 Green ST(M) LED is flashing. 1 TD+ Either of the following conditions: The valve ON/OFF counter has exceeded the set value. The valve is short circuited or disconnected. Red ST(M) LED is flashing. 2 RD+ TD3 DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. (2)Add more I/O units.
a) (52) b) 28 c) (52) c) (16) e) (16) f) (/) g) () h) () i) j) k) l) m) -19No.EX-OML0010CN-C 4.
A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions
Cable length (L) 003 0.3 [m] Connector Setting Power supply for input and control: 24 VDC 10% Power supply for solenoid valves: 24 VDC +10%/-5% Power supply voltage range SSPS Socket side: Straight Plug side: Straight 005 0.5 [m] Power supply for input and control: 6.2 A (GW unit internal current consumption: 200 mA or less) Power supply for solenoid valves: 4 A 010 1 [m] SAPA Socket side
Red ST(M) LED is ON. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Assembly Caution: Connector pin assignment The power supply voltage for control and input is abnormal. Red PWR LED is ON. Configuration Assembling the unit as a manifold (1)Connect a unit to the end plate.
Min. bending radius (mm) 15 Note 3) Note 4) 20 35 60 95 100 130 Air, Inert gas: -20 to 200C Water: 0 to 100C (No freezing) Operating temperature 2R Material FEP (Fluorinated Ethylene Propylene Resin) At a temperature of 20C, bend the tubing into a U shape. Fix one end and gradually move the other end closer. Measure 2R at the point where the outside diameter's rate of change is 5%.
Power for SI Unit/Input Block: 24 VDC 20%, 1.1 A or less Inside of SI Unit: 0.1 A or less Input block: 1 A or less (Depending on number of connecting sensors and specifications) Power for solenoid valve: 24 VDC +10%/-5%, 2 A or less (Depending on number of solenoid valve station and specifications) Connection load: Solenoid valve with protection circuit for 24 VDC and 1.5 W or less surge
Consult factory for strokes less than 10mm. 6.1 16 External Feedback Lever (IP6000 type) Stroke Order Code Unit Number Size M Size N P368010-20 5 9/10" 4 9/10" 10~85 mm (Nil) 5 M N P368010-21 7 2/3" 4 1/3" 35~100 mm (E) P368010-22 10 4/5" 4 1/3" 50~140 mm (F) DIMENSIONAL DRAWINGS S E R I E S I P 6 0 0 0 / I P 6 1 0 0 IP6000 TYPE: LEVER TYPE FEEDBACKNO TERMINAL BOX (FM Model) IP6000 TYPE:
L Warning: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Angled connector type EX500-AC -SAPA (unit: mm) 3 Danger: DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.
It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8
Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.
Impact/Vibration resistance (m/s2) 150/50 Note) Manifold Possible Use dry air (Dew point: 20C or less). If using a lubricant, be sure to use a lubricant for low temperatures.