PSxx-OMF0005CN

-2No.PS-OMF0005CN-E / 1 1.5 *3) 1 1 [] -3No.PS-OMF0005CN-E () () -4No.PS-OMF0005CN-E () * 5 m -5No.PS-OMF0005CN-E * (RcNPTG) 1/8 79 Nm 1/4 1214 Nm 1.52 2 * () ()() () () -6No.PS-OMF0005CN-E * IP66IP65 () 060 (5 ) * -7No.PS-OMF0005CN-E (ISA2 ) * * (EXH) 5 m 0.2 MPa CE (2 VCA ) () C-R () ()C-R ( ) () AC 10 DC 2 * * 2 0.51.25 mm -10+10 5 -8No.PS-OMF0005CN-E *

10 C)2.5(at ?10 C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10 C)2.9(at ?10 C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

CUJ CU B Dimensions (without magnet) (mm) B Bore size Overall length: Maximum shortened approx. 64% Volume: Maximum reduced approx. 70% (compared to series CU cylinder without magnet) C A B 4 6 8 10 13 (13) 15 19 (22) 13 13 (33) C + Stroke C + Stroke 13 13.5 (15) 21 22 (24) 13 13 (36) A A 10 Dimensions inside ( ) are for series CU cylinder. 1 in 25.4mm Uses new type miniature auto switches

D-F6N/D-F6P/D-F6B

Electrical entry direction In-line Wiring type 2-wire 3-wire NPN PNP Output type Applicable load IC circuit, relay, and PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC) 28 VDC or less Load current 2.5 to 40 mA 40 mA or less Internal voltage drop 4 V or less 0.8 V or less at 10 mA (2V or less at

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Parts cannot be shipped separately. 1937 Series VHS20/30/40/50 Dimensions VHS20/30 VHS40/40-06/50 10 I EXH. 10 G F H I SUP. E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

Vacuum Filter AFJ Series

[L/min (ANR)] 80 m 80 m AFJ20-02-80-S/AFJ30-03-80-S/AFJ40-04-80-S AFJ20-02-80-T/AFJ30-03-80-T/AFJ40-04-80-T 12 12 AFJ20-02-80-T AFJ30-03-80-T AFJ20-02-80-S AFJ30-03-80-S AFJ40-04-80-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500

PA300/500/700

(Value in the initial stage) Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) (1) Port size Weight (kg) Series Model C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv b Cv b Cv b Cv VPA342 (Body ported) 3.3 4.0 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 0.93 1.1 0.89/0.89 1.0/0.95 2.0 2.5

VT325

4-7-17 2 Series VT325 Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet Port size C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

Pneumatic Purification

Mist Separator : Series AM Standard features on all models MODEL FLOW PORT A B C WEIGHT ELEMENT D NPT in in in lb (cfm) in Die-cast Aluminum with chromate treatment No screw threads or tie rods are required therefore removal and replacement of element is made quick and easy Differential Pressure indicator Internal autodrain Built-in push-to-connect fitting on drain AM150-N02C-T 10 1/

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20

Ejector Valve Unit, Series ZYY/ZYX

10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

VJ10-36-1A-10 . 2 pcs.

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

AN

Model (Screw-in connection) Model Port size Effective area (mm2) Weight (g) ANA1-01 10 4 37 16 A B C Dimensions (mm) 1 8 ANA1-02 15 14 64 22 18 1 4 ANA1-03 35 3 8 22 84 25 21 36 98 30 24 110 111 46 36 180 132 50 41 544 200 74 60 612 230 74 60 873 271 86 70 ANA1-04 60 1 2 ANA1-06 90 3 4 JIS symbol ANA1-10 160 1 1 1 ANA1-12 280 1 4 ANA1-14 450 1 2 ANA1-20 610 2 Construction/Parts/Dimensions

Ejector Valve Unit Series ZYY/ZYX 1

10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S

Desktop Duster Box

Ionizer Additional air blow Air blow Ionized air 497 ZVB Series Dimensions C B D A C B A D F E [ZVB20] F E [ZVB40] Model A B C D D Note 1) E F F Note 2) ZVB20 211 202 212 310 351 210 297 341 ZVB40 248 392 298 349 390 400 384 428 Note 1) Dimension D is the overall height including the knob of the regulator.

MRQB-OM0002

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.