Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M HA AT Model IDUS3E IDUS4E Port size A B C D H K J L M E F G 297 330 315 380 260 470 540 85 130 350 325 440 Rc 1/2 ID 85 130 Rc 1/2 440 260 560 540 297 330

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Standard for guide selection Guide model Cylinder model High precision guide (Single axis) Slide table accuracy approx. 0.05 mm or less CY1F M3: Yawing Selection Flow Chart Es: Allowable kinetic energy for intermediate stop by pneumatic circuit (J) Ps: Operating pressure limit for intermediate stop by external stopper, etc.

Large Flow Air Filter AF800/900 Series

(Ex.) 68 Note 4) Symbols 9, D, J can not be specified at the same time. (Ex.) 9-D-J Note 5) For products with auto drain, either symbol D or J cannot be specified at the same time. 1 Indicate the required filtration rate after the symbol 1. Ex.) When 40 m is rquired: 1-40 2 For float type auto drain (N.O.), nylon bowl is a standard specification.

HEC_W-E

J o 0001 Serial No. Manufacturing month o: January U: July P: February V: August Q: March W: September R: April X: October Manufacturing year S: May y: November J: 2005 T: June Z: December K: 2006 L: 2007 . . . 4-1 Unit Overview 4.3 Model No. label Model No. label is attached to the unit and indicated as shown below.

XL-OMV0002

H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55

MGP

mm) J) (J) 12 0.043 8.5 0.23 0.31 16 0.075 9.5 20 0.11 1.9 50 0.91 11.5 3.2 40 0.52 10.5 1 25 0.18 8.4 0.53 32 0.29 10.5 100 4.54 16.5 80 2.71 16.5 63 1.54 11.5 5.2 10.9 16.4 2 2 m M E k + = = 1 4 .. a Ek J M kg m kg ms ms 1 0.5m/s801000.4m/s 2 3 9. 1 2 3 3 4 5 1 5 10. 1 2 3 4 5 6 7 8 9 10 11. 1 (d=) 6 11-1. 1 1 2 3005mm 4 5 6 7 2d(MGPS1.5d MGP MGPS

Compact Guide Cylinder

X 0.02 (Pin hole position) (Mounting hole position) X 4 x YY depth YL Section XX Bottom view 4 x OA through 4 x NN through 4 x MM depth ML L 2 x Counterbore diameter OB, depth OL WA Z XAH9 XB Section XX Section XX XA XL XC HA: T-slot for hexagon bolt Section XX details X 0.02 R T X 0.02 DB DA H VA VB U X PW b a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J

1.63

.: GR-S-010 (10 g) D-X 511 MGPW Series 20 to 63/MGPWM Stroke Z 4 x YY depth YL Stroke Z L 4 x MM depth ML 4 x NN through DA DB H V U X T R PW 2 x P OL GA GB 4 x OA through FA FB 2 x OB counterbore Q J K C + Stroke B + Stroke E S G A + Stroke For intermediate strokes other than standard strokes, refer to Manufacture of Intermediate Strokes on page 499.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Air passage Brake plate Brake shoe 2 Air tube (Brake released state) (Brake operating state) Brake Capacity Allowable Kinetic Energy Holding Force (Maximum static load) 25 32 40 25 32 40 Bore size (mm) Bore size (mm) Allowable kinetic energy (J) 1.21 500 N 800 N Holding force 320 N 0.43 0.68 1.

CY1F

M2: Rolling M1: Pitching Standards for Tentative Model Selection Graph for related allowable values Refer to page 28 Guide model Standard for guide selection Cylinder model High precision guide (Single axis) Slide table accuracy approx. 0.05mm or less CY1F M3: Yawing Selection Flow Chart Es: Allowable kinetic energy for intermediate stop by pneumatic circuit (J) Ps: Operating pressure limit

Stainless Steel Heat

Air cooling after cooler Auto drain Operation Principles Air inlet Heat exchanger Air outlet Drain separator Drain outlet Capacity regulating valve Condenser Capillary tube Pressure switch Fan motor Evaporation thermometer Compressor 2 Stainless Steel Heat Exchanger Type Air Dryer Series IDUS IDUS3E, 4E, 6E Evaporation thermometer G H Illumination switch J K Draft air outlet A B D E Power

MGC

MXP MG : Kinetic energy (J) : Weight of load (kg)+Weight of moving section (kg) : Piston speed (m/s) Ek = n2 M 2 EK M n MGP MGQ MGG OUT IN Theoretical Force Unit: N MGC Operating pressure (MPa) Bore size (mm) Piston rod dia.

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

CRB1/Size: 10, 15, 20, 30

(MPa) 0.2 0.15 CRB1 Speed range(1) (sec/90) 0.04 to 0.3 0.03 to 0.3 Allowable kinetic energy(2) 0.02 0.001 0.003 0.00015 CRBU (J) 0.015 0.00025 0.0004 Shaft load Allowable radial load 30 15 25 15 CRA1 (N) Allowable thrust load 25 10 20 10 Ball bearing Bearing 30: M4) Two styles of port positions: body side and axial direction Angle adjustment unit can be mounted A style that can be housed

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

D-A9, F9 Rod end nut C1 X L1 Rod end male thread (mm) Bore size (mm) C1 X H1 L1 32 20.5 23.5 28.5 M14 x 1.5 40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 (mm) Without auto switch With auto switch A B A B U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43

End Lock Cylinder Series CBG1

Rod boot Nil J K Without rod boot Nylon tarpaulin Heat resistant tarpaulin Cushion type When equipped with rod boot, foot and front flange type brackets are attached before shipment.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL