PF2x3.eng

Hysteresis mode 2 Panel Item Default settings Model button (UP) Panel mount adapter Item Default setting ( ) PF2A30 series [10L] 1 to 10 L/min type (PF2A510) Indicator LED (OUT1) Set point 1 Set point 2 Hysteresis 1 Hysteresis 1 50% of max. rated flow [n_1] Input of the Set point 1 (OUT1) PF2A31 series [11L] 10 to 100 L/min type (PF2A511) button (SET) ON 50% of max. rated flow [n_2] Input

IP80-OM00019

E 4 IP8100 7 3 (1) (2) (1) 3-1 IP8000 3-1-1 IP600IP6000IP600IP6000 6 L 5 7 6 L 7 5 3-1-2 (1)50%(50%) 100% 0% (2)1030 50% 100% (0%) 8 (3)9 ( ) () () () 9 8 3-2 IP8100 3-2-1 IP610,IP6100IP610IP6100 IP6100H() OUT1 OUT2 OUT1 OUT2 10 11 10 11 3-2-2 (1) (P368010-23) (2) IP610 ( (P368010-24) M81.25 12 3-2-3 (1) ()DA ()RA DA RA 0 0 (2) () () 13 (3) A (4) (3.6 4.1N.m

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.

For Water Digital Flow Switch Series PFW

DC (+) N C DC () OUT Pin no. 1 2 3 4 2-3.4 43 Flow direction Dimension L 100 106 Model PFW504 PFW520 PFW540 62 78.2 120 1.6 23 50 60 34 2-Port size 4-4.5 34 50 40 48 (43.5) Flow direction 25 Series PFA Dimensions/Remote Type Display Unit for Water PFW3-A Panel mount type Internal circuits and wiring Sensor 41.8 Blue Brown Black N.C. 40.3 40 1 2 3 4 4.3 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2

ZSP1

ZS-10-5 A-50 1 pc. 0.6 m 30 3 m 50 5 m Specifications Model ZSP1-B ZSP1-S Fluid Air Operating pressure range 20 to 101 kPa Applicable adsorption nozzle dia. 0.3 to 0.7 (Refer to Graph (1) on page 16-7-3.) 0.5 to 1.2 (Refer to Graph (2) on page 16-7-3.)

LEC-T1_C

115 - 5 () 116 - 9.3 50mm 9.4 ( ) 117 - 9.5 9.6 D 100 9.7 118 - 10.

JXCx-OMT0034CN

90%RH () -10 60() 90%RH () 2(0.5G) 4.9m/s IP20 200g() 220g(DIN ) 11 - 3.2 1 LED 2 STATION No.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

During disassembly and assembly, confirm that there are no scratches or damage, etc, on the O-ring. 13-10-10

T

Made to Order (Please contact SMC for specifications in detail, dimensions and delivery.) 10 m roll 50 m reel 100 m reel Model TFU0425 TFU0604 TFU0805 TFU1065 TFU1208 1. Change of color (10 m roll) 4 Tubing O.D. (mm) 6 8 10 12 Suffix -X4 to the end of part number. Ex.) TFU0604BU-2-10X4 2.5 Tubing I.D.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Model Cushion Rubber Air Bore size (mm) Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Relief type Vacuum suction type 10-/21-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ216 M5 x 0.8 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Band mounting only Standard acting, Non-lube 10-/22-CJ210 15, 30, 45, 60, 75, 100, 125, 150 10 Single rod 10-/22-

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Fluid Compatibility Acetone Ammonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone Hydrogen peroxide Concentration 50% or less 50C or less Ethyl acetate Butyl acetate Nitric acid (except fuming nitric acid) Concentration 10% or less Deionized water Sodium hydroxide Ultra deionized water Toluene Hydrofluoric acid Concentration 50% or less Sulfuric acid

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

possible (1 l/min) 10 1 to 10 l/min 4 With neon light (220 VAC, Green) 20 10 to 20 l/min Simple flow setting Without removing the cover, you can set with a screwdriver from the outside.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F

CRQ2

QCR = V x x 10-3. Formula (1) QCR: Since the internal volume is different when the A/B ports are pressurized in vane type sizes 10, 15, 20 and 30, use formula (1). Use formula (2) for vane type sizes 50, 80, 100 and the rack-and-pinion type. P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

QCR = V x x 10-3. Formula (1) QCR: Since the internal volume is different when the A/B ports are pressurized in vane type sizes 10, 15, 20 and 30, use formula (1). Use formula (2) for vane type sizes 50, 80, 100 and the rack-and-pinion type. P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 D1 4 17 4 4 10.4 19.7 L2 A D2 10 H 8 Connection threads 6 18.5 10 10 12.8 21.8 (R) 10 (R) Applicable tubing 8 15.2 20.5 26 18 12 25.3 M L1 10 18.5 23 41 29 28.4 17 17 12 20.9 24 58 46 30.4 D1 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

“Going to

Caustic soda 50 Aqueous amonia 100 Inorganic Acid Hydrochloric acid 10 X Hydrochloric acid High X Nitric acid 50 X Phosphoric acid 85 X X Sulfuric acid 10 X Sulfuric acid 50 X Inorganic Compound Hydrogen sulfide Low Chlorine 100 X Sulfur dioxide Low Hydrogen peroxide 30 X Carbon disulfide 100 Sulfur 100 Water Organic Base Aniline 100 Pyridine 100 Urea Saturated Organic

VND

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D