Electric Actuators

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Table of Contents

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

SYJ3000/5000/7000

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol 5 port 4 port (manifold) Grommet (G), (H), L plug connector (L), M plug connector (M), M8 connector (W) 2 position single 2 position single Electrical entry (B) 2 (A) 4 (B) 2 (A) 4 24, 12, 6, 5, 3 DC Coil rated voltage (V) 100, 110, 200, 220 AC 50/60 Hz 1 (P) 1 (P) 3 (R) 3 (R) 5 (R) Allowable voltage fluctuation

Modular Design with Uniform Body Style

(Switch body only)]*3 NPN output, Wiring top entry ISE35-R-25-MLA-X523 [ISE35-R-25-M (Switch body only)]*3 Digital pressure switch PNP output, Wiring bottom entry ISE35-N-65-MLA-X523 [ISE35-N-65-M (Switch body only)]*3 PNP output, Wiring top entry ISE35-R-65-MLA-X523 [ISE35-R-65-M (Switch body only)]*3 Float type auto drain*4 N.C.

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

SYJ300/500/700

connector (L) M plug connector (M) M8 connector (WO) P R P R P R 53 [55.2] 62.8 [65] 48 54.5 61.9 59.6 [66.6] Approx. 300 (Lead wire length) 35.5 53 M8 x 1 Approx. 300 (Lead wire length) 33.1 48.5 [55.5] Refer to page 4-4-61 for dimensions with connector cable.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Value in the initial stage) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position prssure center 3 position prssure center (B) 2 (A) 4 (B) 2 (A) 4 Solenoid Specifications 1 (P) 3 (R) 5 (R) Grommet(G)/(H), L plug connector(L), M plug connector(M) 1 (P) 3 (R) Electrical entry 24, 12, 6, 5, 3 100, 110, 200, 220 DC AC50/60Hz Coil

SX

-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC VS L plug connector (L) M plug connector (M) 55.5 [62] 49 18.5 10.5 1 49 4-Rc (PT)1/8 18.5 (P/R port) 10.5 1 10.5 10.5 P R P R 53.4 57.4 [58.7] 20.5 20.5 38 38 67 25.5 25.5 4-Rc (PT)1/8 (P/R port) (Lead wire length) 66.6 [73.1] 300 (Lead wire length) 300 43.1 [ ] for AC Other dimensions are the same as the grommet.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions

smcmaintenancepartslist

t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] IN OUT Square embedded u type Note 4) 0.02

Table of Contents

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.