SMC Corporation of America
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(Option) JXC-W1 p. 16 VUSB cable (Option) JXC-W1-2 Cable length: 3 m p. 16 VController setting software (Option) JXC-W1-1 p. 16 PC Provided by customer. *1 The connected actuators should be ordered separately.

With auto switch: CDS1C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ~ = Width across flats KA With rod boot ~ = ~ = S + Stroke Z + Stroke ZZ + Stroke ZZ1 + l + Stroke Z1 + l + Stroke Type Bore size (mm) Stroke range B C P A CDH10 CX G J K MM N AL KA RR L CT D

PF2W740 PF2W711 Model Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit Water 1.7 to 17.0 l/min 0.35 to 4.5 l/min 3.5 to 45 l/min 7 to 110 l/min 1.7 to 17.0 l/min 0.35 to 4.5 l/min 3.5 to 45 l/min 7 to 110 l/min 2 to 16 l/min 0.5 to 4 l/min 5 to 40 l/min 10 to 100 l/min 0.1 l/min 0.05 l/min 0.5 l/min 1 l/min 0.1 l/pulse 0.05 l/pulse 0.5 l/pulse

. 50 63 80 100 50mm 63mm 80mm 100mm Rod specifications Hard chrome as standard Double/through rod W Stroke (mm) Refer to standard stroke table on p.1.11-23 maximum 1000mm Applicable Auto Switches/ Tie rod mounting Load voltage Lead wire (m) Indicator Mounting bracket Applicable load Auto switch model Special function Style Electrical entry Wiring (Output) 0.5 () 3 (L) 5 (Z) AC DC 3 wire

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

thread depth 3.5 Vacuum suction port 35 Note) 11-, 22-: Vacuum suction port 12-, 21-: Relief port ST 61+ST 15 49.5+ST 3.5 8 13 1 M5 x 0.8 x 4 L 4 16 14+ST 4.5 4.5 (Hexagon socket set screw) M8 x 1.25 x 8 L (Bolt holder) 1 40 45 45 3 3 330.2 330.2 330.2 42 20 8 8 6.5 counterbore depth 5.5 (Same on the opposite side) 3.4 through 2 x M3 x 0.5 through 3 3 6.5 45 45 M4 x 0.7 x 14.5 L (Hexagon

) 27 79 X PE 41.5 30.5 32 R1 R2 27 P 15.5 14.5 G1/2 Electrical entry Rc1/8 PE port 19.5 (21) 19.5 Rc1/8 External pilot port (21) 31 31 5-Rc1/4, 3/8 P, A, B, R1, R2 port ( ): Rc3/8 0 1 0 1 0 1 0 1 3 position double check: VQ460 l 0 1 2 position double: VQ420 l 3 position closed center: VQ430 l 3 position exhaust center: VQ440 l 3 position pressure center: VQ450 l 181 108 73 90 50 11(A port

Controller Set Up (P.42) and 14. Card Motor Controller Configuration software (P. 70) for instructions on how to setup. (7) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.50) and 14.5 Monitor/Test window (P. 80) for instructions on operating instruction of test operation 14 - 3.

Bore size (mm) 125 140 160 180 200 250 300 Refer to p.1.10-7 for How to Order Auto Switches Style.

capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

AS121FG-M5-23 AS121FG-U10/32-01 9.6 25.8 28.6 12.3 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 AS221FG-01-23 AS121FG-U10/32-03 14.2 31.1 36.1 14.3 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R 1/8 8 10-32 UNF 28.6 25.8 25 22.2 7 9.6 AS121FG-M5-04 AS121FG-U10/32-05 21.3 26.1 12.3 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 0.8 11.7 9.6 25.8 28.6 8 7 25 22.2 AS121FG-M5

S. or l ess H yst eresi s F. S. or l ess Repeat abi l i t y F. S. or l ess Sensi t i vi t y F. S. or l ess Tem perat ure charact eri st i cs F.

N.O.3 3 1) 0.9MPa 2) 3) 50 4) 2 5) P ARBF3000,ARBF4000 ARBF3000,ARBF4000 ,P AB ARBF3050ARBF4050 A B P 1.0MPa 1) B A 0.10.83MPa 2) -560 () 3) N.C. N.O.

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .