Square Tube Type Air Cylinder Series MB1

to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239

PSE550/300

Applicable pressure sensor PSE531 PSE541 PSE561 PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) pressure range 5%R.D.

ZX

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101

Free Mount Cylinder

Vacuum port pressure range: 101 kPa to 0.6 MPa Pressurize only when releasing the vacuum. At that time, use it under the cylinder operating pressure. Rod piping Lighter weight than the cap piping. Can also be used for air blowing. Vacuum port pressure range: 101 kPa to 0.6 MPa 55 57 Free Mount Cylinder for Vacuum Series ZCUK How to Order Nil 2 pcs.

MLGP

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

mm or more 17 Wear ring POM Stroke 101 mm or more 18 Screw shaft pulley Aluminum alloy No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

XL-OMY0001

XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz

MLGP

200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10

MLGP

200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10

MLGP

200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10

Air Slide Table

[N] Bore size [mm] 6 8 12 16 20 25 Piping port size M5 x 0.8 Fluid Air Action Double acting Operating pressure 0.15 to 0.7 MPa*1 (End lock: 0.35 to 0.7 MPa)*1 Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 6 3 OUT 57 11 17 23 29 34 40 IN 42 8 13 17 21 25 29 Proof pressure 1.05 MPa 8 4 OUT 101 20 30 40 51 61 71 Ambient and

Vacuum System Peripherals:

ZSE1 Compact Pressure Switch: Series ZSE1 Model 0 to 101 kPa Pressure setting range 500 kPa Proof pressure 3% F.S.

Smooth Cylinder/Low Speed Cylinder

Grease pack (10 g) 1 pc. 84.8 IN 25 42 59 CQSY16-PS 12 6 113 OUT 34 57 79 CQSY20-PS REA 151 IN 45 75 106 CQSY25-PS 16 8 201 OUT 60 101 141 When only grease for maintenance is necessary, please order by the following part numbers.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

MY1

For details, refer to page 8-11-101.

5

Grease pack part number: GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) OUT 201 60 101 141 20 10 IN 236 71 118 165 OUT 314 94 157 220 25 12 IN 378 113 189 264 OUT 491 147 245 344 Accessory Intermediate Stroke * For details about the single knuckle joint, double knuckle joint, knuckle pin, and rod end nut, refer to page 244. Method Installation of spacer on standard stroke body.

Compact 5-Port Solenoid Valve

C V V Cannot be selected when t is N C1 V None Cannot be selected when t is P or T V V F V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 i Option4 (For details on the Function/Application, refer to page 121.)