3 Port Solenoid Valve Series SYJ300/500/700

For mounting) 26.4 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] (Light/surge voltage suppressor) 41.5 [48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (W0): SYJ34-W0-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46

Compact Rotary Actuator Series CRQ2

CRQ2X MSQX MRQ Auto Switch Proper Mounting Position at Rotation End Reed switch Solid state switch Size Rotating angle Operating angle ( m) Hysteresis angle Operating angle ( m) Hysteresis angle B A B A 90 15 19 25.5 21.5 180 61 63 12 5 10 18 22 35 31 360 25 29 56.5 52.5 90 18.5 22.5 31 27 180 47 52 9 4 15 22.5 26.5 43.5 39.5 360 30.5 34.5 68.5 64.5 90 36 40 52.5 48.5 A 180 40 41 9 4 20 42 46

•

Aw/1CB:ble l (mm) Y12A 2S*g(>P'< 10{) 32~g{ 125 8 46 M30 x 1.5 64.:U 42 boc~~ze . d 1-1 B C D 27 28~oe. 72ji Y-14A 140 8 48 105 M30 x 1.5 47 36:21 NT-12 125, 140lM30 x 1.5 18 46 53.1 44 30 NT16 160 /M36x1.5 21 55 63.5 53 M36x 1.5 32 ~~' 4072J Y-16A 110 80~J 34 46 ' 1 160 8 55 * Use a single knuckle 101n1 or a double knuckle JOint Individually.

15

M4 x 0.7 M4 x 0.7 11 14 6.5 3.3 8 5 26 3 19 2 5 40 30 27 3.5 6 CY1S10-Z 7.5 12 31.5 6.5 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 8 4.4 10 5 33 6 28 2.5 6 40 34 45 4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 5.4 12 2 5 6 52 39 11 60 5.8 28 40 8 CY1S20-Z M6 x 1 M6 x 1 10 9.5 21.6 44 8.5 36 37.5 24 19 20 10.5 22 5.4 16 2 5.5 8 45 16 70 28 62 5.8 46

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

MTS

46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5 47.5 47.5 20 15 17 37 43.5 33 43.5 33 16 23 19 24.5 24.5 19 27 27 27 27 63.5 63.5 63.5 63.5 22.5 17 23 43 59.5 39 59.5 39 20 26 22 25.5 25.5 22 30 30 30 30 67 67 67 67 23.5 20 26 46 63 42 63 42 25 32 25 28.5 28.5 25 36 36 36 36 88.5 88.5 88.5 88.5 26.5 23 32 52 84.5 48 84.5 48 32 32.5 30 30 30 30 36.5 36.5 36.5

PFG3x.eng

.: ZS-46-A1) Bracket B (Part No.: ZS-46-A2) DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Digital Flow Switch (Integrated display type) ( compatible)

Input of set values Setting of Setting of tP2L/tn2L Setting of Setting of tP_2/tn_2 P2L/n2L Setting of P_2/n_2 P2H/n2H P2/n2 tP2H/tn2H H_2 tH_2 WH2 (Page 47) tWH2 (Page 44) (Page 44) (Page 46) (Page 46 4. Delay time Setting of dtH2(ON) Setting of dtH2(ON) dtL2(OFF) dtL2(OFF) (Page 45) (Page 45) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (Page 48) 6.

LFE-OMZ0013

The operation for unlocking the key differs depending on the security code request [F81] (page 46).

JXCx-OMY0008

Operations 44 11.1 Return to Origin 44 11.2 Positioning Operation 44 11.3 Pushing Operation 45 (1) Pushing operation is successfully performed 45 (2) Pushing operation fails (empty pushing) 45 (3) Movement of the workpiece after the completion of the pushing process 45 11.4 Controller signal response time 46 11.5 Methods of interrupting operation 46 12.

JXCx-OMU0004

CNI/O . 20 6.1 . 20 6.2 (NPNPNP ) . 20 1 No.JXC-OMU0004-A (1) I/O (NPNPNP ) . 20 (2) I/O . 20 6.3 . 21 6.4 I/O . 23 7. . 24 7.1 . 25 7.2 . 32 7.3 . 35 A . 36 B . 37 C . 38 7.4 . 39 8. . 40 8.1 . 40 8.2 . 41 8.3 . 41 1 . 41 2 . 42 3 . 42 8.4 . 43 8.5 ON . 44 8.6 . 44 8.7 LED . 45 9. () . 46 9.1 . 46 9.2 . 47 9.3 . 48 9.4 . 49 10. . 50 10.1 LEF . 50 10.2 LEH . 53 10.3

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Perations . 45 8.1 Return to origin position . 45 8.2 Positioning operation . 46 8.3 Pushing operation . 47 (1) Pushing operation is successfully performed . 47 (2) Pushing operation is failed (pushing the air) . 47 (3) Movement of the work piece after the completion of the pushing process . 47 8.4 Controller input signal response time. 48 8.5 Methods of interrupting operation . 48 2 - 9.

Digital Gap Checker

Function selection mode 46 Table of default settings 46 Key lock (Security code setting) 58 Maintenance 59 Forgotten the security code 60 Troubleshooting Troubleshooting 61 Error indication 62 Relationship between Supply Pressure and Display 62 -1No.PS-OMR0002-K 1 Before Use Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage

MHZ

MHZ 26 MHF 2-M6 x 1 thread depth 10 MHL (Mounting thread) 5H9 depth 5 +0.030 0 MHR 12 0.02 4-M6 x 1 thread depth13 (Mounting thread) MHK 12 0 0.1 Prepared hole dia. 5.1 through (Mounting hole) MHS MHC MHT 46 46 60 97 MHY 0.02 23 MHW MRHQ 34H9 depth 4 +0.062 0 0 0.5 +2.5 0 40 (49) 29 26 40 12 67 (76) Misc.

3

With arm Port side CK1 Rotary direction: L During unclamping (Extension end) Rotary direction: R During unclamping (Extension end) M CLK2 N With Arm Model (mm) I N O P U V 4 5 8 11 29 36 20 25 8 11 M3 x 0.5 M4 x 0.7 MKB12-Z MKB16-Z CLKG CKQ CLKQ 10 mm Clamp stroke M O I P Model Rod state CK CLK 20 mm 30 mm Retracted Extended Retracted Extended 28.5 46 31.5 49 38.5 66 41.5 69 48.5 86 51.5

Transfer

58 68 M 13 15 19 N 16 15 19 O 18.5 19.5 21.5 F 93.5 107.5 130.5 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 M 30.9 32.4 41.5 N 16 15 19 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 PA Rc 1/8 Rc 1/8 Rc 1/4 PP 56 62.5 78.3 O 69 84 102 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26

CY1F

46 63 198 225 205 294 260 CY1H CY1H MY2H 39.5 For 100mm stroke cylinder Overall length reduced by 22% compared to Series MY2H Magnetically coupled rodless cylinder: Low profile guide Series CY1F: 10, 15, 25 4 types of stroke adjustment are available.

Magnetically Coupled Rodless Cylinder

Load voltage Max. load current 4.4 Lead wire length Switch contacts side 0.5m Load connection side 0.5m 3.4 CD-P SWITCH 18 9 VOLT 15.5 38 46 Connection To connect a switch unit to a contact protection box, connect the lead wire from the side of the contact protection box marked SWITCH to the lead wire coming out of the switch unit.

MHZ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 0 0.1 Prepared hole dia. 5.1 through (Mounting hole) MHS MHC MHT 46 46 60 97 MHY 0.02 23 MHW MRHQ 34H9 depth 4 +0.062 0 0 0.5 +2.5 0 40 (49) 29 26 40 12 67 (76) Misc.