200 to 1000

200 to 1000

200 to 1000

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

AF800/900

410 490 33 46 140 170 439 519 440 520 200 260 Precautions Be sure to read before handling.

ZSE3/ISE3

kPa ISE3L Model 0 to 0.98 MPa 0 to 101 kPa 0 to 98 kPa Operating pressure range Max. operating pressure (1) 200 kPa 1 MPa kPa MPa 1 1 0.01 Min. display unit ZSE ISE Indicator light Frequency response (2) ON: When Green LED (OUT1) or Red (OUT2) turns on 200 Hz Adjustable (3 digits or more) Fixed (3 digits) PSE Hysteresis mode Window comparator mode (3) Hysteresis Z I SE3 Fluid Temperature

Title not found

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

kPa ISE3L Positive pressure 1 MPa ISE3 Model 0 to 101 kPa 0 to 98 kPa 0 to 0.98 MPa Operating pressure range Max. operating pressure 200 kPa (1) 1 MPa kPa MPa 1 1 0.01 Min. display unit Indicator light Frequency response (2) N: When Green LED (OUT1) or Red (OUT2) turns on 200 Hz Adjustable (Variable from 0) Fixed (3 digits) Hysteresis mode Window comparator mode (3) Hysteresis Fluid Temperature

SYJ3000

(Example) SYJ3120-5M-M3 VJ3000-13-1 DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

AS

How to Order Made to Order 2 F 06 A 200 AS Lubricant: Vaseline -X12 Example) AS2002F-04A-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Push-lock type Example) AS2002F-04A-X21 Not particle-free Applicable tubing O.D.1 Metric size Inch size 23 3.22 01

AS_FS Inline

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08 8

P

Speed Controller/In-line Type AS2000-N02-X800/AS3000-N03-X800/AS4000-N04-X800 P .G. information Point to Group Specialized Product Flow Characteristics AS3000-N03-X800 AS4000-N04-X800 AS2000-N02-X800 300 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 1500 250 600 200 1000 150 400 100 500 200 50 0 0 1 2 3 4 5 6 7 9 8 10 0 0 1 2 3 4 5 6 7 9 8 0 0 1 2 3 4 5 6 7 8 Number

HAA

Symbol Description Port size Nil Symbol Size Applicable model D Auto drain F Dust-protecting filter S Mounting bench 3 4 06 Rp socket 10 1B union 14 1 union HAA7 HAA15 HAA22, 37 1 2B Source voltage Symbol Voltage Applicable model 1 2 3 Single phase 100 VAC Single phase 200 VAC Three phase 200 VAC HAA7, 15 HAA7 HAA15, 22, 37 How to Calculate Outlet Air Temperature Outlet air temperature can

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115 VAC] 50/60 Hz 220 VAC [230 VAC] 550/60 Hz 24 VDC 12 VDC Note) Refer to the back of page 394 when using with energization for long periods of time.

Coolant Valve Series SGH

NBR FKM Pressure range 0 to 7 MPa Rc G (ISO1179-1) NPT NPTF 3/8 1/2 3/4 1 Nil G N T Y u Pilot valve o Electrical entry T: Conduit terminal D: DIN terminal (Pitch between the terminals: 11 mm) W: M12 connector (4-pin type) Note 2) V: M12 connector (5-pin type) Note 3) DO: DIN terminal without connector Note 1) V116 i Rated voltage 1 2 3 4 5 6 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Electrical entry MO: M-type plug connector without connector M: M-type plug connector with lead wire L: L-type plug connector with lead wire G: Grommet (DC specification) LO: L-type plug connector without connector With light/ surge voltage suppressor With

WRF100 Frame Clamp Cylinder

Frame Clamp Cylinder WRF100 How to Order C T200 WRF100 Protective cover Nil C Without cover With cover Clamp arm T-type arms Symbol Symbol S-type arms 200 200 Unclamped position T200 S200 240 240 T240 S240 270 T270 Limit switch Clamped position Note) This product does not include the limit switch. (The limit switch should be prepared by the customer.)

ZH

400 ---1 ---1 100 200 Air consumption Air consumption 0 0 0 0 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] Supply pressure [MPa] ZH30-X185 ZH40-X185 3,500 5,000 ---7 ---7 Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow