CM2

(n=2, 4, 6) 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 10 65 20 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 20+50( ) (n=2, 4, 6) 10 75 15 75+55(n2) n2 2 D-B59W 15 75 20 D-A3lA D-G39A D-K39A D-A44A 35+30(n2) 10 100 35 100+100(n2) Mounting Bracket Auto Switch Mounting Band Refer to p.1.4-35 for part numbers of the mounting brackets.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled.

Angle Seat Valve

control equipment 2.

1

Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

Safety Instructions

Timer circuit 2 (, +) 2 SOL. SOL. SOL. SOL.

AC Servo Motor Driver (MECHATROLINK-III type)

Alarm] [Software Reset] [ALM-CLR] ON Reset button Execute button FL-1*2 System Alarm FL-2*2 Alarm CPF00 Digital Operator Transmission Error 1 CPF01 Digital Operator Transmission Error 2 A.

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

Compact Cylinder

4 r w u !2 !0 e o y !3 i q !1 t Rod end male thread Component Parts Note Replacement Parts: Seal Kit Kit no. Material Description No. Contents Size 20 25 32 40 Rod cover 1 CQUB20-PS Chromated Aluminum die-casted Head cover 2 CQUB25-PS Chromated Aluminum die-casted Set of component parts i, !1, !2, !

2-Color Display

wire with connector Mounting screw (with 2 pcs. of M3 x 8L) O-ring, one-touch clip included O-ring, one-touch clip included 3 cores, for 1 output, 2 m 4 cores, for 2 outputs, 2 m 3 cores, for 1 output, 2 m O-ring, one-touch clip included O-ring, one-touch clip included Lead wire with connector (with connector cover) 2 Series ZSE30A(F)/ISE30A 2-Color Display High-Precision Digital Pressure

Clean Gas Filter

Note 2) Based on SMCs measuring conditions. Construction q t e r w IN Description No.

2/3 Port Valve for Various

# $ VXR215 VXR226 VXR227 VXR238 2 0 Material 2 0 2 0 . ' + . / . 01$ 2 0 VXR239 2 0 17-3-53 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

AC Servo Motor Driver (MECHATROLINK-II type)

Alarm FL-2*2 CPF00 Digital Operator Transmission Error 1 CPF01 Digital Operator Transmission Error 2 A.

Series TPH Clean Tubing Polyolefin Tubing

(20C) Note 2) Note 2) 1.0 MPa 0.7 MPa 15 25 35 45 55 Min. bending radius (mm) Refer to the burst pressure characteristics curve.

Miniature Regulator Series ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

Digital Flow Switch

Nominal thread size Required torque Piping port size Width across flats of attachment Rc1/2, NPT1/2, Rc3/4, NPT3/4 28 to 30 Nm 1/2 30 mm 3/4 35 mm Piping for the One-touch fitting For the one-touch fitting, use tubing with a tube inside diameter of 9 mm or more.

MHx-OMY0005

&/(Best Pneumatics) 2. 2-6. 1. 2. 3. 4. 5. 2-7. 1. 1 ()ISO VG32 (MSDS) 3 3-1. 1. 2. 3. 4. 5. 6. 7. 11 3-2. 1 8 MHF-A0802 MHF-A0802-1 :0.65Nm B C :0.26Nm MHF2-8D MHF2-8D1 8 MHF-A0801 MHF-A0801-1 12 3-2. 2 MHF2-8D2 MHF2-12D R 8 MHF-A0802-2 12 MHF-A1202 MHF-A1202-1 MHF-A1202-2 16 MHF-A1602 MHF-A1602-1 MHF-A1602-2 20 MHF-A2002 MHF-A2002-1 MHF-A2002-2 MHF2-16D

CG1

2 !3 !4 !5 !6 !7 !8 !

Sine Rodless Cylinder Series REBR Direct Mount Type

2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.