Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 800mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable),

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 150mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic

Table Accuracy: Basic Type, Max. Rotating Torque: K (High Torque, 10 N▪m), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: L (Entry Left Side), Actuator Cable Type, Length: R3 (3m), Controller: C91 (Ether Net/IP™), Mounting: 8 (DIN Rail)

Series: LEFS, Accuracy: H (High-precision Type), Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 100mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length

Series: LEKFS, Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 50, Motor Option: w/o Option, Seal Band Stopper: N [Roller Type Seal Band Stopper [Grease Free]], Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type

Size: 25, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Series: LEFS, Accuracy: H (High-precision Type), Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 300mm, Motor Option: w/o Option, Auto Switch Compatibility: None, Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length

Size: 16, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D4 (In-line; Motor Cover Direction: Bottom), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 100mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable

Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Actuator Cable Type: R (Robotic Cable - Flexible cable), Actuator Cable Length: 3 (3m), Controller Type for (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢

Electric Actuators

5 to 50C 5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric power 180VA 300VA 300VA 300VA 640VA 180VA 300VA 640VA 180VA 300VA 640VA 640VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction Maximum positioning point setting Can be selected between the motor side and the side opposite the motor. 1008

VFR

Note 3) Solenoid valve: Max. 50C Note 4) Synthesized effective area with 2 position.

Process Pump

The compatibility is indicated for fluid temperatures specified for the respective products (50C or less). 7. Do not use liquids that will cause the wetted sealant to swell.

70pvpump

: based on 25C) 2% F .S. or less (0 to 50C: based on 25C) 5% F.S. or less (0 to 60C) ZSE30: 0.2 F.S. 2 digits or less ISE30: 0.2 F.S. 1 digit or less Repeatability 1% F.S. or less 0.2% F.S. 1 digit or less 0.5% F.S. 0.2% F.S. 1 digit or less Hysteresis mode: Variable Window comparator mode: Variable Hysteresis mode: Variable Window comparator mode: Variable Variable 1 to 10% Fixed 3% F.S.

XL

For models with a solenoid valve, the temperature of the solenoid valve section should be no greater than 50C. All models 1. When controlling valve responsiveness, take note of the size and length of piping, as well as the Cv factor (flow rate characteristics) of the actuating solenoid valve.

Vacuum Unit

(Refer to page 33.) 17 A Vacuum Unit ZK2mA Series Specifications General Specifications Valve Common Specifications Model4 ZK2-VAmK ZK2-VAmR ZK2-VAmJ 5 to 50C Without pressure sensor/switch With pressure sensor 0 to 50C With pressure sensor 5 to 50C Pressure switch with energy saving function Fluid Air Operating temperature range (No condensation) Type of actuation5 Supply valve: N.C.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating

Compact Manifold Regulator

Note 2) 5 to 50C when the digital pressure switch will be used.

Dedicated Controller Series LC1 Uniaxial Type

5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric energy 180VA 640VA 300VA 300VA 640VA 100VA 300VA 640VA 640VA 300VA 180VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return function Maximum positioning point setting With magnet switch as adjacent switch, and encoder Z phase signal as home position signal

Multistage Ejector (N)ZL Series

Fluid Air Operating pressure range Internal pilot type 0.2 to 0.5MPa (29 to 72 psi) 5 to 50C (41 to 122F) Ambient and fluid temperature Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Slotted locking type With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust