0.8 22.5 2.5 Finger opening port 4.5 11.5 23 11 2 18 25 15.5 41.5 5 33 Angle adjustment bolt 63 11 2 x 4.5 through 2 depth 4 +0.025 0 3 x 3H9 (one each on three sides) 2 x 8 depth of counter bore 2.5 10 long groove depth 3 +0.025 0 3 x 3H9 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 M5 x 0.8 Port A Port B 4 x M4 x 0.7 depth 6 N J I E A D P A A M N 2 C M S R R E O P T 6 P A R I R Y G
Communication specification . 2-2 2.3 Connection explanation . 2-2 2.4 Setting and checking . 2-3 2.4.1 Setting and checking . 2-3 2.4.2 Setting and checking . 2-4 2.5 Contact input signal . 2-12 2.5.1 Run/stopRunStopExternal switch signal .2-13 2.5.2 Signal of the external switch .2-14 2.6 Contact output signal . 2-16 Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication
. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 3 2 3 Cautions about reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .
7 C 7-1 7-2 1) 2) 7-1 IDU Series 7 1 IDX-OM-W029 8 L 8 L 8-1 1. 1 2 2. 3
and before communication . 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14
6-5 IDFA3E IDFA4E15E1 2 6-5 IDFA Series 6 5 IDX-OM-W017 7 A A 7 1 7 2 A 7 3 7 4 IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 3/h(ANR) 1) 8 23 29 32 39 72 m 10 1ANR65% 2 IDFA Series 7-1 7 1 IDX-OM-W017 8 C C 8-1 1) 2) 8-2 8-1 IDFA Series 8 1 IDX-OM-W017 9 K 9 K 4-2 9-1 1. 1 2 2. 3.
/ Installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart
. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .
The PE line of the power supply cable Indicated content : (1%) 300 Ratio #1 Temperature detected by internal ERR11 WRN temp. sensor PV < 31.6 C #1 SV < 30.0 C MODE Normal Sets the temp. range for judgment of overload (accompanying abnormal output alarm ERR15). #2 Temperature detected by external 0.1 to 9.9 7 Overload Judging is available for grounding.
Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.
thread 30 D C H B (mm) C d D H B Part no.
A 3.0 D Specification Element Model A B SCFM Nm3/h C D In/Out Side Bottom Lbs Dimensions (in) Connections (NPT female) Flow Rate Weight Model Number 5.5 1/4 1/8 male 1 1.25 6 14 4.5 AFW150-N10DG-[a] 255 EL-AFW150-[a] 150 12 1/2 1/4 1-1/2 1.5 6.5 19 5.75 AFW225-N14DG-[a] 382 EL-AFW150-[a] 225 12 1/2 1/4 1-1/2 1.5 6.5 19 5.75 AFW300-N14DG-[a] 510 EL-AFW150-[a] 300 B 12 1/2 1/4 2 1.5 6.5 19
Fittings & Tubing Air Cylinders Rotary Actuators C 5 C Max. 4 20 4 Without stroke adjuster 2 x M4 x 0.7 depth 6 G Max. 3 M 7.5 Stroke: S C 2 x M3 x 0.5 depth 4 11-/22-MXP12-15 A Width across flats 2 H 14 Width across flats 7 Piping port 4 x M4 x 0.7 depth 4.5 17.8 M4 x 0.7 8.5 2 x M5 x 0.8 8 4 (Plug: MGP12-08-CA001-R) 4.2 25 24 8.5 A 0 +0.030 depth 3 3 3 0 +0.030 depth 3 1.5 19 220.05 4 x
15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-Rc1/8 thread depth 5 SS T Bore size (mm) 2 2-4.3 through 2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with
ZQ-OM01301-A Vacuum Pump System Manifold ZZQ108A-S O C-A (1) (2) (3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 2) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 2) Select S for the Option Symbol (10). (4) Shipping condition (2) Vacuum pressure
(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order
For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (
5 7 State of indicator light D B C E 8 3 4 6 Switch No.
Refer to page 7-2-5. 2-M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 20Data C + Stroke 3 B + Stroke A + Stroke Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 7-2-7 7 Series CUJ Construction Double acting !3 w e q !1 r y o e t !
Rolled steel Nickel plated Not required for 100 @0 Flat washer Nickel plated Steel wire @1 Spring washer Felt @2 Felt Nickel plated Rolled steel @3 Holder Nickel plated Carbon tool steel @4 Type C snap ring for hole 8-21-20 20 Guide Cylinder Series MGG 63 to 100/MGGF #3 !5 #9 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A MX @1 @0 !9 MTS !