Compact

0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

R P R R P R L (10) 8 End plate side End plate side (24) (35) 5.5 Silencer with One-touch fitting This is a silencer which can be attached to the R (exhaust) port of a manifold using a One-touch fitting. Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

HRX-OM-W032

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)% (2) And following instructions must be executed.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 Metric size 3.2, 4 6, 8, 10 4 6 8, 10 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 180 230 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Effective area (mm2) Note)

CLK1

50 Safety distance (mm) 40 Operational range 30 l1 20 l1 Dangerous range 10 0 5000 10 15000 20 Welding current (A) l2 50 Safety distance (mm) 40 30 l2 l2 Operational range 20 10 0 5000 10 15000 20 Welding current (A) 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SPAIN/PORTUGAL SMC Espaa, S.A.

EXxx-OMN0027CN

PLC H.T. ) Enable 1 (SC_MonSs) Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 (Range) -10..10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary PLC 3 (D_Format) Sign & Magnitude 2S Complement None 2 2AVG 2 4 (Filter) 4AVG 4 8AVG 8 Enable 0.5 5 (Over_Rng) Disable Enable 0.5 6 (Undr_Rng) Disable Enable 1 (Upr_Lmt) 7 Disable Enable 1 (Lwr_Lmt) 8 Disable

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

CJP

Bore (mm) Description Mounting nut Rod end nut SNPS-006 NTP-006 SNPS-010 NTP-010 SNPS-015 NTP-015 6 10 15 1.2-9 Series CJP Recommended Mounting Hole Dimensions for Plug Mounting Style Machining dimensions for Mounting When plug mounted Bore (mm) Stroke A B G F C E D 5 16 12.5 10 6 10 23 3 19.5 8.5 M10 X 1.0 17 3.5 15 30 26.5 24 5 17 13.5 10.5 10 10 23.5 4 12 20 M15 X 1.5 3.5 17 15 30.5 27

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AK Flow Rate and Sonic Conductance VCHC ASR ASQ Model AS22l1F-U01 AS23l1F-U01 AS22l1F-U02 AS23l1F-U02 AS32l1F AS33l1F AS42l1F AS43l1F Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Flow Rate and Sonic Conductance Model AS22l1FSl-U01 AS22l1FSl-U02 AS32l1FSl AS42l1FSl Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

Clean Gas Filter

SFB 02 10 0 Clean gas filter (Straight type) Made to Order PTFE membrane element is made into a cartridge. (Filtration 0.01 m (Filtering efficiency 99.99%)) Made into a cartridge by fluoropolymer holder and fluororubber (FKM) gasket. Description Aluminum case (Refer to page 312.) X8 Symbol Nil Model type Symbol Type 10 Cartridge Elements are replaceable.

STAINLESS STEEL CYLINDER

Specifications 1-1 Specifications Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Min. operating pressure 0.05MPa -10 to +70oC. -10 to +60o Ambient and fluid temperature C with built-in magnet (No freezing) Lubrication Not required (non-lube) Stroke length tolerance 1 to 1000st +1.4 mm 0 +1.8mm 1001 to 1500st 0 Cushion Rubber bumper/ Air cushion Piston speed 20 to 63 50 to

VNC

N.O. 5.7 5.5 2 VXA 1 4 VNC0 VNC02 10.4 10.2 50 VN 12 (P1) 10 (P2) Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

High Speed Pilot Operated

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating

10 C)2.8(at ?10 C)?0.10.45/0.65 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10 C)2.5(at ?10 C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

10 C)3.4(at ?10 C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.715/22Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

Air cylinder

Specifications 1-1 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 Mpa Min. operating pressure 0.05Mpa -10 to +70 oC. With magnet built in: -10 to +60 o Ambient and fluid C temperature (No freezing) Lubrication Not required (non-lube) Stroke length tolerance Cushion Rubber bumper Piston speed 50 to 750 mm/s Warning Confirm the specifications.