Ionizer Nozzle type IZN10 Series IZS

Metal ( shaded) part Metal ( shaded) part Tap for ground wiring Resin part ( shaded) 454 Ionizer IZN10 Series Power Supply Cable Connection Circuit NPN PNP Ionizer Ionizer IZS Brown +24 VDC Brown +24 VDC +24 V +24 V Power supply 24 VDC 10% 0 V +24 V Power supply 24 VDC 10% 0 V +24 V Blue 0 V Blue 0 V IZN IZN INPUT PLC OUTPUT OUTPUT PLC INPUT IZF Orange Discharge stop signal Orange Discharge

Nozzle Type Ionizer

Make sure to ground. +24 V +24 V Brown + 24 VDC Brown + 24 VDC +24 V Power supply 24 VDC +24 V Power supply 24 VDC Blue 0 V Blue 0 V 0 V 0 V F.G. F.G. Make sure to ground. Make sure to ground.

Fieldbus System

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

VXA21/22

Note 2) Value on option "V" (Non-leak, Vacuum).

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

PF-OMN0009_C

1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L

rep-filter-e

(b) Incorrect mounting of V band (Not correctly fit with collar of cover) Fig. (b) Incorrect mounting of V-band [V-band for replacement] Part no: CY-27S Actuators Modular F.R.L. Pressure Control Equipment Retainer T bracket Caution Clean V-band and the contact surface between the cover and the case before mounting. Dirty contact surface lead to cause leakage.

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

200 V, 12 V, 24 V, 48 V, 110 V, 220 V 240 V With surge voltage suppressor (S) (Grommet type) With light/surge voltage suppressor (Z) (Grommet terminal) (Conduit terminal) (DIN terminal) L plug connector M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug connector

Industrial Filters Replacement Procedure

(b) Incorrect mounting of V band (Not correctly fit with collar of cover) Fig. (b) Incorrect mounting of V-band [V-band for replacement] Part no: CY-27S Actuators Modular F.R.L. Pressure Control Equipment Retainer T bracket Caution Clean V-band and the contact surface between the cover and the case before mounting. Dirty contact surface lead to cause leakage.

70astamb1

) Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 12 V Water resistant (2-color indication) 2-wire Y7BA Lead wire length symbols: Solid state switches

mb1

) Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 12 V Water resistant (2-color indication) 2-wire Y7BA Lead wire length symbols: Solid state switches

Table of Contents

Principal Parts Material Body C3604BD, Flame resistant PBT (UL-94 standard V-0) C3604BD (Thread portion) Stainless steel 304 Stainless steel 304, Flame resistant PBT (UL-94 standard V-0) POM Stud Chuck Guide Collet Release button Seal, O-ring Flame resistant PBT, Flame resistant CR (UL-94 standard V-0) Cover (Option) Flame resistant PBT (UL-94 standard V-0) NBR 15-3-1 2 Series KR Model Male

OMR0032

Pulse train signal specifications (Open collector input and differential input are common) 5 s or more 24 V 21.6 V to 26.4 V 5 V 4.75 V to 5.25 V PP3s or less 5 s or more 3s or less 16 s or more 28 - 7.4 Parallel I/O signals (Pulse Input Type) (1) Input side (Pulse input type) Function Description Common terminal for the input signal power supply.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) i Controller Nil Without controller Cm1mm With controller 1 D T 7 C Communication plug connector, I/O cable*4 Interface (Communication protocol/Input/Output) Mounting Symbol Type Applicable interface Nil

Wireless System

Description 2 1 24 V (for control/input) 1 24 V (for output) 2 24 V (for output) 2 0 V (for output) 3 0 V (for control/input) 3 24 V (for control/input) 4 0 V (for output) 4 0 V (for control/input) 3 (86.6) 4 1 73.6 56.6 Power supply connector PWR OUT: M12 5-pin socket, A-coded Configuration EX600-ED4 (Pin arrangement 1) EX600-ED5 (Pin arrangement 2) Pin no. Description Pin no.

PSxx-OMM0006CN

Max.28 V80 mA 1 V OUT1 OUT2 DC(-) DC(+) -X () NPN 2 Max.28 V80 mA 1 V OUT1 OUT2 DC(-) -20No.PS-OMM0006CN-E DC(+) -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 OUT1 OUT2 DC(-) DC(+) -V/-T () PNP 2 Max.80 mA 1 V OUT1 OUT2 DC(-) DC(+) -Y () PNP 2 Max.28 V80 mA 1 V OUT1 OUT2 DC(-) -21No.PS-OMM0006CN-E M8(3 ) 1 DC(+) 3 DC(-) 4 OUT Z/ISE40A---L -N NPN