5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

3 Position Cylinder Series RZQ

+ Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5

VQ4000

PUSH Terminal block marking Model A COM B T TURN 0 1 0 1 VQ410 A side COM LOCK VQ420 Caution A side COM B side 3 4 5 6 0 1 VQ4 0 A side COM B side Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below. Note 1) Not polar, possible to use as COM.

MXS

3 t !

Vacuum Pad: Ball Joint Type

Dimensions H B Ball joint type: 10 to 32 (mm) D Model B d H Y ZPNA-M10 M10 x 1 3 14 E ZPNA-M14 M14 x 1 5 19 ZPNA-M8 M8 x 1 3 12 C A B Ball joint type: 40, 50 ZP3 D ZP3E ZP2 E Y ZP2V C A ZP B ZPT ZPR ZPT ZPR (mm) Model B A C D E Y XT661 ZP10F 10 12 6.5 1.5 ZP13F 13 15 3 8.2 7 2 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 25 28 4 10.2 3 ZP32F 32 35 9 ZP40F 40 43 10 13 5 26 ZP50F 50 53 8 14 6 725 ZPT/

High Power Cylinder:

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

Compact Cylinder

B dimension is 133 mm.

MXW

Heat treated q w e r t y u i o !

Round Type Hydraulic Cylinder

11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 A 14 12 19 23.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.

CEx-OMB0060

Input waveform requirements [A/B quadrature input] Two count channel input (A and B) in quadrature (90nominal phase relationship).

CV/MVGQ

B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7)

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70 18.3 10.5 11.5 17.5 100 MY-S63A B Guide for Side Support Application MY1CW MY1MW During long stroke operation, the cylinder tube may deflect due to its own weight and/or load weight.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Cable color Signal Nil A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 S Standard cable Cable color Connector D terminal no. Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

Air Cylinder Series MB

, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-F5LF D-P5DWL Bore size (mm) A A A A B A A A A B B B B B B B 32 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 40 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100

AW20-B to AW60-B

Note 2) Drain guide is NPT1/8 (applicable to the AW20(K)-B) and NPT1/4 (applicable to the AW30(K)-B to AW60(K)-B). The auto drain port comes with 3/8" One-touch fitting (applicable to the AW30(K)-B to AW60(K)-B). Note 3) Drain guide is G1/8 (applicable to the AW20(K)-B) and G1/4 (applicable to the AW30(K)-B to AW60(K)-B).

Process Pump

B Control unit Diaphragm B Diaphragm A 1.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Filter Regulator AW-B Series 1021AW K-B Series 1021Filter Regulator with Backflow Function How to Order Clean series "J" must always be selected. K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Pin Clamp Cylinders

A: Lock unit holding bolt R 075 CKQG32X B 08 CKQG32X CK1 B: Cylinder holding bolt Guide pin diameter * Refer to Table 1 (Symbol 2) below. Applicable hole diameter of workpiece * Refer to Table 1 (Symbol 1) below.