Lubricator Series AL10 to 60

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 14-2-63 Series AL10 to 60 Dimensions AL10 AL20 L D Bracket (Option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50/60 AL30/40 L D D L Port size Bracket (Option) Bracket (Option) G F G F Port size M K M K E J C B R

High Vacuum Slit Valve

one for C open and close) F D-sub connector (CDE-9PF05 : Hirose Electric Co.

Vacuum Saving Valve

D-DN This catalog is printed on recycled paper with concern for the global environment.

AMF

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

4-channel Flow Monitor ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 8, 40) Check if there is a noise source nearby.

E-P HYREG ® Series VY1 1

Stations Dimension 2 3 4 5 6 123 169 215 261 307 107 153 199 245 291 L1 L2 14-10-17

IDX-OM-W095

5-3 IDX-OM-W095 6 6.1 OFF ON OFF OFF T 600mm 1 6.2 10% 600mm 1 OFF ON 10% 3 3 IDFC60/70/80/90 Series 6-1 IDX-OM-W095 600mm 1 2 INOUT IN OUT O IDFC60/70/80/90 Series 6-2 IDX-OM-W095 O O O () O O 8mm5m S )DUPONT KRYTOX GPL207 IDFC60/70/80/90 Series 6-3 IDX-OM-W095 6.2 2-1 6.1 OFF OFF ON OFF ON T ON IDFC60/70/80/90 Series 6-4 IDX-OM-W095 7 7.1 IDFC60-23 IDFC70-23

NGIP seies

D-97.D-93A (|& @D D-93A il ! @ D-90 : lnch D-97 Caution. 1) The abovo dimensions may vary in areas whre magnetic Inlerlerence is present. 2) Fo. 14 stroke cylinder, only one aulo switch may be mounted eithgr on the rod end or the cap end. 3) There are two ways to mounl lhe auto swilches as shown in the above ligure.

IDX-OM-W094

AD402P-040S 1 IDFA60/70/80/90 Series 5-3 IDX-OM-W094 6 6.1 OFF ON OFF OFF T 600mm 1 6.2 10% 600mm 1 OFF ON 10% 3 3 IDFA60/70/80/90 Series 6-1 IDX-OM-W094 600mm 1 2 INOUT IN OUT O IDFA60/70/80/90 Series 6-2 IDX-OM-W094 O O O () O O 8mm5m S )DUPONT KRYTOX GPL207 IDFA60/70/80/90 Series 6-3 IDX-OM-W094 6.2 2-1 6.1 OFF OFF ON OFF ON T ON IDFA60/70/80/90 Series 6-4 IDX-OM-W094

Digital Flow Switches Series PF2A

Terminal block numbers 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

Magnetic Field Resistant 2-color Indication Type Solid State Auto Switch

Internal circuit D-P3DW(A) AND connection is not possible for this product. D-P3DW(A)SC D-P3DW(A)SE -10No.D-#S-OML0002-B Maintenance How to reset the product for power loss or forcible de-energizing Regarding set up, contents of the program may be maintained by customer's application systems.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

6 !7 !

High-precision Digital Pressure Switch ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 7, 8 and 9) System error (Er0, 4, 6, 7, 8, 9) is displayed. Check if there is a noise source nearby. (2) Check if the power supply voltage is in the range 12 to 30 VDC. (2) Supply power in the range 12 to 30 VDC.

High-precision Digital Pressure Switch

[March 2020] D: Contents revised in several places. [August 2021] E: Contents revised in several places.

Digital Flow Switch Series PFA For Air Series PFW For Water

View A PFA3-B DIN rail type Sensor Blue Brown Black Analog output 1 2 3 4 3 x 7.2 (= 21.6) 8-M3 36 15 6.4 2 3.4 5 6 7 8 OUT1 N.C. Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.

4-channel Flow Monitor (Remote type monitor unit)

(When the waterproof seal is used, Suitable for panel thickness of 0.5 to 6 mm.) Power and output cable (ZS-26-A) Sensor connector ZS-28-C ZS-28-CA-42No.PF-OMH0003-F Revision history A: Full scale revision due to the change of the format and addition of items. B: Content is changed due to the change of the format. C: Contents revised in several places. D: Contents are added.

PF-OMN0009_C

F K L N P Q Q PF3W504S 104 50 63.6(Max. 68.6) 70.2 34 58.5 18 13.6 2.7 10 19 6 PF3W520S 112 54 63.6(Max. 68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W540S 142 71 75.25(Max. 81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W504S 56.5 22 PF3W520S 60.5 22 PF3W540S 78 30 -44No.PF-OMN0009CN-F PF3W504/520/540(+) A AA D K S PF3W504S--T 115 50 81.2 69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S

Digital Flow Switch (Remote type sensor unit)

F K L N P Q Q: Number of rotations Model PF3W504S 104 50 63.6 (Max. 68.6) 70.2 34 58.5 18 13.6 2.7 depth 10 19 6 turns PF3W520S 112 54 63.6 (Max. 68.6) 74.2 34 62.5 18 13.6 2.7 depth 10 19 6 turns PF3W540S 142 71 75.25 (Max. 81) 94.5 44 79 28 16.8 2.7 depth 10 28 7 turns Symbol Bracket dimensions Model S T PF3W504S 56.5 22 PF3W520S 60.5 22 PF3W540S 78 30 -44No.PF-OMN0010-J PF3W504/520/540

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

Series 10-SV ® EX500 Decentralized Serial Wiring

External pilot type (R) X, PE port sizes are 4 (metric), 5/32" (inch) for the 10-SV1000/2000 series and 6 (metric), 1/4" (inch) for the 10-SV3000/4000 series. 183