ARM10/11

3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs. Bracket assembly n pcs. (2) When regulators, end plate assembly and bracket assembly are assembled to make the manifold of n stations. Regulator n pcs. Bracket assembly n pcs.

Rotary Gripper Series MRHQ

40 40 Pressure 0.6MPa Pressure 0.6MPa Gripping force N Gripping force N 30 30 0.5MPa 0.5MPa 20 20 0.4MPa 0.4MPa 0.3MPa 0.3MPa 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20S MRHQ20C 50 100 Pressure 0.7MPa Pressure 0.7MPa 40 80 Gripping force N Gripping force N 0.6MPa 0.6MPa 0.5MPa 30 60 0.5MPa 0.4MPa 20 40 0.4MPa 0.3MPa 0.3MPa 10 20 0.25MPa 0.25MPa

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

90 5 90 10 180 10 90 5 90 10 180 10 90 5 90 10 180 10 90 5 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) 5 to 60C Ambient and fluid temperature 0.15 to 0.7 0.2 to 0.7 0.15 to 1.0 Operating pressure range (MPa) Rotation time adjustment range (sec/90) 0.07 to 0.3 Allowable radial load 40 N 50 N 60 N 20 N 30 N 60 N 80 N 15 N Shaft load Allowable thrust load 2 15 N 30 N 40 N 10 N Allowable

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 829-10. 8-29-17 18 Dual Rod Cylinder: With End Lock For Retraction Side Series CXS 6, 10, 15, 20, 25, 32 How to Order CXS M Y7BW 50 S R 10 Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf

Air Slide Table Series MXJ

Lr=40 mm MXJ4 MXJ4 MXJ4 0.03 0.20 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXJ4-10 MXJ4-10 MXJ4-5 MXJ4-5 MXJ4-5 MXJ4-5 -10 0.08 -10 0.15 MXJ4-10 MXJ4-10 0.02 0.06 MXJ4-5 MXJ4-5 0.10 0.04 0.01 0.05 0.02 20 40 60 0 10 30 50 20 40 60 0 10 30 50 0 10 5 15 Load (N) Load (N) Load (N) MXJ6 MXJ6 MXJ6 0.04 0.10 0.20 Table displacement amount

CQS

10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2. Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2.

Electric Rotary Table

30 50 0.3 1.2 10 6 10 1 2 25, 50, 75 6 10 1 2 25 50 420 Gripper Step Motor (Servo/24 VDC) 2-finger type Long stroke 2-finger type With dust cover 3-finger type 2-finger type Series LEHZ Series LEHS Series LEHZJ Series LEHF CAT.ES100-77 Series LEHZ Series LEHZJ Series LEHF Series LEHS Max. gripping force (N) Max. gripping force (N) Max. gripping force (N) Stroke/both sides (mm) Stroke/both

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2. Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2.

CV/MVGQ

D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF D60 + 45 (n 2) 60 15 10 D-C73C/C80C D-H7C 15 + 50 ( n 2) (n = 2, 4, 6) -X 2 65 + 50 (n 2) 65 15 10 4. One-touch fitting cannot be replaced. One-touch fitting is press-fit into the cover, thus cannot be replaced.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

10 16.5 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 (Pilot EXH port) Rc 1/8 SMC 1 P 5 3 R2 R1 42 17.5 PE 18 18 38 72 L n Dimensions Formula L1 = 25n + 63, L2 = 25n + 198 n: Stations In the case of DI unit, 1 pc., 54 mm is added per 1 pc. 9 288 423 10 313 448 7 238 373 11 338 473 6 213 348 12 363 498 5 188 323 13 388 523 4 163 298 14 413 548 3 138 273 15 438 573 8 263 398 L1 L2 2 113

Clamp Cylinder with Lock Series CLK1

A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

Low Profile Slide Table Series MXF

F A A Lr MXF8 Lr = 20 mm 0.08 0.04 0.03 MXF8-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXF8-30 0.06 MXF8-10 MXF8-20 MXF8-30 0.03 0.02 MXF8-20 0.04 0.02 MXF8-20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 MXF12-50 0.06 Table displacement amount (mm) Table displacement

AS

Metric size Inch size 23 04 06 08 10 12 Thread type 01 03 05 07 09 11 13 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 Port size M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N Use 1/8" tube.

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

48

7 u A A A-A (LEL25LT-n) A-A (LEL25MT-n) !9 !9 t @0 @1 !0 !6 !8 !5 o Component Parts Description No.

Table of Contents - Tubing

L* N x 4 N x 8 N x 12 N x 6 N x 12 N x 18 N x 8 N x 16 N x 10 N x 20 N x 12 N x 24 D 18 28 28 24 37 37 31 42 52 52 67 67 TCU0425-1N-X6 TCU0425-2N-X6 TCU0425-3-N-X6 TCU0604-1-N-X6 TCU0604-2-N-X6 TCU0604-3-N-X6 TCU0805-1-N-X6 TCU0805-2-N-X6 TCU1065-1-N-X6 TCU1065-2-N-X6 TCU1208 -1-N-X6 TCU1208 -2-N-X6 LX5.9 + 200 LX4.4 + 200 LX2.9 + 200 LX5.3 + 200 LX3.8 + 200 LX2.5 + 200 LX5.2 + 200 LX3 +