Pneumatic Transfer System Series MF

15 66 32 69 68 52 1 0 10 6 (absorber stroke) 36 2-RB0806 shock absorber M8 x 1.0 0.5 (difference in level) 93 Note) Rc(PT) 1/8 Cylinder port 174 + Stroke 6 6 2-7 through 52 82 15 28.5 M5 x 0.8 Hexagon socket head plug 25 36 8 48.5 48 59 60 52 44 40 SMC 11 (width across flats) 11.5 Body (Support bracket) (MY-S25A (B)) Note) The dimension can be adjusted to a maximum of 108mm.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

L dimensions n (stations) Dimensions 3 8 9 2 6 10 4 7 5 L1 66 176 198 44 132 220 88 154 110 L2 75 185 207 53 141 229 97 163 119 L3 84 194 216 62 150 238 106 172 128 Manifold composition 3 stns. x 1 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 1 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns.

VCB

50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Principal Parts Material C3604 (Electroless nickel plate) (Nipple M-3N, M-5N: Stainless steel 303) Nylon 66: GF30%, Stainless steel 304: NBR (PVC for M3) Material Body Gasket Body of M-5E, M-5ER, M-5M is not surface-treated. Electroless nickel plate treated is available as option -X2.

AMPSeries

80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

99

10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) 66

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

port) H 4 x M8 x 1.25 (Piston rod thread and rack thread) 33.2 11.5 6.5 12 16 16 16 1 27 18 O S 12 23.5 52 29 K (81) 18.5 38 12 29 29 14 4 4 14 40 When open F 21 21 4 x M8 x 1.25 through (Thread for mounting attachment) 64 When open G (mm) J 38 86 104 H 212 344 382 G 166 298 336 F 116 198 216 E 48 102 120 D 104 158 176 B C 70 124 142 A MHL2-25D MHL2-25D1 MHL2-25D2 112211221122162 260 298 66

PSxx-OMT0001CN

No.PS-OMT0001CN-E // ISA3-A/B2 OUT1 OUT2 or 2 7 8 14 15 (ISA3) 15 () 17 (2 ) 17 18 21 27 27 30 35 39 42 43 45 OUT1 OUT2 45 OUT1 45 OUT2 46 47 47 48 48 48 () 62 63 64 65 66 67 -1No.PS-OMT0001CN-E 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

PFxx-OMP0001CN

IN(66) IN OUT OUT IN 8cm () Rc1/2NPT1/2Rc3/4NPT3/4 2830 Nm 1/2 30 mm 3/4 35 mm 9mm 2F.S. -16No.PF-OMP0001CN-F FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -17No.PF-OMP0001CN-F NPN(2 ) PFMB7--ADC(+) OUT1 OUT2 DC(-) 28 V 80 mA 1 V NPN(1 )(15 V) PFMB7--CNPN(1 )(420 mA) PFMB7--DDC(+) OUT1 DC(-) 28 V 80 mA 1 V C15 V 1 k D420 mA 600 NPN(1 ) PFMB7--GDC(+) OUT1 DC(-) 28 V 80 mA 1 V 0.4V ()30 msec

REA/REB

For details about auto switches with pre-wire connector, refer to page 10-20-66.

24

Made to Order Dimensions Water resistant [mm] A B DA FA FB 50 st or less Over 50 st and up to 200 st Over 200 st Bore size [mm] 20 66 90.5 123 66 (10) (8) 21 25 67.5 91.5 123.5 67.5 (10) (9) 21 32 87 105.5 141.5 71.5 (14) (10) 24 40 87 105.5 141.5 78 (14) (10) 24 50 99.5 120.5 161.5 83 20 (12) 27 63 99.5 120.5 161.5 88 20 (12) 27 80 110.5 137.5 186.5 102.5 25 (16) 30 100 130.5 155.5 194.5

4-channel Flow Monitor ( compatible)

(Refer to page 66)) (3) Change the set value with UP or DOWN button, and press the SET button to set the value. Then, the setting moves to setting of OUT2. (The snap shot function can be used. (Refer to page 66)) (4) Complete the OUT1 setting. [P_2] or [n_2] is displayed on the sub screen (left). Continue with setting the OUT2.

VQZ1000/2000/3000

Pg.7 Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 35.5 M plug connector (M): VQZ3120 1(R)-M-C6/C8/C10/02 Cover diameter 1.5 Cross section 0.23 mm2 77 (Lead wire length) 300 102.5 66 114 Indicator light 37 <42> < >: AC 2-7-15 Body Ported 16 16 Series VQZ1000/2000/3000 Dimensions: VQZ3000 2 position double Grommet (G): VQZ3220 1(R)-G-C6/C8/C10/02 300

Vacuum Module Series ZX

(mm) Stations Symbol 7 180 192 197 8 5 138 150 155 6 159 171 176 3 96 108 113 4 117 129 134 1 54 66 71 2 75 87 92 L1 33 45 50 L2 L3 900 Ejector System Series ZX Vacuum Module: ZA Circuit diagram ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ + + + + AMV AEP Vacuum port (V) M5 (or M6) HEP Related Equipment 10.7 V V 22.5 21 4.2 901 Vacuum Module: Vacuum Pump System Series ZX [Option] How

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

CLS

54 68 48 66 54 Cylinder With$ Locking Mechanism 80 CL 60 76 64 86 66 82 70 102 CL1 82 98 86 Be sure to confirm operation after mounting.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

207 0.2 0.18 0.13 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 71 212 M16 x 1.5 25 22 18 7 14 66 207 0.025 0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 78 231 M20 x 1.5 30 27 22.4 9 19 73 226 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 95 257 M24 x 1.5 35 32 28 11 24 85 247 0.030 0.076 0.2 80 80 65 55 M39 x 1.5 60 57 45 15 41 113 295 M30 x 1.5 45 42 35.5 13 30 98 280 0.030 0.076 0.036

IDU/IDF

IDF2D 62 112 571 IDF-BP2C 3/8 IDF3D 57 112 632 IDF-BP3C 706 112 77 IDU3D IDU-BP3C 3/8 IDF4D 66 112 792 IDF-BP4C 791 112 66 IDU4D IDU-BP4C IDU6D, 8D, 11C, 15C, 22C1, 37C1, 55C, 75C IDF6D, 8D, 11C, 15C, 22C1, 37C1, 55C, 75C Compressed air inlet Compressed air outlet Compressed air inlet Compressed air outlet Port size (E) (A) (D) Port size (A) (D) (E) (B) (B) (C) (C) Port size Rc Applicable

CJ5-S

Lead wire length symbols: 3 mL (Example) G5BAL 5 mZ (Example) G5BAZ For details about auto switches with pre-wire connector, refer to page 10-20-66. Mounting Bracket Part No.

MVGQ

For details about auto switches with pre-wire connector, refer to page 10-20-66.