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The element replacement procedure for SFB can be downloaded via the SMC website. -9- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved -10-

How to order P.10 5. Replacement parts P.11 6. How to replace the element P.12 7. Dimensions P.16 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Additional Module Procedure P17 10. Element Replacing Procedure P18 2 Safety Instructions Safety Instructions Safety Instructions Safety Instructions Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Dimensions 10 Pressure Relief 3 Port Valve with Locking Holes Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

) 3R () PE 3R PE 2A / (VBA1-10) P1 O PE 3R 02A 3R 2A / 2A -9VEX-OMO0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010 SMC Corporation All Rights Reserved VEX-OMO0001

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes). : The Pressure switch will also output during setting. 1. Press the button once in measurement mode.

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2018 SMC Corporation All Rights Reserved No.PS-OMG0009-D

(Recommended torque: 0.9 10% Nm) Summary of Product parts LATVIA (371) 781 77 00 Environment Dzelzavas str. 120g, Riga, LV-1021, Latvia Warning This device complies with Part 15 of the FCC Rules.

VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / / / / / 3 () () () 1 DC AC VT307 3 3 3 VF1000 VF1000 VF1000 VF1000 31 EXH VF3000 VF3000 VF3000 VF3000 EXH (DXT155-17-1A) VF5000 VF5000 VF5000 VF5000 () EXH (DXT156-20-1A,DXT156-20-3A) ( ( ( ( ) ) ) ) () 4 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / / / / / -10

Revision history :Vo 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved VP4_50-OMU0001

16 No.VQZ100V-OMT0001 Revision history TW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.VQZ100V-OMT0001

10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10

AC ( )() DC24V 16Nm 9 VFR6000-OMQ0001 VFR6000 Series/ / / / ) DIN DIN DIN DIN / / / / DIN 90 10 VFR6000-OMQ0001 () X () [3(EB)4(EA) ] () (PE) 11 VFR6000-OMQ0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 12 VFR6000-OMQ0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Uni thread size after tightened by hand (Nm) (deg) 1/8 30 to 60 3 to 5 2) The gasket can be reused up to 6 to 10 times. It can be replaced easily when it has sustained damage. A broken gasket can be removed by holding it and then turning it in the same direction as loosening the thread. If the gasket is difficult to remove, cut it with nippers, etc.

No.VG300**-OMI0003-A R / / / / -2,3 -4 -4 -5 -5 -5 -5 -5,6 -6 -6 -7,8 -9 -10 -1No.VG300**-OMI0003-A V V V VG342 G342 G342 G342 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines.

O. 1(P) 14 No.VP300-OMP0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved No.VP300-OMP0001

For example, install a ventilation opening, etc. in order to prevent pressure from increasing inside of the confined area and to release the heat generated by the valve. 10. Extended periods of continuous energization If a valve will be continuously energized for an extended period of time, the temperature of the valve will increase due to the heat generated by the coil assembly.

M4 180 4 O 9 VT317**-OMH0003-A , , [3R] *N.O.[1P] , () 10 VT317**-OMH0003-A No. 1 ISO VG 32 [3R] *N.O.[1P] 1. 2. 3. 4. 5. 6. 7. 11 VT317**-OMH0003-A A VW : LW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

N.C. 2 180 N.C.N.O. 3Nm DIN ( 8 VT325-OMT0001 () ( AC) 9 VT325-OMT0001 No. 1(ISO VG 32) (R) 10 VT325-OMT0001 Revision history First edition: TX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015