SMC Corporation of America
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wiring diagram Analog output, voltage type Brown Blue White Breathing hole M3 x 0.5 Monitor output voltage Black 2 14-8-11 12 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14-8-12 13 Electro-pneumatic Regulator Series ITV1000/2000/3000 F.R.L.

12 12 12 12 12 How To Order Series SYJ3000 Preferred Option Program How To Order: Manifold (Common SUP/Common EXH) Type 20(5 Port / Body ported type) Applicable solenoid valve: SYJ3 20-M3 SYJ3 23-M3 SS5YJ3--20-05 AB Port M3 0.5 Applicable blank plate ass'y: SYJ3000-21-1A Valve stations 02 2 stations : : P Port M5 0.8 R Port M5 0.8 20 20 stations Type 31(4 Port / Base mounted type) Type

Check if there is a noise source An over current error (Er1 and 2) is indicated. (2)Check if the power supply voltage is in the range of 12 to 24 VDC. (2)Supply power voltage of 12 System error to 24 VDC.

connector (XF1/XF2) Fig. 3-10 Pin allocation of M12 4 pins socket D-coded connector for EX245-SPN3A 19 No.EX-OMW0011-B NOTE When you use the EX245-SPN2A/EX245-SPN3A and the Autonegotiation function is disabled, you must select the correct network cable, refer to Fig 3-11, 3-12.

HEB Anchor bolt fixing position A Anchor bolt fixing position B HED 1100 (Dimension of anchor bolt fixing bracket) 756 136 1020 (Dimension of anchor bolt fixing bracket) HEA 12 x 12 670 43 670 138 8 x 12 IDH (850) (Thermo-chiller dimension) 700 (715) (Thermo-chiller dimension) 627 43 617 752 50 (954) (Thermo-chiller dimension) 19 76 984 19 (1035) (Thermo-chiller dimension) 1064 View A-A View

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Warning 5 VN-OMA0002-D Valves for Fluid Control Precautions 3 Be sure to read before handling.

Warning 5 VN-OMA0005-D Valves for Fluid Control Precautions 3 Be sure to read before handling.

C 2 x M depth ML 11.6 P depth PL Air supply port 4 x M depth ML 4 x M depth ML 16.5 16.5 16.5 D D D XT661-10A-(R, L) XT661-8A-(R, L) P depth PL Air supply port P depth PL Air supply port 45 45 45 45 P.C.D. C P.C.D. C 4 x M depth ML 4 x M depth ML 16.5 16.5 D D ZP3 (mm) ZP3E Part no.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

IODD file 1 D-MP025A/B/C SMC-D-MP025-ymmdd-IODD1.1 2 D-MP050A/B/C SMC-D-MP050-ymmdd-IODD1.1 3 D-MP100A/B/C SMC-D-MP100-ymmdd-IODD1.1 4 D-MP200A/B/C SMC-D-MP200-ymmdd-IODD1.1 : "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.

Model ASV310F/410F/510F Applicable tubing O.D. d (Hexagon width across flats) Metric Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Details P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this P Regeneration option C terminal. D Connect the control circuit power supply.

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

SYJ312-5LPZ-M3 W7WA75000mm Assy Ass'y SYJ312-5W1ZE-M3 13 No.SYJ300-OMU0003 SYJ Series M8 10COM2 B 12 DCU+COM-COM 1 3 4 L 300mm V100-49-1-1 500mm V100-49-1-2 A B A B A B A B 1000mm V100-49-1-3 A B COM (+)(-) COM (+)(-) 2000mm V100-49-1-4 5000mm V100-49-1-7 (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) 1 12 2 3 4 12 12326 Z-COM+COM A 26MIL B 14 No.SYJ300-OMU0003

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

As a guideline, turn 90o from the position where the mounting screw starts to become tight. 19 - < Applicable Auto switches > Solid state switch D-F59F5P D-J59J51F5BAL D-F59WF5PWJ59W D-F59FF5NTL Reed switch D-A53A54A56A64A67 D-A59W How to mount and move the auto switch Fig. 9 Fix the auto switch to the auto switch mounting bracket using auto switch mounting screw (M4).