Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. AK ASS ASR ASF 15-9-25

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series.

Speed Controller with

Applicable model D5 L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS-10L AS1002F3.4 14.8 18.3 11 27.5 19.5 3.4 4.9 7.3 12 1 AS-20L AS2002F 15.6 19.6 12.6 29 21 1.2 AS-25L AS2052F 4.5 19.6 24.6 17 38 28 4.5 6.5 9.5 15.5 AS-30L AS3002F 24.8 29.8 22 43 33 1.4 AS-40L AS4002F 25.7 30.7 28 49 39 3.5 18.2 23.2 11 3.5 18 11.3 1.6 AS-20D AS2002F 18.6 23.6 12.6 19.6 AS-25D AS2052F 4.5 4.4 22 27 17 4.4 25.8

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-34

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

PS-OMH0005CN

No.PS-OMH0005CN-D // PSE200 2 8 9 10 13 13 15 17 18 22 24 27 28 29 36 36 37 -1No.PS-OMH0005CN-D (ISO/IEC)(JIS) 1 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

PFxx-OMP0001CN

OFF -48No.PF-OMP0001CN-F [F81] 55 <> [F81] [F81][Pin] [Pin][] [F81] -49No.PF-OMP0001CN-F [F90] <> [F90] [F90][ALL] [ALL][] [oFF] [on] "" 2 [F90] -50No.PF-OMP0001CN-F 1 [rEF] 2 [Uni] 3 [oU1] OUT1 4 [1ot] OUT1 5 [ ] OUT1 6 [ ] OUT1 7 [CoL] OUT1 8 [oU2] OUT2 9 [2ot] OUT2 NPN2PNP2 10 [ ] OUT2 11 [ ] OUT2 12 [rES] 13 [FLo] 14 [rEv] 15 [inP] 16 [FrE] 17 [SAv] 18

PFxx-OMO0007CN

OUT1 DC1224V DC1224V DC(-) DC(-) Max.80 mA 1.5 V 6815 V 1 k 69420 mA 12 V300 24 V600 Max.30 V80 mA 1 V 2815 V 1 k 29420 mA 12 V300 24 V600 -40No.PF-OMO0007CN PF2A7--28--X560 PF2A7--68--X560 PF2A7--29--X560 PF2A7--69--X560 (15 V) (420 mA) 12 V 300 24 V 600 1 k 5F.S. 1 s A B 1 V 5 V 4 mA 20 mA 1 NL/min 10 NL/min PF2A710 3.5 CFM10 -2 35.0 CFM10 -2 5 NL/min 50 NL/min PF2A750 18

LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

IZ-OMU0031-CN

Doc.IZ*-OMU0031 / Series IZE11 2 7 8 10 10 11 14 15 18 18 F0 19 F1 OUT1 20 F2 OUT2 22 F3 22 F4 23 F5 24 F6 25 F98 26 F99 27 28 31 32 32 34 -1No.IZ*-OMU0031 1) (ISO/IEC)(JIS) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

HRX-OM-Z015

ASCII) . 3-8 3.10.2 CRC(RTU) . 3-8 3.11 EXPLANATION OF FUNCTION CODES . 3-10 3.11.1 Function code04 Reading multiple registers .3-10 3.11.2 Function code16 Writing multiple registers .3-13 3.12 NEGATIVE RESPONSE . 3-14 3.13 REGISTER MAP . 3-16 3.13.1 Circulating fluid discharge temperature .3-17 3.13.2 Circulating fluid discharge pressure .3-17 3.13.3 Status flag .3-17 3.13.4 Alarm flag .3-18

High Vacuum L Type Valve

Note 2) Heaters are not available for size 16. 18 XL-OMS0001-B Revision history A Heater Replacement Procedure added SZ B Product Specific Precautions added. Maintenance part indication revised. Erroneous descriptions corrected. Format changed.

XL-OMY0002

80 160 200 300 800 L/S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46 200 360 660 1350 3000 5150 3 3 cm O.5MPa 2.5 12 15.5 30 42 54 54 M5 Rc1/8 Rc1/4 [kg] 0.5 1.2 1.8 3.4 5.6 11.5 20 1 2 [Y-VAC2] 5 3 1 1mm 32 L/SP=0.1MPa 30 6 P11) 28 XLD-100 XLD-160 L/s () P=0.1MPa 26 24 22 20 XLD-63 XLD-80 18

CG1x-OM0006N

80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416 3-2. 2040 , 3-2-1. 2 50 542 17 3-2-2. 1 4 1 2Assy 2 5 4. 5. 3) , 6 6. 18

MGP-OM0242Q

Auto Switch 18 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

RS2H-OM0045P

D-A9(V):0.100.20Nm D-M9(V):0.050.15Nm 90 7-3-2.D-P3DW M2.5X9.5L1 2 M2.56L,M2.59.5L M2.56L () (M2.59.5L) (M2.56L) -18 M2.56L,M2.59.5L0.20.3Nm 19 - 8. 8-1.

CEx-OMQ0010

No.CE-OMQ0010-C CE2 CE2 SMC 1 2 2 2-1. 89 2-2 10 2-2-1. 10 2-2-2. 11 3 1213 4 4-1. 14 4-2. 14 4-3. () 15 5 5-1. 16 5-2. 16 5-3 17 5-4 1718 6 6-1. 18 6-2 19 6-3. 19 7 7-1. 20 7-2. 2021 8 8-1 21 8-2. 2122 8-3. 22 8-4. 23 8-5. 2324 1 1) (ISO/IEC)(JIS) 2) *1) ISO 4414:Pneumatic fluid power General rules relating to systems.

MHx-OMM0057

40 (MPa) 0.15~0.6 0.1~0.6 () -10~60 (mm) 0.1 () (N) 0.5MPa 14 45 74 131 228 396 () 10,16,20,25 40mm 32,40 80mm 4 - 3. 3-1 3-2 3-3 1 ISO VG32 5 - 3-4 Nm mm Nm mm MHL2-10D M4X0.7 1.4 5 MHL2-10D M4X0.7 2.1 8 MHL2-16D M5X0.8 2.8 7 MHL2-16D M5X0.8 4.3 10 MHL2-20D M6X1 4.8 7 MHL2-20D M6X1 7.3 12 MHL2-25D M8X1.25 12 7 MHL2-25D M8X1.25 17.7 16 MHL2-32D M8X1.25 12 11 MHL2-32D M8X1.25 18

MHx-OMZ0003

M3x7 0.59Nm 18 - (0.7mm) 19 - 5-3.

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Wiring of cables / Common precautions 18 9. Electric actuators / Common precautions 19 9.1 Design and selection 19 9.2 Mounting 20 9.3 Precautions for Use 20 9.4 Operating environment 21 9.5 Maintenance 22 9.6 Precautions for electric actuator with lock 23 10.