NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

VQ4000

specications VQ 1/2 Type of actuation Nil Q CE-compliant 2-position single 3-position closed center Nil Side ported B Bottom ported VQ 4/5 VQ 4/5 (A) 4 (B) 2 (A) 4 (B) 2 1 3 Note) CE-compliant: For DC only.

Regulator for 2 MPa Series ARX20

SUP OUT Component Parts Replacement Parts No. q w No.

PF3W7x-X445.eng

Other parameter settings Nominal thread size Tightening torque Set value P_1 Hysteresis H_1 Item Default setting / With the temperature sensor in parenthesis Rc(NPT)3/8 22 to 24 Nm Flow [L/min] [F 3] Digital filter setting 1 second Rc(NPT)1/2 28 to 30 Nm [F10] Selection of sub screen Display of set value (Display of fluid temperature) Rc(NPT)3/4 28 to 30 Nm Mounting Never mount the product

HEC-OM-S019

Signal Style and Part No. 5 4 3 2 1 5 4 3 2 1 Temperature sensor cable length N L E Nil Standard Option/function Remote function 1 : +24V 2 : 24V COM (See section 3 remote ON/OFF function) 7 Output Cut off Alarm Common 6 Output Cut off Alarm a contact (OPEN During Alarm) 8 Output Cut off Alarm b contact (CLOSE During Alarm) 9 Temperature Alarm a contact (OPEN During Alarm) 11 Temperature

PIROT OPERATED 2 PORT SOLENOID VALVE

Do not service or attempt to remove product and machinery/equipment until safety is confirmed. 3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed. 3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed. 3.

NVZseies

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

VM100F

Construction Side ported Bottom ported t y w u q q w u y t 3(R) (3-port only) 3(R) (3-port only) Non-actuated Non-actuated !4 i !0 2(A) 1(P) r o e !3 !1 !2 !3 e o r !0 i !1 !2 2(A) 1(P) Actuated Actuated 2(A) 1(P) 2(A) 1(P) Component Parts No. Description Material Note 1 Valve PBT 2 Valve sheet A PBT 3 Valve sheet B PBT 4 Valve sheet C PBT No.

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

v ffi q] o10 (3/8") Clevis pin included 30 Asrrc I SERIES NCJ2 Standard Type: Single Acting/ Spring Return, Spring Extend Reed Switch/D47'C8 TYPe Auto switch Spring extend/D-C7'C8 tYPe Spring retum/Dc7'C8 tYPe l @4 er D-C73C.60C tYPe D.C73C.C8oC type Solid State Switch/D'H7A'HzB Tvpe Spring teturn/DH7A' H7B tYPe Sp.ing extend/DH7A' H78 tYPe + H 5 r"l @3P D-HTtype \ D.H7C type D-H?

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

Vacuum Saving Valve

Construction Vacuum generator side Vacuum generator side u w r t No.0.8 e y For the direction of the product, refer to 4 of back page 3. Pad side q u Description Component Parts Material Surface treatment No.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

, , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

VNC

6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 4 7 1 5 6 24 VDC 12 VDC 7 240 VAC 50/60 Hz 15 (11) 2 Nil: Non-locking push type 9 Other 20 (14) 3 Option 25 (16) 4 Valve size 2 to 9 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F 40A 1 1 2 40 (28) 6 1 B 1 2 Flange 40F Electrical entry/With light/surge voltage suppressor 50A Nil Air operated 2 50 (33) 7 GS Grommet with surge voltage suppressor

VFM300

Description Material POM Urethane rubber Note ZDC ADC Material Note No. q w e r t y u i o !0 !1 Description Plunger Cushion for end cover Pilot body Body Metallic plated Metallic plated Black zinc chromated !2 !3 !4 !5 !6 !7 !8 !

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

0 w y t r Size q With auto switch (With auto switch unit and built-in magnet) * Refer to page 99 when the auto switch unit is needed separately. o Electrical entry/Lead wire length e Shaft type 10 15 20 30 40 Nil Grommet/Lead wire: 0.5 m M Grommet/Lead wire: 1 m L Grommet/Lead wire: 3 m CN Connector/Without lead wire C Connector/Lead wire: 0.5 m CL Connector/Lead wire: 3 m * Connectors are

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Moisture Control Tube

90 Double 1 90 90 CRQ2 10 180 90 1 MSQ 2 90 3 Note) If the piping is longer than the above tube length, the IDK-200 may be necessary. 3 Moisture Control Tube Series IDK Model Selection Selection Procedure Check the presence of condensation. 1 Select the length of moisture control tube for the condensation area. 2 (1) The presence of condensation can be verified by the dew point and Kv value

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Zinc alloy Body A w Brass Handle Electroless nickel plated e Brass Body B Electroless nickel plated r Brass Needle Electroless nickel plated t Brass Needle guide Electroless nickel plated y Brass Seat ring (1) Electroless nickel plated(3) u Brass(2) Lock nut i U seal NBR o O-ring NBR !0 O-ring NBR !1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !

Air Suction Filter With One-touch Fittings Series ZFB 1

16 " " Polyurethane Y Yellow 1 4 " 3 8 " 1 2 " 3 16 " 1 4 " 3 8 " 1 2 0604 0805 0806 1065 1075 A07 A11 A13 B05 B07 B11 B13 Metric size G Green C Note) Clear Inch size Note) Polyurethane only. 13-10-6

3 Way,3 Port Solenoid Valve NVZ Series

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w