Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 3, Actuator Series: LEY (Rod Type), Size: 25, Motor Mounting Position: Top Mounting Type, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm), Stroke: 100mm

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 150mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 8 (8m), Controller Type - LEC, JXC: CP1 (JXCP1, PROFINET), I/O Cable Length for

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 400mm, Motor Option: None, Rod End Thread: Female, Mounting: L (Foot), Actuator Cable: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I/O Cable Length for LEC: Without

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 200mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I/O Cable

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I/O Cable

Parallel I/O Type: 6 (PNP), Mounting: 7 (Screw Mounting), Cable Connector: 1 (1.5), Actuator: LEY, Type: Rod Type, Body Size: 25, Bearing Type: None, Motor Mounting: Top Mounting Type, Lead: B (16: 5mm; 25: 6mm; 32, 40: 8mm), Stroke: 50mm

Electric Actuators

5 to 50C 5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric power 180VA 300VA 300VA 300VA 640VA 180VA 300VA 640VA 180VA 300VA 640VA 640VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction Maximum positioning point setting Can be selected between the motor side and the side opposite the motor. 1008

VFR

Note 3) Solenoid valve: Max. 50C Note 4) Synthesized effective area with 2 position.

Process Pump

The compatibility is indicated for fluid temperatures specified for the respective products (50C or less). 7. Do not use liquids that will cause the wetted sealant to swell.

70pvpump

: based on 25C) 2% F .S. or less (0 to 50C: based on 25C) 5% F.S. or less (0 to 60C) ZSE30: 0.2 F.S. 2 digits or less ISE30: 0.2 F.S. 1 digit or less Repeatability 1% F.S. or less 0.2% F.S. 1 digit or less 0.5% F.S. 0.2% F.S. 1 digit or less Hysteresis mode: Variable Window comparator mode: Variable Hysteresis mode: Variable Window comparator mode: Variable Variable 1 to 10% Fixed 3% F.S.

XL

For models with a solenoid valve, the temperature of the solenoid valve section should be no greater than 50C. All models 1. When controlling valve responsiveness, take note of the size and length of piping, as well as the Cv factor (flow rate characteristics) of the actuating solenoid valve.

Vacuum Unit

(Refer to page 33.) 17 A Vacuum Unit ZK2mA Series Specifications General Specifications Valve Common Specifications Model4 ZK2-VAmK ZK2-VAmR ZK2-VAmJ 5 to 50C Without pressure sensor/switch With pressure sensor 0 to 50C With pressure sensor 5 to 50C Pressure switch with energy saving function Fluid Air Operating temperature range (No condensation) Type of actuation5 Supply valve: N.C.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating

Compact Manifold Regulator

Note 2) 5 to 50C when the digital pressure switch will be used.

Dedicated Controller Series LC1 Uniaxial Type

5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric energy 180VA 640VA 300VA 300VA 640VA 100VA 300VA 640VA 640VA 300VA 180VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return function Maximum positioning point setting With magnet switch as adjacent switch, and encoder Z phase signal as home position signal

Multistage Ejector (N)ZL Series

Fluid Air Operating pressure range Internal pilot type 0.2 to 0.5MPa (29 to 72 psi) 5 to 50C (41 to 122F) Ambient and fluid temperature Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Slotted locking type With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

3cP) or less Detection style Karman vortex Flow rate measuring range 0.4 to 4l/min 1.8 to 20l/min Note 1) 4 to 40l/min Operating pressure range Note 2) 0 to 1MPa 0 to 0.6MPa Proof pressure Note 3) 1.5MPa 0.9MPa Operating fluid temperature 0 to 90C Linearity Note 4) 2.5%F.S. or less (at 25C water) Repeatability 1%F.S. or less (at 25C water) Temperature characteristics 5%F.S. or less (0 to 50C

For Water Digital Flow Switch Series PFW

vortex Detection type 2 to16l/min 0.5 to 4 (setting is 0.6 to 4) l/min 5 to 40l/min Flow rate measurement and setting range 0.1l/min 0.05l/min 0.5l/min Minimum setting unit l/min, gal (US)/min Real-time flow rate Note 1) Display units l, gal (US) Accumulated flow Operating pressure range 0 to 1MPa Withstand pressure 1.5MPa 0 to 9l Accumulated flow range Operating temperature range 0 to 50C

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

Multistage Ejector Series ZL

Type of valve actuation Air Fluid 0.2 to 0.5MPa Operating pressure range Internal pilot type 5 to 50C Ambient and fluid temperature 25ms or less Response time (for 0.5MPa) Note 1) 5Hz Maximum operating frequency Non-locking push type, Slotted locking type Manual operation With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust type