MHT2 X5060 DZ Bore size Note) When the toggle is used to grip a workpiece, if the rod is pushed or a load is placed on it, the workpiece may be dropped since the toggle mechanism does not work. Dimensions (Dimensions other than specified below are the same as the standard type.)
VFS2320-D/DZ/Y/YZ VFS2420-D/DZ/Y/YZ VFS2520-D/DZ/Y/YZ Lead wire O.D.
to 10-*DZM Soft start valve with lock out H Air direction Nil Left to Right F Port thread Body size R Right to Left Nil Rc 20 1/4 N NPT 30 3/8 F G 40 1/2 C E D 50 3/4, 1 Electric entry 1(P) 2(A) Port size Manual lockout Nil 1/4 (AVL2000) 02 D type DIN connector D Rated coil voltage 3/8 (AVL3000) 03 Port size D type DIN connector with indicator light & suppressor Manual lockout Nil 3(R) DZ
as port A) Valve stations 1 station 01 Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 20 stations 20 Port A: Rc(PT) 1/8 4 3 Port Direct Operated Poppet Series VKF300 Dimensions/Manifolds Body Ported Type Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ
Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Boron11 Trifluoride Chlorine 11BF3 Cl2 Argon Chlorine Trifluoride Ar ClF3 Arsine Carbon Monoxide AsH3 CO Boron Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen
How to Order 307 5 F G 1 V T 01 Body type T O Body ported For manifold CE-compliant Valve option Nil Q None CE-compliant Nil E Y V W Standard type Continuous duty type Energy-saving type Vacuum specification type Electrical entry and light/surge voltage suppressor: D/DO/DZ/DOZ only Bracket Nil F None With bracket Energy-saving type, Vacuum specification type Semi-standard Pressure specifications
open) B VP Valve option Electrical entry S070 Nil For general G Grommet Conduit terminal DIN terminal TL D V For vacuum/low pressure T VQ Port size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ
Symbol Thread type R Rc N NPT F G DIN terminal with light (With surge voltage suppressor) V V V All voltages DZ DIN terminal without connector (With surge voltage suppressor) V V V All voltages o Option u Rated voltage AC DN DC Symbol Option Nil None Symbol Rated voltage 5 24 VDC 6 12 VDC Symbol Rated voltage Symbol Rated voltage 1 100 VAC 7 240 VAC 2 200 VAC 8 48 VAC 3 120 (110) VAC B 24
/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.
VFR331 -DZ 3 position exhaust center: VFR341 -E, VFR341 -DZ 3 position pressure center: VFR351 -E, VFR351 -DZ 2-5.6 (Mounting hole) 2-5.6 (Mounting hole) Other dimensions are the same as the single type.
VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.
closed center: VFR331 -E, VFR341 -DZ 3 position exhaust center: VFR341 -E, VFR341 -DZ 3 position pressure center: VFR351 -E, VFR351 -DZ 0 1 0 1 0 1 2 x 5.6 2 x 5.6 5 5 69 69 (Mounting hole) (Mounting hole) 41 50 37 52.5 37 52.5 180 170 Other dimensions are the same as the single type.
N.C. / Manifold N.O. / Manifold COM. / Manifold D -DIN terminal DS -DIN terminal with surge voltage suppressor DL -DIN terminal with light DZ -DIN terminal with surge voltage suppressor and light DO -For DIN terminal (without connector, gasket is included.)
D -DIN DS -DIN with surge voltage suppressor DL -DIN with light DZ -DIN with surge voltage suppressor and light DO-For DIN (without connector) Connector 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Refer to the table (3) shown below for availability.
DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 7 Plate Cylinder with Lock Series MLU Single knuckle joint Double knuckle joint MM C (R1) Sphere, ball R (R1) MM NDH10 NDH10 A1 A1 NX+0.4 +0.2 E1 NX -0.2 -0.4 NZ E1 U1 U1 L1 NO NL L1 NO NL (mm) Part no.
) Light/surge voltage suppressor (DZ) M12 connector type Surge voltage suppressor (WS/VS) M12 connector type (Non-polar type) Surge voltage suppressor (WS/VS) Light/surge voltage suppressor (WZ/VZ) Light/surge voltage suppressor (WZ/VZ) 8 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 6 Be sure to read this before handling.
Nov Y TY UY VY DY EY FY If a lubricant is used in the system, use turbine oil Class 1 (no Dec Z TZ UZ VZ DZ EZ FZ additive), ISO VG32.
Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21 SiH2Cl2 CHCl2F Silane Chlorine SiH4 Cl2 Trichlorosilane Chlorine Trifluoride SiHCl3 ClF3 Sulfur Dioxide Carbon Monoxide SO2 CO Diethyltelluride Germane Te(C2H5)2 GeH4 Tungsten Hexafluoride Hydrogen Sulfide WF6 H2S
VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil assembly with terminal part no. Coil no.
suppressor 2 200 VAC, 50/60 Hz M plug connector, With light /surge voltage suppressor B Locking type (Tool required) MZ 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC KZ K plug connector With light/surge voltage suppressor K Note) K plug connector DIN terminal Option D KS K plug connector With light/surge voltage suppressor 6 12 VDC DIN terminal, With light /surge voltage suppressor DZ