Clean Regulator

flow Valve springs are partitioned by the diaphragm Pulsation suppressing design Consistent clean room production Washed, assembled and inspected in a Class 100 environment, and sealed in double bags Step response comparison Grade A Grade B Manufacturing process SRH Current regulator Pressure Pressure P1 P1 Parts assembly Parts assembly Degrease/Wash Degrease/Wash P2 P2 Pure water (16M-cm

VCHR

A screwdriver of approximately 20 to 30 cm can also be used for easy adjustments, using the (11) hole on the width across flats. Piping Warning 1. When tightening a screw on the piping material, use the recommended torque, holding the female side. Insufficient torque will cause looseness or inferior sealing. However, overtightening will cause damage to the thread.

D. P. Lube ALD600/900 Series

The condition of the generation of micromist can be checked from the oil filler port. 2 2 Fluid Air Proof pressure 1.5 MPa Operating pressure range 0.15 to 1.0 MPa 0.1 to 1.0 MPa 0.03 to 0.1 MPa 0.05 MPa 102 L/min (ANR) Operating pressure differential range Recommended press. differential Note 3) Press. differential setting min. flow 2000 5000 2000 5000 Bowl capacity between levels (cm 3)

Large Flow Lubricator AL800/900 Series

Large Flow Lubricator AL800/900 Series Standard Specifications Model AL800 AL900 Individual lubrication Large flow type 4 1 1 2 1 1 2 Port size Air 1.5 MPa 1.0 MPa Fluid Proof pressure Max. operating pressure 1 : 460 1 : 650 4 1 Note) 2 1 1800 Min. operating flow (L/min (ANR)) Bowl capacity (cm 3) 380 (Capacity between levels 350) Turbine oil Class 1(With no additives), ISO VG32 Recommended

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Bumper/Rod end thread Rubber bumper & Rod end female thread Bore size 12 16 20 25 C 12 mm 16 mm 20 mm 25 mm Rubber bumper & Rod end male thread CM Double acting Action D Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM Note 1) L3 L4 L6 L5 B3 B4 B6 B5 LM Note 1) With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4 One-touch fitting Bottom ported elbow with 6 One-touch fitting Bottom

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

Bore size 20 25 32 40 50 63 80 100 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Body option Nil C M CM Standard (Rod end female thread) With rubber bumper Rod end male thread With rubber bumper, Rod end male thread Action D Double acting Built-in Magnet Cylinder Model Port thread type If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

Action Nil F C M Standard (Rod end female thread) With boss in head side With rubber bumper Rod end male thread Note) D Double acting Piping Cylinder stroke (mm) Combination of body options (CM, FC, FM, FCM) is available. Note) Air-hydro type with rubber bumper is not available. Note) Bore sizes available w/ Onetouch fittings are 32 to 63.

HAA

Do not to obstruct the aftercooler's vent inlet and outlet, and install the equipment more than 20 cm away from the walls or other equipment. 2. Install the aftercooler in a location that facilitates maintenance and inspection. 3. Install the aftercooler in a location with minimal vibrations. 4.

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) 3 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC 4 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC 5 q Ambient

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM Note 1) L3 L4 L6 L5 B3 B4 B6 B5 LM Note 1) With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4 One-touch fitting Bottom ported elbow with 6 One-touch fitting Bottom

Thermo-chiller

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 3 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 460 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 460 VAC 5 q Ambient temperature

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note 5)

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC

Series PPA PPA100/101/102 Compact Manometer 4

PPA100 for high press. 10 to 100 kPa 0.1 to 1 MPa Rated pressure range 101 to 10 kPa Pressure display 3 digit LCD back light 1/100 Pressure display discrimination 1 1 kPa 0.01 MPa 5 mmHg Note) kgf/cm 2 0.01 0.01 0.1 Mini. display units 0.2 inHg 0.1 0.1 1 PSI 0.01 0.01 0.1 bar Error display Over pressure, Memory data error, Change battery sign Peak/bottom display, Backlight, Auto power

SFA100/200/300 Series Clean Gas Filter: Cartridge Type/Disc Type

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 SF SF NPT 1/

Variable impact force

Air Shocker Series XT316 Variable impact force Strong, stable impact force No lubrication required Bridge Adhesion Specifications Model XT316-30B XT316-40B XT316-63B XT316-80B XT316-100B Bore size Operating pressure MPa (kgf/cm 2) 40 30 63 100 80 0.4 0.6 (4.1 6.1) MAX. 15 Impact cycle (cycles/min) Air consumption ( /cycles) (Note 1) Impact energy (kgm) (Note 2) Weight (kg) 0.75 0.17 0.31

The ITV series is IP65 equivalent.Controls air pressure in proportion to an electric signal., Available in MPa, kgf/cm², bar, PSI, and kPa units., Pressure range of 0.005 to 0.9MPa., Available port sizes 1/4 and 3/8., Mounting bracket option. REGULATOR, ELECTROPNEUMATIC. 3000 Size Electro-Pneumatic Regulator. 720.00000 lb. 853.

The ITV series is IP65 equivalent.Controls air pressure in proportion to an electric signal., Available in MPa, kgf/cm , bar, PSI, and kPa units., Pressure range of 0.005 to 0.9MPa., Available port sizes 1/4 and 3/8., Mounting bracket option., Operation Manual, REGULATOR, ELECTRO-PNEUMATIC, INSTRUMENTATION, IT/ITV0000/1000 E/P REGULATOR, CA, IT1000 1/8 INCPT VERSION, .55115 lb, ModelITV101