bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 200mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Male), Mounting: D (Double Clevis), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: C (20m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type), I/O Cable

Size: 32, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 350mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Male), Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: C (20m), Controller Type - LEC, JXC: 6P (LECA6, PNP, Step Data Input Type)

Size: 32, Motor Mounting Position: L (Left), Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Male), Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: C (20m)

bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

10%(A)(A)Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)(kg)UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%(A)(A)Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)(kg)UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%(A)(A)Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)(kg)UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%(A)(A)Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)(kg)UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)