Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo Motor

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type: LECA6 PNP, Servo Motor, Step Data Input Type

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3m, Controller Type: LECA6 NPN, Servo Motor

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type: LECA6 PNP, Servo Motor, Step Data Input Type

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 10m, Controller Type: JXC, Step Motor Controller

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type: JXC, Step Motor Controller, I/O Cable Length

Series: Clean Series Ball Screw Drive, Accuracy: High Precision Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller Type: -, I/O Cable Length: -, Protocol: -

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 1.5m, Controller Type: JXC, Step Motor Controller

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5m, Controller Type: JXC, Step Motor Controller

Series: Guide, Clean Series, Size: 32, Mounting Pitch: S, Stroke, mm: 50

Series: Guide, Clean Series, Size: 16, Mounting Pitch: S, Stroke, mm: 50

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

PF2A7H.eng

Other functions Danger: Rc(NPT)11/2 Rc(NPT)2 48 to 50 Nm Function selection mode Other functions Indicator LED (output) Indicates the output status of OUT1. LED is ON (Red) when OUT1 is ON. The LED flashes when an over current error occurs.

Trimmer Auto Switch

Series 10 16 20 25 32 40 50 63 80 100 125 MHZ2 3.0 5.5 6.5 8.0 7.5 MHZJ2 3.0 5.5 6.5 MHS2 (2 fingers) 1 4.0 4.0 6.5 6.5 8.0 6.5 MHS3 (3 fingers) 1 5.0 4.0 6.5 6.5 8.0 6.5 7.5 7.5 7.5 MHS4 (4 fingers) 1 5.0 3.0 6.5 6.5 8.0 6.5 MHC2 2 -10 to -10 to 11 16 Air cylinder Unit: mm Tube I.D.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

JIS Standard Hydraulic Cylinder Double Acting/Single Rod

CH2 H B B 50 100 CH D2 H B B 50 100 M9BW With Auto Switch With auto switch (built-in magnet) Port and cushion valve positions Refer to page 359. Bore size 32 40 50 Mounting type 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Made to Order specifications For details, refer to page 359.

PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

MXF

Low Profile Slide Table Series MXF How to Order MXF 12 50 M9BW Low Profile Slide Table Made to Order Refer to page 137 for details. Number of auto switches Bore size/ Stroke (mm) 2 pcs. 1 pc. n pcs. Nil S n 8 12 16 20 10, 20, 30 20, 30, 50 30, 50, 75 30, 50, 75, 100 Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

Centering Unit

4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series Dimensions P: Port side photo sensor mounted type B: Port back side

90

50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.