VM

0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

ARM10/11

Common supply bushing 136144-S Individual supply bushing 136144-K Single unit regulator / Port plug for regulator block 136144-S 136144-K Option A-A A Nil X17 None A-A A Oil-free 12 12 10 A A 8 8 15 15 10 14-4-38 21 Regulator Single Unit Type Series ARM10 How to Order F.R.L. ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

Common supply bushing 136144-S Individual supply bushing 136144-K Single unit regulator / Port plug for regulator block 136144-S 136144-K Option A-A A Nil X17 None A-A A Oil-free 12 12 10 A A 8 8 15 15 10 14-4-38 21 Regulator Single Unit Type Series ARM10 How to Order F.R.L. ARM10 06 B Z 1 AV AU 1 2 3 4 1.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 V.

LEJ-OM002xx

[LECSA] LEJS40 LEJS63 LEJB40 LEJB63 Series Lead symbol H A B H A B T Lead 24 16 8 30 20 10 27 42 Parameter Para.

AC Servo Motor Driver (Pulse input type/Positioning type)

Other than positioning mode: Actuator travel distance at 10 [m/pulse] per pulse. Positioning Mode: Minimum actuator travel distance of 1[m]. 28 - Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/LEYG25D LEY32/LEYG32 LEY32D/LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

CXT

Reed switch Solid state switch A B HS D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-A7H D-A80H 32, 40 D-F7, D-J79W D-J79, D-F7BAL D-F7W, D-F79F D-F7NTL Auto switch model D-A7H D-A80H A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 9.5 13.5 32.5 36 6.5 9 6.5 9 32.5 36 9.5 13.5 10.5 13 32.5 36 14.5 18.5 Long Stroke Bore size (mm) 32 40 10 13.5 32.5 36 18 24 10 13.5 18 24

ZPT/ZPX

24 3-M3 x 0.5 28 3-M3 x 0.5 G Width across flats 24 10 E 10 ZX F F E ZR Y Y 6 3 ZM 18 18 C C ZH A A B D B D ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Dimensions A (mm) ZL (mm) Model Model A B C D E F G Y B C D E F G Y ZY ZPT40HB-B8 ZPT40HB-A14

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

Series MXP Precision Air Slide Table

Switch operating range Stroke (mm) 20 41 29 47 35 Type 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B MXP10 Auto switch MXP12 3 Screwdriver (Grip diameter 5 to 6mm) MXP16 2 Color indication solid state switch D-F9BW(V), D-F9NW(V), D-F9PW(V) mm Switch operating range Stroke (mm) 20 42 28 48 34 Type 25 47.5 33.5 30 56 46 10 32 18 15 37.5 23.5 A B A B A B MXP10 MXP12

Pulse Valve

The maximum pilot piping I.D. is 10 mm. A For 3 mm to 5 mm Port size: 06, 10 55-JSXFA B A Enter the standard product number.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

S W X10 Guide type Slider guide S X10 Non-standard motor Series Limit switch Series 10 Series 20 Series 30 10 20 30 Cable entry direction Nil None B contact specification 2 pcs.

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

3 Port Air Operated Valve Series SYJA300 1

Also, take measures to prevent ingress of water and foreign matter from the breathing port of the diaphragm. 5-5-10 1 3 Port Air Operated Valve Series VGA342 How to Order SA 04 VGA342 A VA Port size Passage A Normally closed (N.C.) B Normally open (N.O.) Thread type Nil Rc F G N NPT T NPTF 04 1/2 06 3/4 10 1 SA VA JIS Symbol VM N.C. N.O.

One-touch Fittings

[mm] *1 D1 Weight [g] With a rib X (X) Y Nylon Urethane Applicable tubing M L1 Oval type Round type 4 1/8 KQ2L04-01GS1 10 8.2 7.7 10 10 14.8 16.2 17.2 13.3 4.6 3.3 3 4.8 1/4 KQ2L04-02GS1 14 8.2 7.7 10 10 14.8 21.7 21.1 13.3 4.6 3.3 3 14.3 Rib 4, 6 8 to 16 6 1/8 KQ2L06-01GS1 10 10.4 9.7 12 10 15.5 17.3 19.4 13.3 11.4 9 4.5 5.2 1/4 KQ2L06-02GS1 14 10.4 9.7 12 10 15.5 22.8 23.3 13.3 11.4

AIR COMBINATION

AC-OMQ0008-D PRODUCT NAME AIR COMBINATION MODEL/ Series AC10(A,B)-A AC20(A,B,C,D)-A AC25(B,C)-A AC30(A,B,C,D)-A AC40(A,B,C,D)-A Contents PAGE 1. PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1115 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9.

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

HRX-OM-X037

-T020-B-X61 Note) HRL200-W FGESA-10-T020A-G2 Note) Note) The filter shown above cannot be directly connected to thethermo-chiller.

HEC_W-E

UPPER AND LOWER LIMIT ARISES -9-2 FIG. 10-1 MOISTURE AIR DIAGRAM -10-3 vi Contents Table List Page No.